84105 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate; Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning Passivation
CAPACITIVE MICROELECTROMECHANICAL PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS
#2Zero Power Micro-Chemomechanical Hydrogen Sensor
#3METHOD FOR MAKING A HOLLOW STRUCTURE, AND MICROMECHANICAL SENSOR HAVING SUCH A HOLLOW STRUCTURE
#4METHOD FOR PRODUCING MICROELECTROMECHANICAL STRUCTURES
#5METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#6MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) AND METHODS OF FABRICATING THE SAME
#7MICROMECHANICAL ARM ARRAY FOR MEMS ACTUATORS
#8Stacked-die MEMS resonator
#9SEALED CAVITY FOR A CAPACITIVE SENSING DEVICE
#10METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
#11MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTECTED AGAINST HUMIDITY AND MANUFACTURING PROCESS THEREOF
#12METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
#13STACKED-DIE MEMS RESONATOR
#14MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
#15CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS
#16MEMS resonator system
#17MEMS DEVICE WITH INTEGRATED CMOS CIRCUIT
#18PRESSURE SENSOR STRUCTURE, PRESSURE SENSOR DEVICE, AND METHOD OF MANUFACTURING PRESSURE SENSOR STRUCTURE
#19PIEZOELECTRIC MEMS MICROPHONE WITH SPRING REGION
#20Pressure sensor with high stability
#21Microphone device with single crystal piezoelectric film and method of forming the same
#22METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#23Method and system for fabricating a MEMS device
#24Method and system for fabricating a MEMS device
#25Stacked-die MEMS resonator
#26Production method for a micromechanical component
#27Method and structure for sensors on glass
#28Stacked-die MEMS resonator
#29Manufacturing of integrated circuit resonator
#30Method for manufacturing MEMS microphone
#31MEMS device having a tiltable suspended structure controlled by electromagnetic actuation
#32Capacitive micro structure
#33Fence structure to prevent stiction in a MEMS motion sensor
#34Semiconductor device and method of producing a semiconductor device
#35CMOS MEMS integrated device with increased shield vertical gap
#36Anti-wetting coating for Si-based MEMS fluidic device, and method of application of same
#37Package structure for micromechanical resonator
#38Substrate assembly and related methods
#39Fence structure to prevent stiction in a MEMS motion sensor
#40Method for manufacturing semiconductor device
#41Addressable vertical nanowire probe arrays and fabrication methods
#42Bonded substrate body, method for manufacturing bonded substrate body, liquid discharge head, and method for manufacturing liquid discharge head
#43MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN OBLIQUE SURFACE AND CORRESPONDING MICROMECHANICAL DEVICE
#44Semiconductor device and method of producing a semiconductor device
#45Low-profile stacked-die MEMS resonator system
#46Field emission devices and methods of making thereof
#47Getter electrode to improve vacuum level in a microelectromechanical systems (MEMS) device
#48Integrated capacitive humidity sensor
#49MEMS-CMOS device that minimizes outgassing and methods of manufacture
#50Stacked-die MEMS resonator system
#51MEMS device with electrodes permeable to outgassing species
#52Semiconductor device and method for manufacturing the same
#53MEMS-CMOS device that minimizes outgassing and methods of manufacture
#54Passivated microelectromechanical structures and methods
#55Passivation layer for harsh environments and methods of fabrication thereof
#56Field emission devices and methods of making thereof
#57Display device and manufacturing method of the display device
#58IC manufacturing method, IC and apparatus
#59Method for fabricating MEMS device
#60Stacked die package for MEMS resonator system
#61Method for fabricating MEMS device
#62Silicon-Rich Nitride Etch Stop Layer for Vapor HF Etching in MEMS Device Fabrication
#63Piezoresistive sensing structure
#64Stacked die package for MEMS resonator system
#65Piezoresistive sensing structure
#66Layer system comprising a silicon layer and a passivation layer, method for production a passivation layer on a silicon layer and the use of said system and method
#67Layer and system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof
#68Method and apparatus for fabrication of passivated microfluidic structures in semiconductor substrates
#69Micromechanical component and method for producing same
#70Bipolar transistor type MEMS pressure sensor and preparation method thereof