Patents-Review.com
ClassID:

83999 ⎘

B81C1/00666 - CPC Classification

Classification description:

Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device; Mechanical properties Treatments for controlling internal stress or strain in MEMS structures

Recent Application in this class:
#1
20260152384
2026-06-04

MEMS DEVICE WITH COMPENSATION OF THE MECHANICAL STRESS AND RELATED MANUFACTURING PROCESS

 #2
20260132016
2026-05-14

PIEZOELECTRIC MICROELECTROMECHANICAL DEVICE WITH ANCHOR REINFORCEMENT

 #3
20260082157
2026-03-19

MEMS MICROPHONE AND METHOD FOR PREPARING MEMS MICROPHONE

 #4
20250362491
2025-11-27

SYSTEM AND METHOD FOR MEMS DEVICES

 #5
20250346481
2025-11-13

DRIVE ELEMENT AND OPTICAL DEFLECTION ELEMENT

 #6
20250223153
2025-07-10

SEMICONDUCTOR STRUCTURE AND METHOD OF MAKING

 #7
20250206596
2025-06-26

NANO ELECTROMECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF

 #8
20250187908
2025-06-12

MANUFACTURING METHOD FOR MICRO-ELECTRO-MECHANICAL MICROPHONE

 #9
20250178887
2025-06-05

MICROELECTROMECHANICAL COMPONENT WITH A METAL STANDOFF

 #10
20250178886
2025-06-05

SEALED MICROELECTROMECHANICAL MEMBRANE DEVICE

 #11
20250109011
2025-04-03

INTEGRATED SENSOR DEVICE

 #12
20250074763
2025-03-06

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

 #13
20250074762
2025-03-06

MEMS SOUND TRANSDUCER AND METHOD FOR PRODUCING SAME

 #14
20240400377
2024-12-05

MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE

 #15
20240343558
2024-10-17

DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE

 #16
20240300808
2024-09-12

MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRENCHES

 #17
20240286890
2024-08-29

DOUBLE LAYER MEMS DEVICES

 #18
20240279051
2024-08-22

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MANUFACTURING DAMASCENE INTERCONNECT STRUCTURE

 #19
20240228264
2024-07-11

DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE

 #20
20240182292
2024-06-06

Curved cantilever design to reduce stress in MEMS actuator

 #21
20240182291
2024-06-06

FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRAY ION SOURCE

 #22
20240171918
2024-05-23

MEMS ELEMENT AND METHOD OF MANUFACTURING THE SAME

 #23
20240132340
2024-04-25

DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE

 #24
20240101412
2024-03-28

Support Device for One or More MEMS Components

 #25
20240067519
2024-02-29

METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICES

 #26
20240002219
2024-01-04

METHOD FOR MANUFACTURING MIRROR DEVICE

 #27
20230422623
2023-12-28

MEMS PROCESS POWER

 #28
20230294976
2023-09-21

Semiconductor Device

 #29
20230273423
2023-08-31

SYSTEM AND METHOD FOR MEMS DEVICES

 #30
20230239641
2023-07-27

METHOD OF MAKING MEMS MICROPHONE WITH AN ANCHOR

 #31
20230234835
2023-07-27

STRESS ISOLATION FOR INTEGRATED CIRCUIT PACKAGE INTEGRATION

 #32
20230224657
2023-07-13

SEMICONDUCTOR DEVICES HAVING A MEMBRANE LAYER WITH SMOOTH STRESS-RELIEVING CORRUGATIONS AND METHODS OF FABRICATION THEREOF

 #33
20230219806
2023-07-13

Curved cantilever design to reduce stress in MEMS actuator

 #34
20230166964
2023-06-01

MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD

 #35
20230067030
2023-03-02

FABRICATION OF MEMS STRUCTURES FROM FUSED SILICA FOR INERTIAL SENSORS

 #36
20230040320
2023-02-09

Microelectromechanical infrared sensing device and fabrication method thereof

 #37
20220408196
2022-12-22

Microelectromechanical systems device

 #38
20220204338
2022-06-30

BACKSIDE COATING OF SUSPENDED MEMS MIRROR ACTUATORS FOR STRESS MATCHING AND THERMAL STABILITY

 #39
20220199893
2022-06-23

MEMS process power

 #40
20220185656
2022-06-16

Manufacturing method of semiconductor structure

 #41
20210387852
2021-12-16

Damascene interconnect structure, actuator device, and method of manufacturing damascene interconnect structure

 #42
20210371271
2021-12-02

Integrated circuit packages having stress-relieving features

 #43
20210363001
2021-11-25

MEMS devices with support structures and associated production methods

 #44
20210214212
2021-07-15

MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE WITH BACKSIDE PINHOLE RELEASE AND RE-SEAL

 #45
20210198097
2021-07-01

DEVICE AND METHOD OF FABRICATING SUCH A DEVICE

 #46
20210032097
2021-02-04

Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel package

 #47
20210024352
2021-01-28

MEMS device manufacturing method, MEMS device, and shutter apparatus using the same

 #48
20200361763
2020-11-19

Manufacturing method of semiconductor structure

 #49
20200331748
2020-10-22

Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel package

 #50
20200115219
2020-04-16

Silicon carbide microelectromechanical structure, device, and method

 #51
20200048082
2020-02-13

Thin film material transfer method

 #52
20200048072
2020-02-13

Micromechanical sensor that includes a stress decoupling structure

 #53
20200024127
2020-01-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #54
20200017356
2020-01-16

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #55
20200017355
2020-01-16

Planar cavity mems and related structures, methods of manufacture and design structures

 #56
20190361223
2019-11-28

MEMS device with suspension structure and method of making a MEMS device

 #57
20190315619
2019-10-17

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #58
20190275545
2019-09-12

Actuator, liquid discharge head, liquid discharge device, and liquid discharge apparatus

 #59
20190248644
2019-08-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #60
20190233277
2019-08-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #61
20190177155
2019-06-13

Devices with localized strain and stress tuning

 #62
20190169017
2019-06-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #63
20190152767
2019-05-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #64
20190135613
2019-05-09

Micromechanical z-inertial sensor

 #65
20190055117
2019-02-21

Method for producing a MEMS sensor, and MEMS sensor

 #66
20180346339
2018-12-06

Polycrystalline material having low mechanical strain; method for producing a polycrystalline material

 #67
20180346318
2018-12-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #68
20180319652
2018-11-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #69
20180281414
2018-10-04

Bonded substrate body, method for manufacturing bonded substrate body, liquid discharge head, and method for manufacturing liquid discharge head

 #70
20180257931
2018-09-13

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #71
20180252607
2018-09-06

PRESSURE SENSOR, PRESSURE SENSOR MODULE, ELECTRONIC APPARATUS, AND VEHICLE

 #72
20180245955
2018-08-30

Differential pressure detection element, flow rate measurement device, and method of manufacturing differential pressure detection element

 #73
20180244514
2018-08-30

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #74
20180237290
2018-08-23

Micromechanical system including a sensitive element and associated manufacturing method

 #75
20180159021
2018-06-07

MEMS process power

 #76
20180120184
2018-05-03

Semiconductor differential pressure sensor and manufacturing method of the same

 #77
20180118561
2018-05-03

Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device

 #78
20180086632
2018-03-29

Temporary mechanical stabilization of semiconductor cavities

 #79
20180086625
2018-03-29

Silicon carbide microelectromechanical structure, device, and method

 #80
20180079642
2018-03-22

Microscale metallic CNT templated devices and related methods

 #81
20180072568
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #82
20180072567
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #83
20180072566
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #84
20180057357
2018-03-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #85
20180057353
2018-03-01

Semiconductor package and manufacturing method thereof

 #86
20180050903
2018-02-22

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #87
20180050900
2018-02-22

MEMS device and process

 #88
20180009658
2018-01-11

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #89
20180007474
2018-01-04

MEMS devices and processes

 #90
20180007473
2018-01-04

MEMS device and process

 #91
20180002168
2018-01-04

MEMS transducer having stress diffusing structures provided in a flexible membrane

 #92
20180002159
2018-01-04

MEMS devices and processes

 #93
20170349430
2017-12-07

Semiconductor pressure sensor

 #94
20170320723
2017-11-09

Semiconductor package and manufacturing method thereof

 #95
20170267518
2017-09-21

PRESSURE SENSOR, PRODUCTION METHOD FOR PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT

 #96
20170217759
2017-08-03

Wafer level packaging of MEMS

 #97
20170158490
2017-06-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #98
20170158489
2017-06-08

ADDITIONAL SURFACE FOR STABILIZING THE INTERNAL CAVITY PRESSURE OVER THE LIFETIME

 #99
20170154800
2017-06-01

Wafer handler and methods of manufacture

 #100
20170121170
2017-05-04

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #101
20170113919
2017-04-27

Structures for reducing and preventing stress and tensions during processing of silicon with the aid of melting by a laser

