84138 ⎘
Manufacture or treatment of microstructural devices or systems Temporary protection of devices or parts of the devices during manufacturing
Sub-classes:DROP TEST DEVICE FOR A MICROMECHANICAL COMPONENT
#2Method for manufacturing a micro electro-mechanical system
#3Panel level packaging for MEMS application
#4Semiconductor structure and fabrication method thereof
#5Chip package and a method of producing the same
#6Methods and structures of integrated MEMS-CMOS devices
#7COMPONENT INCLUDING MEANS FOR REDUCING ASSEMBLY-RELATED MECHANICAL STRESSES AND METHODS FOR MANUFACTURING SAME