84031 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Treatments or methods for avoiding stiction of flexible or moving parts of MEMS; For avoiding stiction when the device is in use, i.e. after manufacture has been completed Control methods for avoiding stiction, e.g. controlling the bias voltage
Reliable and Robust Zero Power Micro-Mechanical Switch
#2Physical quantity sensor and inertial measurement unit
#3Vibration device and method for controlling the same
#4Vertical stopper for capping MEMS devices
#5Vertical stopper for capping MEMS devices
#6Rough MEMS surface
#7CMOS-MEMS device structure, bonding mesa structure and associated method
#8Methods for stiction reduction in MEMS sensors
#9Systems and methods to determine stiction failures in MEMS devices
#10Apparatus and method for preventing stiction of MEMS devices encapsulated by active circuitry
#11Stiction resistant mems device and method of operation
#12Variable capacitance device
#13MEMS switch
#14Stiction reduction for MEMS devices
#15MEMS MICROPHONE AND MANUFACTURING METHOD THEREOF
#16Actuator element, method of driving actuator element, method of manufacturing actuator element, device inspection method and MEMS switch
#17Anti-stiction electrode