84007 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Preserve existing structures from alteration, e.g. temporary protection during manufacturing Avoid chemical alteration, e.g. contamination, oxidation or unwanted etching
Sub-classes:Selective wafer removal process for wafer bonding applications
#2Methods for fabricating pressure sensors with non-silicon diaphragms
#3Micro-electro-mechanical system structure and method for forming the same
#4Method for providing a low-k spacer
#5Pressure sensor with support structure for non-silicon diaphragm
#6Methods for fabricating pressure sensors with non-silicon diaphragms