84118 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing; Chemical vapour Deposition Oxidation
METHODS OF OPERATING AND MANUFACTURING CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER WITH CONTOURED ELECTRODE
#2CAPACITIVE SENSOR AND METHOD FOR MANUFACTURING SAME
#3MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF MASS ELEMENT AND METHODS FOR FORMING THE SAME
#4METHOD AND SYSTEM FOR PROVIDING A RELIABLE ISOLATION STACK IN CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS
#5CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
#6LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) DESIGN AND MANUFACTURING FLOW
#7EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CAVITY PRESSURE CONTROL
#8Curved cantilever design to reduce stress in MEMS actuator
#9FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRAY ION SOURCE
#10Capacitive micromachined ultrasonic transducer with contoured electrode
#11MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
#12MEMS Device and Method for Manufacturing a MEMS Device
#13MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication method thereof
#14MEMS SENSOR WITH TWO COMPLIANCES
#15MEMS SENSOR WITH A THIN REGION
#16Curved cantilever design to reduce stress in MEMS actuator
#17METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES
#18ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECULAR TRANSPORT
#19CMUT transducer with motion-stopping structure and CMUT transducer forming method
#20Pulse train excitation for capacitive micromachined ultrasonic transducer
#21Microfluidic devices with electrodes formed as physically separated sections of microchannel side walls
#22Gas sensor and manufacturing method thereof
#23Preparation Method Of Miniature Solid Silicon Needle
#24Contoured electrode for capacitive micromachined ultrasonic transducer
#25MICRONEEDLE COATED WITH DRUG AND MANUFACTURING METHOD FOR SAME
#26Method for fabricating semiconductor device
#27Sharp, vertically aligned nanowire electrode arrays, high-yield fabrication and intracellular recording
#28Capacitive micromachined ultrasonic transducer and method of fabricating the same
#29Microelectromechanical electroacoustic transducer with piezoelectric actuation and corresponding manufacturing process
#30Method for manufacturing MEMS microphone
#31Micro check valve and system with multiple micro check valves and method for the production thereof
#32CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME
#33METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
#34Method for manufacturing a micromechanical sensor
#35MOx-based gas sensor and manufacturing method thereof
#36AMORPHOUS THIN METAL FILM
#37Method for sealing an access opening to a cavity and MEMS component comprising a sealing element
#38Process for producing an electromechanical device
#39Small wafer are MEMS switch
#40Small wafer area MEMs switch
#41Small wafer area MEMS switch
#42Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure
#43Method to improve cantilever process performance
#44High aspect ratio MEMS devices and methods for forming the same
#45Method for making a reinforced silicon micromechanical part
#46Method for fabricating a fixed structure defining a volume receiving a movable element in particular of a MEMS
#47Constrained oxidation of suspended micro- and nano-structures
#48MICRO-ELECTROMECHANICAL DEVICE AND METHOD FOR FABRICATING THE SAME
#49Membrane structure element and method for manufacturing same
#50Micromechanical sensor
#51Method for producing insulation structures
#52Method and apparatus for preventing metal/silicon spiking in MEMS devices
#53Pseudo SOI process