PRESSURE SENSOR HAVING HIGH DETECTION PERFORMANCE AND OPTIMIZED MANUFACTURING

ELECTROACOUSTIC TRANSDUCER WITH ELECTRICAL CONNECTIONS ON A MEMBRANE

MEMBRANE CONNECTED TO PILLAR WITH SPRING CHARACTERISTICS

MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME

MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPING STRUCTURE HAVING IMPROVED MECHANICAL ROBUSTNESS

SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS

PROTECTIVE COATING FOR COPPER SURFACE IN SENSOR

MEMS COMPONENT WITH A MEMBRANE SPRING AND METHOD FOR PRODUCING A MEMBRANE SPRING

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART AND METHODS FOR FORMING THE SAME

METHOD FOR MANUFACTURING A MEMS TRANSDUCER DEVICE WITH THIN MEMBRANE, AND MEMS TRANSDUCER DEVICE

MEMS MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING PROCESS THEREOF

MEMS Device and Method for Manufacturing a MEMS Device

MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION HAVING IMPROVED STRESS RESISTANCE

Stiffening structures for micro-electro-mechanical system (MEMS) micromirrors

METHOD FOR MANUFACTURING A LOW-NOISE ELECTROACOUSTIC TRANSDUCER

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

Micro-electromechanical system device using a metallic movable part and methods for forming the same

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

MEMS transducer having a diaphragm made of polymer and method of producing same

Micro-electro-mechanical system acoustic sensor, micro-electro-mechanical system package structure and method for manufacturing the same

Method and structure for sensors on glass

SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE

MEMS sensor and method for manufacturing a MEMS sensor including improved time reliable reinforcement structure

Vibrating element

Piezoelectric actuator provided with a deformable structure having improved mechanical properties and fabrication method thereof

Micromechanical component for a sensor device and manufacturing method for a micromechanical component for a sensor device

Semiconductor device package and method of manufacturing the same

MEMS via with enhanced electrical and mechanical integrity

Micro check valve and system with multiple micro check valves and method for the production thereof

MEMS device with suspension structure and method of making a MEMS device

Sensor device and manufacturing method thereof

METHOD AND WAFER FOR FABRICATING TRANSDUCER DEVICES

Process for the formation of a graphene membrane component, graphene membrane component, microphone and hall-effect sensor

MEMS microphone and method of manufacturing the same

Micromechanical spring for an inertial sensor

MEMS microphone and method for manufacturing the same

Semiconductor device package and method of manufacturing the same

MEMS microphone and method for manufacturing the same

Process for the formation of a graphene membrane component, graphene membrane component, microphone and hall-effect sensor

Micromechanical structure and method for manufacturing the same

Micromirror array and method for the manufacture thereof

System and method for a MEMS transducer

Sensor including moving masses and means for detecting relative movements of the masses

MEMS acoustic sensor comprising a non-perimeter flexible member

MEMS device with differential vertical sense electrodes

MEMS device and method for manufacturing the MEMS device

Robust MEMS structure with via cap and related method

Scalable self-supported MEMS structure and related method

Method and System to Control the Mechanical Stiffness of Nanoscale Components by Electrical Current Flow

Methods of manufacturing a MEMS device having a backplate with elongated protrusions

MEMS device having a back plate with elongated protrusions

FERROELECTRIC DEVICE

Vibrating element, optical scanning device, actuator device, video projection apparatus, and image forming apparatus

MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS

Micromechanical semiconductor sensor