84101 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning; Film patterning other processes for film patterning not provided for in -
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
#2UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR FORMING THE SAME
#3MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURES AND METHOD FOR MANUFACTURING SAME
#4MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
#5MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD
#6METHOD FOR PRODUCING A MICROELECTRONIC DEVICE
#7Undercut-free patterned aluminum nitride structure and methods for forming the same
#8Undercut-free patterned aluminum nitride structure and methods for forming the same
#9Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure
#10CMOS-MEMS structure and method of forming the same
#11Method of depositing electrodes and electrolyte on microelectromechanical system electrochemical sensors
#12MICROSTRUCTURED SURFACE HAVING DISCRETE TOUCH AESTHETICS
#13Three-dimensional article and method of making the same
#14CMOS-MEMS structure and method of forming the same
#15MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND CORRESPONDING MICROMECHANICAL WINDOW STRUCTURE
#16Method of manufacturing MEMS switches with reduced switching voltage
#17Method of manufacturing MEMS switches with reduced switching voltage
#18Methods of manufacturing for MEMS switches with reduced switching voltage
#19Methods of manufacture for MEMS switches with reduced switching voltage
#20Method of manufacturing a switch
#21CMOS-MEMS structure and method of forming the same
#22MEMS DEVICE, SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
#23Semiconductor structure and fabrication method thereof
#24Method of manufacturing a switch
#25Method of manufacture MEMS switches with reduced voltage
#26Method of manufacturing MEMS switches with reduced voltage
#27Method of manufacturing MEMS switches with reduced switching voltage
#28Method of manufacturing MEMS switches with reduced switching volume
#29Inorganic nanostructure reactive direct-write and growth
#30Method for functionalising fluid lines contained in a micromechanical device, micromechanical device including functionalised lines, and method for manufacturing same
#31Silicon pen nanolithography
#32Magnetic patterning method and system
#33Method for producing localized patterns
#34STRUCTURED LAYER DEPOSITION ON PROCESSED WAFERS USED IN MICROSYSTEM TECHNOLOGY
#35Ultra thin alignment walls for di-block copolymer
#36MEMS switches with reduced switching voltage and methods of manufacture
#37System and methods of laser assisted field induced oxide nanopatterning
#38Direct nanoscale patterning of metals using polymer electrolytes
#39Method for nanostructuring of the surface of a substrate
#40Probe based patterning of microelectronic and micromechanical devices
#41Pattern transfer by solid state electrochemical stamping
#42Shape controlled growth of nanostructured films and objects