84032 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Treatments or methods for avoiding stiction of flexible or moving parts of MEMS; For avoiding stiction when the device is in use, i.e. after manufacture has been completed Methods for avoiding stiction when the device is in use not provided for in groups -
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TRANSDUCER DEVICES
#2ANTI-STICTION LAYER DEPOSITION
#3FORMING A PASSIVATION COATING FOR MEMS DEVICES
#4DOUBLE LAYER MEMS DEVICES
#5MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DEVICE
#6Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices
#7Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure
#8Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices
#9Manufacturing method of semiconductor structure
#10FORMING A PASSIVATION COATING FOR MEMS DEVICES
#11Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure
#12Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure
#13Manufacturing method of semiconductor structure
#14MEMS apparatus with anti-stiction layer
#15Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices
#16Fence structure to prevent stiction in a MEMS motion sensor
#17Method of stiction prevention by patterned anti-stiction layer
#18Method and apparatus for reducing in-process and in-use stiction for MEMS devices
#19Wafer level packaging for MEMS device
#20FORMING A PASSIVATION COATING FOR MEMS DEVICES
#21Micro-electro-mechanical systems (MEMS) device and method for fabricating the MEMS
#22Rough anti-stiction layer for MEMS device
#23Fence structure to prevent stiction in a MEMS motion sensor
#24Method of stiction prevention by patterned anti-stiction layer
#25Device including micromechanical components in cavities having different pressures and method for its manufacture
#26Semiconductor device
#27Manufacturing method of micro-electro-mechanical systems device
#28Rough anti-stiction layer for MEMS device
#29MEMS devices and processes
#30Method and apparatus for reducing in-process and in-use stiction for MEMS devices
#31MEMS structure with bilayer stopper and method for forming the same
#32Micro-electro-mechanical systems (MEMS) device and method for fabricating the MEMS
#33MEMS structure with graphene component
#34Method for controlling surface roughness in MEMS structure
#35Pressure sensor, manufacturing method of pressure sensor, altimeter, electronic apparatus, and moving object
#36Rough anti-stiction layer for MEMS device
#37Movement microelectromechanical systems (MEMS) package
#38Coatings for relatively movable surfaces
#39Methods for stiction reduction in MEMS sensors
#40Semiconductor devices and methods of forming thereof
#41Semiconductor devices and methods of forming thereof
#42MEMS microphone and method for manufacture
#43MEMS microphone and method for manufacture
#44Micromechanical structure comprising a mobile part having stops for out-of plane displacements of the structure and its production process
#45Micromechanical component and manufacturing method
#46Method for preparing silicon wafer with rough surface and silicon wafer