83997 ⎘
Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device Mechanical properties
Sub-classes:Method of manufacturing an electronic device
#2Method for coating microstructured components
#3Method for frequency trimming a microelectromechanical resonator
#4Cavity package design
#5Structure and method of manufacturing the same
#6Method for making an electromechanical component on a plane substrate
#7Structure and method of manufacturing the same
#8Method of adjusting the resonant frequency of an assembled torsional hinged device