84008 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Preserve existing structures from alteration, e.g. temporary protection during manufacturing; Avoid chemical alteration, e.g. contamination, oxidation or unwanted etching Avoid contamination, e.g. absorption of impurities or oxidation
MEMS DEVICE AND METHOD FOR FABRICATING A MEMS DEVICE
#2DEVICE INCLUDING MEMS SENSOR AND METHOD OF MANUFACTURING THE SAME
#3MICROMECHANICAL COMPONENT AND CORRESPONDING PRODUCTION METHOD
#4PRODUCTION METHOD FOR A MICROMECHANICAL SENSOR COMPONENT AND CORRESPONDING MICROMECHANICAL SENSOR COMPONENT
#5MEMS SWITCH UTILIZING CONDUCTIVE BARRIER LAYER
#6METHOD FOR PRODUCING A PARTICLE PROTECTION ELEMENT, IN PARTICULAR A PARTICLE FILTER, FOR A MEMBRANE OF A PRESSURE SENSOR, PARTICLE PROTECTION ELEMENT, METHOD FOR PRODUCING A PRESSURE SENSOR, AND PRESSURE SENSOR
#7Freezing a sacrificial material in forming a semiconductor
#8MEMS device and fabrication method thereof
#9Microelectromechanical system cavity packaging
#10Display apparatus and method of manufacturing the same
#11Freezing a sacrificial material in forming a semiconductor
#12Microelectromechanical system cavity packaging
#13Methods for depositing a measured amount of a species in a sealed cavity
#14Display apparatus and method of manufacturing the same
#15Method for forming a micro-electro mechanical system (MEMS) including bonding a MEMS substrate to a CMOS substrate via a blocking layer
#16Humidity resistant sensors and methods of making same
#17Humidity resistant sensors and methods of making same
#18MEMS structures and methods for forming the same
#19Micro-electro mechanical system (MEMS) device having a blocking layer formed between closed chamber and a dielectric layer of a CMOS substrate
#20ELECTRONIC DEVICE
#21Method for producing structured optical components
#22Microelectromechanical system devices having through substrate vias and methods for the fabrication thereof
#23MEMS structures and methods for forming the same
#24DIFFUSION BARRIER LAYER FOR MEMS DEVICES
#25Diffusion barrier layer for MEMS devices
#26Wafer level sensing package and manufacturing process thereof
#27Wafer level sensing package and manufacturing process thereof
#28Optical modulator
#29Diffusion barrier layer for MEMS devices
#30Microelectromechanical structure and a method for making the same
#31Method of selective etching using etch stop layer
#32Barrier layers for microelectromechanical systems