84026 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Treatments or methods for avoiding stiction of flexible or moving parts of MEMS; For avoiding stiction during the manufacturing process of the device, e.g. during wet etching Releasing the movable structure without liquid etchant
METHOD OF MANUFACTURING A MICROSTRUCTURE
#2METHOD OF MANUFACTURING A MICROSTRUCTURE
#3METHOD OF MANUFACTURING A MICROSTRUCTURE
#4Method and apparatus for reducing in-process and in-use stiction for MEMS devices
#5Micro-electro-mechanical system (MEMS) structures and design structures
#6Micro-electro-mechanical system (MEMS) structures and design structures
#7Micro-electro-mechanical system (MEMS) structures and design structures
#8Method and apparatus for reducing in-process and in-use stiction for MEMS devices
#9MEMS DEVICE WITH OFFSET ELECTRODE
#10Micro-electro-mechanical system (MEMS) structures and design structures
#11Micro-electro-mechanical system (MEMS) structures and design structures
#12Micro-Electro-Mechanical System (MEMS) structures and design structures
#13Micro-electro-mechanical system (MEMS) structures and design structures
#14MEMS and method for forming the same
#15Method for forming micro-electro-mechanical system (MEMS) beam structure
#16Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same
#17Process for manufacturing electro-mechanical systems
#18Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same
#19System and method for forming moveable features on a composite substrate
#20Anhydrous HF release of process for MEMS devices
#21Microelectromechanical (MEM) device including a spring release bridge and method of making the same
#22MEMS structure and method for fabricating the same
#23Method for fabricating a gyroscope
#24Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations
#25Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations