84029 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Treatments or methods for avoiding stiction of flexible or moving parts of MEMS For avoiding stiction when the device is in use, i.e. after manufacture has been completed
Sub-classes:Anti-Stiction Process for Mems Device
#2Anti-stiction process for MEMS device
#3Method for preparing silicon wafer with rough surface and silicon wafer
#4MEMS apparatus with anti-stiction layer
#5Stiction reduction system and method thereof
#6Anti-stiction process for MEMS device
#7Method and apparatus for reducing in-process and in-use stiction for MEMS devices
#8Systems and methods for uniform target erosion magnetic assemblies
#9Anti-stiction process for MEMS device
#10Isolated protrusion/recession features in a micro electro mechanical system
#11Method and apparatus for reducing in-process and in-use stiction for MEMS devices
#12Reducing MEMS stiction by deposition of nanoclusters
#13Coatings for relatively movable surfaces
#14MEMS structure, cap substrate and method of fabricating the same
#15MEMS and method for forming the same
#16Coatings for relatively movable surfaces
#17Preventing glass particle injection during the oil fill process
#18Dynamic access point based positioning
#19Reducing MEMS stiction by deposition of nanoclusters
#20MICROMECHANICAL COMPONENT HAVING AN ANTI-ADHESIVE LAYER
#21Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
#22Microelectromechanical systems encapsulation process
#23MICRO ROCKING DEVICE AND METHOD FOR MANUFACTURING THE SAME
#24Methods for forming metal layers for a MEMS device integrated circuit
#25Contact device and method for producing the same
#26Method for producing a membrane
#27Anti-stiction technique for electromechanical systems and electromechanical device employing same
#28Method for Depositing an Anti-Adhesion Layer
#29Backside release and/or encapsulation of microelectromechanical structures and method of manufacturing same
#30Method of Forming a Micromechanical Device with Microfluidic Lubricant Channel
#31Method for providing an anti-stiction coating on a metal surface
#32In SITU application of anti-stiction materials to micro devices
#33Microelectromechanical systems encapsulation process with anti-stiction coating
#34Microelectromechanical systems encapsulation process
#35Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor
#36Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
#37Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
#38Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
#39Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
#40Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
#41Anti-stiction gas-phase lubricant for micromechanical systems
#42Anti-stiction technique for electromechanical systems and electromechanical device employing same
#43Method and apparatus for lubricating microelectromechanical devices in packages
#44Tungsten coated silicon fingers
#45Surface lubrication in microstructures
#46Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems
#47Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems
#48Membrane and method for the production of the same
#49Packaged microelectromechanical device with lubricant
#50MEMS passivation with transition metals
#51Method for reducing the adhesive properties of MEMS and anti-adhesion-coated device
#52Surface processing method for a chip device and a chip device formed by he method
#53Surface processes in fabrications of microstructures
#54Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems
#55Methods for forming composite coatings on MEMS devices
#56AlOatomic layer deposition to enhance the deposition of hydrophobic or hydrophilic coatings on micro-electromechanical devices