84063 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
Sub-classes:Stretchable substrate and method of manufacturing the same
#2Micromechanical component and method for manufacturing a micromechanical component
#3Ion generating device, method for manufacturing same, and air conditioner
#4Micro-electromechanical (MEM) power relay
#5Electrically functional polymer microneedle array
#6Bi-layer metal electrode for micromachined ultrasonic transducer devices
#7Self-cleaning liquid level sensor
#8Method of fabricating structure having out-of-plane angular segment