84117 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing; Chemical vapour Deposition Epitaxy, i.e. homo-epitaxy, hetero-epitaxy, GaAs-epitaxy
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES, AND RELATED SYSTEMS AND METHODS
#2METHOD FOR PRODUCING MICROELECTROMECHANICAL STRUCTURES
#3ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR CHIP AND PREPARATION METHOD THEREOF
#4ANCHOR STRUCTURE
#5FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE
#6MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUBSTRATES USING SEED LAYERS
#7MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
#8ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES, AND RELATED SYSTEMS AND METHODS
#9SEMICONDUCTOR COMPONENT AND METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT
#10MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
#11MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBERANCES, AND MANUFACTURING METHODS THEREOF
#12Method of forming monocrystalline nickel-titanium films on single crystal silicon substrates using seed layers
#13Engineered substrates, free-standing semiconductor microstructures, and related systems and methods
#14Process for manufacturing a MEMS micromirror device, and associated device
#15METHOD FOR MANUFACTURING DUAL-CAVITY STRUCTURE, AND DUAL-CAVITY STRUCTURE
#16Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component
#17Manufacturing method of micro-nano structure antireflective coating layer and display apparatus thereof
#18Process for manufacturing a MEMS micromirror device, and associated device
#19Epi-poly etch stop for out of plane spacer defined electrode
#20Micromechanical structure comprising carbon material and method for fabricating the same
#21Method for fabricating suspended MEMS structures
#22Epi-poly etch stop for out of plane spacer defined electrode
#23Method for producing a micromechanical component, and corresponding micromechanical component
#24METHOD OF IMPROVING THIN-FILM ENCAPSULATION FOR AN ELECTROMECHANICAL SYSTEMS ASSEMBLY
#25Epitaxial silicon CMOS-MEMS microphones and method for manufacturing
#26Micromechanical device including N-type doping for providing temperature compensation and method of designing thereof
#27SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY
#28METHOD FOR MANUFACTURING MEMS STRUCTURES
#29Method of fabricating a MEMS/NEMS electromechanical component
#30Episeal pressure sensor