84027 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Treatments or methods for avoiding stiction of flexible or moving parts of MEMS; For avoiding stiction during the manufacturing process of the device, e.g. during wet etching Maintaining a critical distance between the structures to be released
Micro-Electro-Mechanical System (Mems) Thermal Sensor
#2Micro-electro-mechanical system (MEMS) thermal sensor
#3Micro-electro-mechanical system (MEMS) thermal sensor
#4Method and apparatus for reducing in-process and in-use stiction for MEMS devices
#5Process for producing an electromechanical device
#6Method and apparatus for reducing in-process and in-use stiction for MEMS devices
#7Process of forming a microphone using support member
#8Micro electronic mechanical system structure
#9Manufacturing method of micro electronic mechanical system structure
#10Electret condenser
#11Pre-released structure device
#12Process of forming a microphone using support member
#13Micro electro-mechanical system and method of manufacturing the same
#14Method of fabricating microstructures
#15Electret condenser
#16Microstructure manufacturing method and microstructure
#17Process of forming a microphone using support member
#18MEMS element having a dummy pattern
#19Method of making a SOI silicon structure
#20MEMS release methods
#21System and method of providing a regenerating protective coating in a MEMS device
#22Method and apparatus for MEMS device nebulizer lubrication system