84000 ⎘
Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device; Mechanical properties Treatments for improving wear resistance
SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME
#2FORMING A PASSIVATION COATING FOR MEMS DEVICES
#3SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME
#4A MICROFLUIDIC SENSOR
#5FORMING A PASSIVATION COATING FOR MEMS DEVICES
#6Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
#7Impact element for a sensor device and a manufacturing method
#8MEMS grid for manipulating structural parameters of MEMS devices
#9Electronic device using MEMS technology
#10Reliable deposition of thin parylene
#11MEMS grid for manipulating structural parameters of MEMS devices
#12Micromechanical timepiece part comprising a lubricated surface and method for producing such a micromechanical timepiece part
#13SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION DEVICE, AND METHOD FOR MANUFACTURING DETECTION DEVICE
#14MEMS cavity substrate
#15One-piece electroformed metal component
#16Wafer level package of MEMS sensor and method for manufacturing the same
#17Metal elastic member, miniature machine, method of manufacturing miniature machine, swing control device and swing control method
#18Hybridly integrated component and method for the production thereof
#19Hybrid intergrated component and method for the manufacture thereof
#20Hybrid integrated component and method for the manufacture thereof
#21Method for making a reinforced silicon micromechanical part
#22Edge-reinforced micromechanical component
#23Optimization of desiccant usage in a MEMS package
#24Method of manufacturing a micromechanical part
#25Contact device and method for producing the same
#26Nanocomposite films
#27METALLIC COATINGS ON SILICON SUBSTRATES
#28Use of tungsten interlayer to enhance the initial nucleation and conformality of ultrananocrystalline diamond (UNCD) thin films
#29Method and apparatus for MEMS device nebulizer lubrication system
#30Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates
#31Methods of manufacture of microisolators and devices for mechanical isolation or mechanical damping of microfabricated inertial sensors
#32Pressure sensors and methods of making the same
#33Micro mechanical structure and method for fabricating the same