84025 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Treatments or methods for avoiding stiction of flexible or moving parts of MEMS; For avoiding stiction during the manufacturing process of the device, e.g. during wet etching Eliminating or avoiding remaining moisture after the wet etch release of the movable structure
Anti-Stiction Process for Mems Device
#2MEMS GRATING AND FABRICATION METHOD
#3Anti-stiction process for MEMS device
#4METHOD FOR ACHIEVING STICTION-FREE HIGH-ASPECT-RATIO MICROSTRUCTURES AFTER WET CHEMICAL PROCESSING
#5Anti-stiction process for MEMS device
#6Semiconductor device with patterned contact area
#7Systems and methods for uniform target erosion magnetic assemblies
#8Anti-stiction process for MEMS device
#9SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
#10Semiconductor Device and Method of Manufacturing the Semiconductor Device
#11Plasma assisted method of accurate alignment and pre-bonding for microstructure including glass or quartz chip
#12Substrate processing method and substrate processing apparatus
#13VIBRATOR, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC APPLIANCE
#14Method to release diaphragm in MEMS device
#15Integrated circuit with MEMS element and manufacturing method thereof
#16Methods of forming hydrophobic surfaces on semiconductor device structures, methods of forming semiconductor device structures, and semiconductor device structures
#17Method and apparatus for etching the silicon oxide layer of a semiconductor substrate
#18Processing liquid for suppressing pattern collapse of fine metal structure, and method for producing fine metal structure using same
#19Method for removing residues formed during the manufacture of MEMS devices
#20Method of fabricating suspended structure
#21Selective etching of oxides from substrates
#22Stiction resistant release process
#23Fine structure composite and drying method of fine structure using the same