84014 ⎘
Manufacture or treatment of devices or systems in or on a substrate Cleaning during or after manufacture
Sub-classes:Method and System for Torsional Optical Manipulation to Remove Particles from Semiconductor Surfaces
#2Scanning probe microscope for cleaning nanostructures
#3Method of selectively removing an anti-stiction layer on a eutectic bonding area
#4Fine structure composite and drying method of fine structure using the same