84001 ⎘
Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device; Mechanical properties Treatments for improving mechanical properties, not provided for in -
Anti-Stiction Process for Mems Device
#2MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF MASS ELEMENT AND METHODS FOR FORMING THE SAME
#3Electrostatic MEMS Transducer with Vertical Actuator Cells
#4MEMS transducer having a carrier layer and at least two piezoelectric layers
#5MICROSCALE FLEXIBLE STRAIN SENSOR
#6PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC DEVICE
#7FABRICATION OF GLASS CELLS FOR HERMETIC GAS ENCLOSURES
#8Anti-stiction process for MEMS device
#9MEMS devices comprising spring element and comb drive and associated production methods
#10MEMS element with increased density
#11Anti-stiction process for MEMS device
#12MEMS gap control structures
#13Systems and methods for uniform target erosion magnetic assemblies
#14Anti-stiction process for MEMS device
#15Method for coating microstructured components
#16Integrated circuit comprising multi-layer micromechanical structures with improved mass and reliability by using modified vias and method for forming the same
#17Multilayer MEMS cantilevers
#18Stress decoupled piezoresistive relative pressure sensor and method for manufacturing the same
#19MEMS grid for manipulating structural parameters of MEMS devices
#20Method for manufacturing a piezoelectric device
#21MEMS gap control structures
#22Micromechanical structure
#23Semiconductor device and method for manufacturing the same
#24ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
#25MEMS device with over-travel stop structure and method of fabrication
#26Substrate structure, semiconductor structure and method for fabricating the same
#27Method for producing a microelectromechanical transducer
#28Reducing MEMS stiction by deposition of nanoclusters
#29Method of manufacturing apparatus for harvesting and storing piezoelectric energy
#30MEMS pressure sensor with improved insensitivity to thermo-mechanical stress
#31MEMS DEVICE AND METHOD FOR PRODUCING AN MEMS DEVICE OPERATING WITH ACOUSTIC WAVES
#32Encapsulation structure including a mechanically reinforced cap and with a getter effect
#33Method for fabricating an integrated device
#34Micromechanical component and manufacturing method for a micromechanical component
#35Low frequency response microphone diaphragm structures and methods for producing the same
#36Implantation of gaseous chemicals into cavities formed in intermediate dielectrics layers for subsequent thermal diffusion release
#37Method of fabricating an electromechanical structure including at least one mechanical reinforcing pillar
#38Method for fabricating micro-electro-mechanical systems (MEMS) device
#39Micro-electro-mechanical systems (MEMS) device and method for fabricating the same
#40Apparatus for harvesting and storing piezoelectric energy and manufacturing method thereof
#41Method for making a reinforced silicon micromechanical part
#42MEMS resonator, sensor having the same and manufacturing method for MEMS resonator
#43MICROMECHANICAL ACTUATOR
#44Method of accurately spacing Z-axis electrode
#45Reinforced micro-mechanical part
#46METHOD OF FABRICATING AN ELECTROMECHANICAL STRUCTURE INCLUDING AT LEAST ONE MECHANICAL REINFORCING PILLAR
#47Method for structuring a device layer of a substrate
#48Vibration elements
#49Method of producing mechanical components of MEMS or NEMS structures made of monocrystalline silicon
#50Membrane Structure and Method for Manufacturing the Same
#51Method of making microstructure device, and microstructure device made by the same
#52Microstructure and manufacturing method thereof and microelectromechanical system
#53Ultra-flat reflective MEMS optical elements
#54Pre-oxidization of deformable elements of microstructures