 #102
20170089785
2017-03-30

Pressure sensor including deformable pressure vessel(s)

 #103
20170088413
2017-03-30

Physical quantity sensor, manufacturing method of physical quantity sensor, sensor device, electronic apparatus, and moving object

 #104
20170022048
2017-01-26

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #105
20160368765
2016-12-22

Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure

 #106
20160355392
2016-12-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #107
20160325987
2016-11-10

Low-stress low-hydrogen LPCVD silicon nitride

 #108
20160325986
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #109
20160325983
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #110
20160325982
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #111
20160304334
2016-10-20

Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure

 #112
20160272482
2016-09-22

Method of making a MEMS die having a MEMS device on a suspended structure

 #113
20160244321
2016-08-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #114
20160167960
2016-06-16

Method for producing a microelectromechanical transducer

 #115
20160167952
2016-06-16

Microelectronic packages having hermetic cavities and methods for the production thereof

 #116
20160107880
2016-04-21

Substrate for diaphragm-type resonant MEMS devices, diaphragm-type resonant MEMS device and method for manufacturing same

 #117
20160099124
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #118
20160083245
2016-03-24

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #119
20160060099
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #120
20160055282
2016-02-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #121
20160052781
2016-02-25

Wafer level packaging of MEMS

 #122
20160016792
2016-01-21

Methods of forming microstructure and electronic device having moveable component

 #123
20150375990
2015-12-31

Micromechanical sensor device

 #124
20150284243
2015-10-08

Method of manufacturing a temperature-compensated micro-electromechanical device

 #125
20150284239
2015-10-08

MEMS device with a stress-isolation structure

 #126
20150266728
2015-09-24

Stress buffer layer for integrated microelectromechanical systems (MEMS)

 #127
20150232327
2015-08-20

Sensor and method for manufacturing a sensor

 #128
20150225230
2015-08-13

SUPPORT FOR MEMS COVER

 #129
20150041932
2015-02-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #130
20150014797
2015-01-15

MEMS device having a microphone structure, and method for the production thereof

 #131
20150008788
2015-01-08

Low temperature ceramic Microelectromechanical structures

 #132
20140332913
2014-11-13

Micro-electro-mechanical system (MEMS) structures and design structures

 #133
20140327946
2014-11-06

MEMS scanning micromirror

 #134
20140312435
2014-10-23

MEMS device with stress isolation and method of fabrication

 #135
20140285060
2014-09-25

ELECTRICAL COMPONENT AND METHOD OF MANUFACTURING THE SAME

 #136
20140238865
2014-08-28

Methods of forming three-dimensional structures having reduced stress and/or curvature

 #137
20140078640
2014-03-20

Thin film device and method for manufacturing thin film device

 #138
20140024161
2014-01-23

METHOD OF FABRICATING AN INERTIAL SENSOR

 #139
20130341742
2013-12-26

Wafer level MEMS force dies

 #140
20130341741
2013-12-26

Ruggedized MEMS force die

 #141
20130285160
2013-10-31

Microscale metallic CNT templated devices and related methods

 #142
20130139377
2013-06-06

Method of manufacturing resonant transducer

 #143
20130020183
2013-01-24

Silicide micromechanical device and methods to fabricate same

 #144
20120319217
2012-12-20

Method of manufacturing a semiconductor device comprising a membrane over a substrate by forming a plurality of features using local oxidation regions

 #145
20120318649
2012-12-20

Methods to fabricate silicide micromechanical device

 #146
20120287138
2012-11-15

ELECTROMECHANICAL DEVICE CONFIGURED TO MINIMIZE STRESS-RELATED DEFORMATION AND METHODS FOR FABRICATING SAME

 #147
20120264250
2012-10-18

Method of forming membranes with modified stress characteristics

 #148
20120225259
2012-09-06

Flat back plate

 #149
20120222960
2012-09-06

Methods of forming three-dimensional structures having reduced stress and/or curvature

 #150
20120161573
2012-06-28

Microstructure and electronic device

 #151
20120082325
2012-04-05

Condenser microphone array chip

 #152
20120056308
2012-03-08

Method of forming an electromechanical transducer device

 #153
20120021170
2012-01-26

Micro-machined structure production using encapsulation

 #154
20120007220
2012-01-12

Method for reducing chip warpage

 #155
20110318861
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #156
20110316101
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #157
20110316099
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #158
20110316098
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #159
20110316097
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #160
20110315528
2011-12-29

