B81C1/0092 - CPC Classification Index

ClassID:

84024 ⎘

B81C1/0092 - CPC Classification

Classification description:

Manufacture or treatment of devices or systems in or on a substrate; Treatments or methods for avoiding stiction of flexible or moving parts of MEMS For avoiding stiction during the manufacturing process of the device, e.g. during wet etching

Sub-classes:

B81C1/00928 » {Eliminating or avoiding remaining moisture after the wet etch release of the movable structure} 22
B81C1/00936 » {Releasing the movable structure without liquid etchant} 23
B81C1/00944 » {Maintaining a critical distance between the structures to be released} 22
B81C1/00952 » {Treatments or methods for avoiding stiction during the manufacturing process not provided for in groups to } 40

Recent Application in this class:

20260132019

2026-05-14

Anti-Stiction Process for Mems Device

20230264949

2023-08-24

EXTENDED ACID ETCH FOR OXIDE REMOVAL

20220242724

2022-08-04

Anti-stiction process for MEMS device

20220153574

2022-05-19

Extended acid etch for oxide removal

20200262697

2020-08-20

Stiction reduction system and method thereof

20200123003

2020-04-23

Anti-stiction process for MEMS device

20190241425

2019-08-08

Method and apparatus for reducing in-process and in-use stiction for MEMS devices

20190035611

2019-01-31

Systems and methods for uniform target erosion magnetic assemblies

20190031503

2019-01-31

Anti-stiction process for MEMS device

#10

20180230001

2018-08-16

Semiconductor device

#11

20180134542

2018-05-17

Method and apparatus for reducing in-process and in-use stiction for MEMS devices

#12

20160167256

2016-06-16

Method for producing nanoimprint mold

#13

20150368099

2015-12-24

Etch release residue removal using anhydrous solution

#14

20120181249

2012-07-19

Processing liquid for suppressing pattern collapse of fine metal structure and method for producing fine metal structure using same

#15

20090002804

2009-01-01

Electromechanical device treatment with water vapor

#16

20060234412

2006-10-19

MEMS release methods

#17

20060207968

2006-09-21

Selective etching of oxides from substrates

#18

20060166393

2006-07-27

Manufacturing method of a MEMS structure, a cantilever-type MEMS structure, and a sealed fluidic channel

#19

20050132798

2005-06-23

Method for fabricating a gyroscope

#20

20050051930

2005-03-10

Fine structure composite and drying method of fine structure using the same