84119 ⎘
Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing; Chemical vapour Deposition Plasma polymerization, i.e. monomer or polymer deposition
SYSTEM AND METHOD FOR ARRAY OF MEMS ELEMENTS
#2SYSTEM AND METHOD FOR ARRAY OF MEMS ELEMENTS
#3METHOD FOR PRODUCING A MICROELECTRONIC DEVICE
#4Method for producing trench-like depressions in the surface of a wafer
#5Method for making microchannels on a substrate, and substrate including such microchannels
#6BEAM-LIKE MATERIAL COMPRISING CARBON NANOTUBE AND MANUFACTURING METHOD THEREOF
#7Method for producing patterns in a polymer layer
#8Method and apparatus for curing epoxy-based photoresist using a continuously varying temperature profile
#9Method of forming a wear-resistant dielectric layer
#10Ultra-flat reflective MEMS optical elements