84141 ⎘
Manufacture or treatment of microstructural devices or systems Treatments for avoiding stiction of elastic or moving parts of MEMS
Sub-classes:METHOD AND DEVICE FOR LOCALLY REMOVING AND/OR MODIFYING A POLYMER MATERIAL ON A SURFACE
#2Method for preparing silicon wafer with rough surface and silicon wafer
#3Vertical stopper for capping MEMS devices
#4Isolated protrusion/recession features in a micro electro mechanical system
#5Gasses for increasing yield and reliability of MEMS devices
#6Vertical stopper for capping MEMS devices
#7Integrated semiconductor device and manufacturing method
#8Method for preparing silicon wafer with rough surface and silicon wafer