83994 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate; Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity Processes for achieving a desired geometry not provided for in groups -
METHOD FOR SELECTIVE ETCHING OF NANOSTRUCTURES
#2WAFER-LEVEL FABRICATION PROCESSES FOR FERRIMAGNETIC RESONATORS AND RESONATOR DEVICES
#3MANUFACTURE OF SURFACE RELIEF STRUCTURES
#4MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
#5CONSTRUCTION METHOD FOR 3D MICRO/NANOSTRUCTURE
#6Microelectromechanical system (MEMS) interconnect including spring body with at least two spring arms micromachined from silicon substrate
#7Manufacture of surface relief structures
#8METHOD FOR SELECTIVE ETCHING OF NANOSTRUCTURES
#9CONSTRUCTION METHOD FOR 3D MICRO/NANOSTRUCTURE
#10Production method for a micromechanical device having inclined optical windows, and micromechanical device having inclined optical windows
#11Method for selective etching of nanostructures
#12Additive manufacturing methods for modification and improvement of the surfaces of micro-scale geometric features
#13Protective wafer including inclined optical windows and device
#14Fence structure to prevent stiction in a MEMS motion sensor
#15Method for manufacturing a thin filtering membrane and an acoustic transducer device including the filtering membrane
#16Planar cavity MEMS and related structures, methods of manufacture and design structures
#17MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
#18Planar cavity MEMS and related structures, methods of manufacture and design structures
#19Planar cavity mems and related structures, methods of manufacture and design structures
#20Microelectromechanical transducer
#21Selectively controlling application of a self-assembled monolayer coating on a substrate of a device for facilitating a reduction of adverse effects of such coating on the device
#22Planar cavity MEMS and related structures, methods of manufacture and design structures
#23Methods for fabricating pressure sensors with non-silicon diaphragms
#24Planar cavity MEMS and related structures, methods of manufacture and design structures
#25Planar cavity MEMS and related structures, methods of manufacture and design structures
#26Device comprising a micro-electro-mechanical system substrate with protrusions of different heights that has been integrated with a complementary metal-oxide-semiconductor substrate
#27Planar cavity MEMS and related structures, methods of manufacture and design structures
#28Planar cavity MEMS and related structures, methods of manufacture and design structures
#29Assembly processes for three-dimensional microstructures
#30Method for manufacturing a thin filtering membrane and an acoustic transducer device including the filtering membrane
#31Method for selective etching of nanostructures
#32Fence structure to prevent stiction in a MEMS motion sensor
#33Microelectromechanical transducer
#34METHOD OF FORMING SURFACE PROTRUSIONS ON AN ARTICLE AND THE ARTICLE WITH THE PROTRUSIONS ATTACHED
#35Planar cavity MEMS and related structures, methods of manufacture and design structures
#36Planar cavity MEMS and related structures, methods of manufacture and design structures
#37MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN OBLIQUE SURFACE AND CORRESPONDING MICROMECHANICAL DEVICE
#38Planar cavity MEMS and related structures, methods of manufacture and design structures
#39Microstructure manufacturing method and ION beam apparatus
#40Planar cavity MEMS and related structures, methods of manufacture and design structures
#41MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
#42Laminate
#43Method for manufacturing a protective wafer including inclined optical windows and device
#44Planar cavity MEMS and related structures, methods of manufacture and design structures
#45Planar cavity MEMS and related structures, methods of manufacture and design structures
#46Planar cavity MEMS and related structures, methods of manufacture and design structures
#47Microelectromechanical device and method for forming a microelectromechanical device having a support structure holding a lamella structure
#48MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN INCLINED OPTICAL WINDOW AND CORRESPONDING MICROMECHANICAL DEVICE
#49Planar cavity MEMS and related structures, methods of manufacture and design structures
#50Planar cavity MEMS and related structures, methods of manufacture and design structures
#51Planar cavity MEMS and related structures, methods of manufacture and design structures
#52Structure for device with integrated microelectromechanical systems
#53MEMS device with isolation sub-frame structure
#54Planar cavity MEMS and related structures, methods of manufacture and design structures
#55Pressure sensor with support structure for non-silicon diaphragm
#56Methods for fabricating pressure sensors with non-silicon diaphragms
#57Planar cavity MEMS and related structures, methods of manufacture and design structures
#58Planar cavity MEMS and related structures, methods of manufacture and design structures
#59Miniaturized and ruggedized wafer level MEMs force sensors
#60Planar cavity MEMS and related structures, methods of manufacture and design structures
#61Planar cavity MEMS and related structures, methods of manufacture and design structures
#62Planar cavity MEMS and related structures, methods of manufacture and design structures
#63Planar cavity MEMS and related structures, methods of manufacture and design structures
#64Substrate Etch
#65Etching method for forming a carrier having inward side walls in particular for confining a droplet for capillary self-assembly
#66Planar cavity MEMS and related structures, methods of manufacture and design structures
#67Planar cavity MEMS and related structures, methods of manufacture and design structures
#68Method of manufacturing a MEMS microphone
#69Planar cavity MEMS and related structures, methods of manufacture and design structures
#70Planar cavity MEMS and related structures, methods of manufacture and design structures
#71Planar cavity MEMS and related structures, methods of manufacture and design structures
#72Planar cavity MEMS and related structures, methods of manufacture and design structures
#73Method for fabricating thermoplastic fluidic devices by orogenic growth and fluidic devices manufactured thereby
#74Methods for producing a cavity within a semiconductor substrate
#75Vertically hybridly integrated assembly having an interposer for stress-decoupling of a MEMS structure, and method for its manufacture
#76System on a chip using integrated MEMS and CMOS devices
