84115 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
Sub-classes:METHOD FOR PRODUCING A MICROMECHANICAL LAYER STRUCTURE WITH HIGH ASPECT RATIO AND MICROMECHANICAL LAYER STRUCTURE
#2ACCELEROMETER WITH BIAS REDUCTION FEATURE
#3MEMS SENSOR ARRANGEMENT AND METHOD FOR MANUFACTURING A MEMS SENSOR ARRANGEMENT
#4MICROMECHANICAL DEVICE AND METHOD FOR PRODUCING A MICROMECHANICAL DEVICE HAVING A MEMS SUBSTRATE AND A CAP SUBSTRATE AND A CAVERN ENCLOSED BY MEMS SUBSTRATE AND CAP SUBSTRATE
#5MICROELECTROMECHANICAL SYSTEMS DEVICE AND MANUFACTURING METHOD THEREOF
#6SEALED CAVITY FOR A CAPACITIVE SENSING DEVICE
#7ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES
#8MANUFACTURING METHOD FOR MICRO-ELECTRO-MECHANICAL MICROPHONE
#9MICROELECTROMECHANICAL COMPONENT WITH A METAL STANDOFF
#10Membrane Device Fabrication
#11MICROSCALE FLEXIBLE STRAIN SENSOR
#12MICROELECTROMECHANICAL COMPONENT WITH GAP-CONTROL STRUCTURE AND A METHOD FOR MANUFACTURING IT
#13MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
#14MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
#15System And Method For Generating Fluid Flow
#16Electrical contacts using an array of micromachined flexures
#17MEMS BUMP STOPPER SURFACE FEATURES
#18Optical device production method
#19Signal processing circuit for triple-membrane MEMS device
#20MECHANICALLY COUPLED PIEZOELECTRIC MEMS MICROPHONE
#21Optical device production method
#22Microelectromechanical microphone with membrane trench reinforcements and method of fabrication
#23METHOD FOR TRANSFERRING MICROSTRUCTURES, AND METHOD FOR MOUNTING MICROSTRUCTURES
#24Signal processing circuit for triple-membrane MEMS device
#25Process for producing a base of an analysis cell for analyzing a biochemical material, and analysis cell
#26Optical device production method
#27Optical device
#28Bi-layer metal electrode for micromachined ultrasonic transducer devices
#29Method for coating microstructured components
#30Stress compensation for piezoelectric optical MEMS devices
#31MEMS devices and methods of manufacturing the same
#32Method of detecting sound using a micro-electro-mechanical system optical microphone
#33Electronic device with stacked chips
#34Stress compensation for piezoelectric optical MEMS devices
#35Micro-electro-mechanical system optical sensor with tilt plates
#36MEMS device with differential vertical sense electrodes
#37Low temperature ceramic Microelectromechanical structures
#38Low temperature ceramic microelectromechanical structures