Methods of manufacture for micro-electro-mechanical system (MEMS)

 #161
20110315527
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #162
20110315526
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #163
20110314669
2011-12-29

Method of manufacturing a micro-electro-mechanical system (MEMS)

 #164
20110180886
2011-07-28

Method for manufacturing a micromachined device and the micromachined device made thereof

 #165
20110147223
2011-06-23

Methods of Forming Three-Dimensional Structures Having Reduced Stress and/or Curvature

 #166
20110111545
2011-05-12

Low temperature ceramic microelectromechanical structures

 #167
20110081740
2011-04-07

Low stress photo-sensitive resin with sponge-like structure and devices manufactured employing same

 #168
20110058243
2011-03-10

METHODS FOR FORMING LAYERS WITHIN A MEMS DEVICE USING LIFTOFF PROCESSES

 #169
20100265563
2010-10-21

Electromechanical device configured to minimize stress-related deformation and methods for fabricating same

 #170
20100202039
2010-08-12

MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same

 #171
20100200938
2010-08-12

Methods for forming layers within a MEMS device using liftoff processes

 #172
20100184311
2010-07-22

Micro-machined structure production using encapsulation

 #173
20100120202
2010-05-13

Method for reducing chip warpage

 #174
20100107391
2010-05-06

Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device

 #175
20100032812
2010-02-11

Method for forming silicon germanium layers at low temperatures, layers formed therewith and structures comprising such layers

 #176
20090176064
2009-07-09

Membrane structure element and method for manufacturing same

 #177
20090134522
2009-05-28

Micro-Electromechanical System Memory Device and Method of Making the Same

 #178
20090042372
2009-02-12

Polysilicon deposition and anneal process enabling thick polysilicon films for MEMS applications

 #179
20090029533
2009-01-29

Method of controlling film stress in MEMS devices

 #180
20080218840
2008-09-11

Methods for etching layers within a MEMS device to achieve a tapered edge

 #181
20080171219
2008-07-17

Nanocomposite films

 #182
20080148864
2008-06-26

Micromechanical device comprising a mobile beam

 #183
20080146052
2008-06-19

Micro-machined structure production using encapsulation

 #184
20080050524
2008-02-28

Methods of Forming Three-Dimensional Structures Having Reduced Stress and/or Curvature

 #185
20070279753
2007-12-06

Patterning of mechanical layer in MEMS to reduce stresses at supports

 #186
20070246786
2007-10-25

Doping of SiC structures and methods associated with same

 #187
20070164379
2007-07-19

Isolation scheme for reducing film stress in a MEMS device

 #188
20070125486
2007-06-07

Vertically spaced plural microsprings

 #189
20070072331
2007-03-29

Method for manufacturing a micro-electro-mechanical device

 #190
20070042524
2007-02-22

MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same

 #191
20070041703
2007-02-22

Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge

 #192
20070041076
2007-02-22

MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same

 #193
20060289764
2006-12-28

Infrared radiation detector

 #194
20060182404
2006-08-17

High reflector tunable stress coating, such as for a MEMS mirror

 #195
20060182403
2006-08-17

High reflector tunable stress coating, such as for a MEMS mirror

 #196
20060175203
2006-08-10

Electroplating pcb components

 #197
20060166403
2006-07-27

Fabrication of advanced silicon-based MEMS devices

 #198
20060134820
2006-06-22

Process for forming microstructures

 #199
20060134819
2006-06-22

Process for forming MEMS

 #200
20060110895
2006-05-25

Method of fabricating silicon-based MEMS devices

 #201
20060105122
2006-05-18

Micro-machined structure production using encapsulation

 #202
20060086995
2006-04-27

Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device

 #203
20050233492
2005-10-20

Method of fabricating silicon-based MEMS devices

 #204
20050227054
2005-10-13

Method to control residual stress in a film structure and a system thereof

 #205
20050101047
2005-05-12

Process of forming a capacitative audio transducer

 #206
20050050971
2005-03-10

Methods and structure for improving wafer bow control

 #207
20050012040
2005-01-20

Method of fabrication of an infrared radiation detector and infrared detector device

 #208
17151437
2022-05-03

MEMS device with a diaphragm having a slotted layer

 #209
17127323
2023-01-03

Microscale metallic CNT templated devices and related methods

 #210
14887737
2019-06-18

MEMS device with reduced dynamic stress and methods

 #211
14052509
2014-12-30

Method of improving MEMS microphone mechanical stability