#77METHOD TO IMPROVE SURFACE ROUGHNESS AND ELIMINATE SHARP CORNERS ON AN ACTUATOR LAYER OF A MEMS DEVICE
#78Process for fabrication of a micromechanical and/or nanomechanical structure comprising a porous surface
#79MEMS device with non-planar features
#80MEMS device chip manufacturing method
#81Method of forming surface protrusions on an article and the article with the protrusions attached
#82Method for producing a microelectromechanical device and microelectromechanical device
#83Semiconductor device having a micro-mechanical structure
#84Micro-electro-mechanical transducer having an optimized non-flat surface
#85Micro-electro-mechanical transducer having an optimized non-flat surface
#86Micro-electro-mechanical transducer having an optimized non-flat surface
#87Micro-electromechanical semiconductor component
#88Semiconductor component
#89Silicon etching method
#90Planar cavity MEMS and related structures, methods of manufacture and design structures
#91Method for varied topographic MEMS cap process
#92Apparatus and method for reduced strain on MEMS devices
#93Capacitive pressure sensor and a method of fabricating the same
#94Device comprising a spring and an element suspended thereon, and method for manufacturing same
#95System and method for formation of thin films with self-assembled monolayers embedded on their surfaces
#96Electromechanical transducer and method of producing the same
#97Planar cavity MEMS and related structures, methods of manufacture and design structures
#98Functional nanostructured “jelly rolls” with nanosheet components
#99Semiconductor manufacturing and semiconductor device with semiconductor structure
#100Methods for producing a cavity within a semiconductor substrate
#101Planar cavity MEMS and related structures, methods of manufacture and design structures
#102Micro-electromechanical semiconductor component
#103Method for the production of micro-electromechanical semiconductor component
#104Method for producing a microelectromechanical device and microelectromechanical device
#105Semiconductor pressure sensor and method of manufacturing semiconductor pressure sensor
#106Micro-electromechanical semiconductor component and method for the production thereof
#107Micro-electromechanical semiconductor comprising stress measuring element and stiffening braces separating wall depressions
#108Method for manufacturing a micromechanical structure, and micromechanical structure
#109Method of manufacturing liquid ejection head substrate
#110Methods of etching single crystal silicon
#111Etching trenches in a substrate
#112ACTUATOR, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS
#113Electromechanical transducer and method of producing the same
#114Cavity process etch undercut monitor
#115Composite sacrificial structure for reliably creating a contact gap in a MEMS switch
#116Semiconductor manufacturing and semiconductor device with semiconductor structure
#117High aspect ratio capacitively coupled MEMS devices
#118Micro-electro-mechanical transducer having an optimized non-flat surface
#119Planar cavity MEMS and related structures, methods of manufacture and design structures
#120Planar cavity MEMS and related structures, methods of manufacture and design structures
#121Planar cavity MEMS and related structures, methods of manufacture and design structures
#122Planar cavity MEMS and related structures, methods of manufacture and design structures
#123Planar cavity MEMS and related structures, methods of manufacture and design structures
#124Methods of manufacture for micro-electro-mechanical system (MEMS)
#125Planar cavity MEMS and related structures, methods of manufacture and design structures
#126Planar cavity MEMS and related structures, methods of manufacture and design structures
#127Method of manufacturing a micro-electro-mechanical system (MEMS)
#128Method for Fabricating a Micromirror
#129Integrated system on chip using multiple MEMS and CMOS devices
#130Semiconductor structures including square cuts in single crystal silicon and method of forming same
#131THINNING METHOD AND SILICON WAFER BASED STRUCTURE
#132Method for forming trenches in a semiconductor component
#133Micro-electro-mechanical transducer having a surface plate
#134Method, apparatus and program for manufacturing silicon structure
#135Device made of single-crystal silicon
#136MEMS ultrasonic device having a PZT and cMUT
#137High aspect ratio all SiGe capacitively coupled MEMS devices
#138Method for manufacturing a micromechanical chip and a component having a chip of this type
#139Method of fabricating a structure by anisotropic etching, and silicon substrate with an etching mask
#140Silicon processing method and silicon substrate with etching mask
#141Micro-electro-mechanical transducer having a surface plate
#142Semiconductor structures including square cuts in single crystal silicon
#143Method of fabricating micro-vertical structure
#144Method of manufacturing a structure based on anisotropic etching, and silicon substrate with etching mask
#145SOI substrate and semiconductor acceleration sensor using the same
#146Device made of single-crystal silicon
#147Silicon structure and method of manufacturing the same
#148Method for plasma etching of positively sloped structures
#149Method for manufacturing physical quantity sensor
#150Wet etch suitable for creating square cuts in si
#151Optical components and production thereof
#152Wet etch processing
#153Method for forming comb electrodes using self-alignment etching
#154Precision position determining method
#155Sloped thin film substrate edges
#156Methods of making and modifying porous devices for biomedical applications
#157Thinning
#158Liquid-based gravity-driven etching-stop technique for controlling structure dimension
#159Multi-finger z-actuator
#160Method of producing semiconductor device
#161Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
#162Method of forming an in-situ recessed structure
#163Method for selectively removing material from the surface of a substrate, masking material for a wafer, and wafer with masking material
#164Physical quantity sensor
#165Method for manufacturing micro-structural unit
#166Method for fabricating vertical offset structure
#167Method of making multilevel MEMS structures
#168Integrated released beam layer structure fabricated in trenches and manufacturing method thereof
#169Semiconductor device and method of producing the same
#170Process for making angled features for nanolithography and nanoimprinting
#171Method for manufacturing micro-structural unit
#172Pulsed ion beam control of solid state features
#173Online trimming device and method for micro-shell resonator gyroscope