Patents-Review.com
ClassID:

84120 ⎘

B81C2201/0181 - CPC Classification

Classification description:

Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing Physical Vapour Deposition [PVD], i.e. evaporation, sputtering, ion plating or plasma assisted deposition, ion cluster beam technology

Recent Application in this class:
#1
20260152385
2026-06-04

MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

 #2
20260132017
2026-05-14

MEMS COMPONENT COMPRISING A MEMS ELEMENT HAVING A CAVITY AND COMPRISING AN ASIC COMPONENT

 #3
20260116744
2026-04-30

METHOD OF FABRICATING MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE

 #4
20260116740
2026-04-30

DIELECTRIC STACK FOR MICROELECTROMECHANICAL SYSTEM DEVICES AND METHODS OF FABRICATION THEREOF

 #5
20260035238
2026-02-05

DEVICE ENCAPSULATION USING PHYSICAL VAPOR DEPOSITION

 #6
20260035237
2026-02-05

MICROSTRUCTURE WITH HIGH BONDING STRENGTH AND FORMATION METHOD THEREOF

 #7
20250388459
2025-12-25

Processing Methods for Wafer-Level Encapsulated MEMS Devices with Stable Cavity Pressure Over Temperature

 #8
20250364198
2025-11-27

ELECTROMECHANICAL SWITCH AND METHOD FOR MANUFACTURING THE SAME

 #9
20250333294
2025-10-30

DEVICE INCLUDING MEMS SENSOR AND METHOD OF MANUFACTURING THE SAME

 #10
20250326629
2025-10-23

Monolithic Microelectromechanical Systems Based Spatial Light Modulators Including Ribbon-Type Modulators

 #11
20250178890
2025-06-05

MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTODEFINABLE ORGANIC POLYMER SPACER LAYERS

 #12
20250171299
2025-05-29

METHOD FOR MANUFACTURING A PACKAGING STRUCTURE

 #13
20250171296
2025-05-29

MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND METHODS OF MANUFACTURING THE SAME

 #14
20250162860
2025-05-22

METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES

 #15
20250091860
2025-03-20

COMPOUND SENSOR AND MANUFACTURING METHOD

 #16
20250011157
2025-01-09

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

 #17
20240359969
2024-10-31

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART AND METHODS FOR FORMING THE SAME

 #18
20240280513
2024-08-22

BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME

 #19
20240279051
2024-08-22

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MANUFACTURING DAMASCENE INTERCONNECT STRUCTURE

 #20
20240083742
2024-03-14

MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

 #21
20230364604
2023-11-16

Attachment Method for Microfluidic Device

 #22
20230294980
2023-09-21

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METHODS THEREOF

 #23
20230278856
2023-09-07

Method and structure for CMOS-MEMS thin film encapsulation

 #24
20230271825
2023-08-31

ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING SAME

 #25
20230234837
2023-07-27

MEMS MICROPHONE WITH AN ANCHOR

 #26
20230127477
2023-04-27

Multi-level microelectromechanical system structure with non-photodefinable organic polymer spacer layers

 #27
20230120240
2023-04-20

PIEZOELECTRIC SINGLE-CRYSTAL ELEMENT, MEMS DEVICE USING SAME, AND METHOD FOR MANUFACTURING SAME

 #28
20230094699
2023-03-30

Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition

 #29
20230072948
2023-03-09

Microfabrication of omni-view peripheral scanning system

 #30
20230066841
2023-03-02

Micro-electromechanical system device using a metallic movable part and methods for forming the same

 #31
20220397110
2022-12-15

MICRO-ELECTROMECHANICAL SYSTEM PUMP

 #32
20220274827
2022-09-01

Micro-electro mechanical system and manufacturing method thereof

 #33
20220128498
2022-04-28

Gas sensor and manufacturing method thereof

 #34
20210395081
2021-12-23

Methods of fabricating micro electro-mechanical systems structures

 #35
20210387852
2021-12-16

Damascene interconnect structure, actuator device, and method of manufacturing damascene interconnect structure

 #36
20210284528
2021-09-16

Microstructure and method for manufacturing same

 #37
20200323041
2020-10-08

Method for producing an electromigration-resistant crystalline transition-metal silicide layer, a corresponding layer sequence, and a micro heater

 #38
20200317506
2020-10-08

Method and structure for CMOS-MEMS thin film encapsulation

 #39
20200240947
2020-07-30

Vertical nanopore coupled with a pair of transverse electrodes having a uniform ultrasmall nanogap for DNA sequencing

 #40
20200239303
2020-07-30

Microelectromechanical component and method for producing same

 #41
20200140261
2020-05-07

Bonding pad layer system, gas sensor and method for manufacturing a gas sensor

 #42
20200055725
2020-02-20

Method of depositing nanotwinned nickel-molybdenum-tungsten alloys

 #43
20190128830
2019-05-02

MOx-based gas sensor and manufacturing method thereof

 #44
20190119101
2019-04-25

AMORPHOUS THIN METAL FILM

 #45
20190112182
2019-04-18

Method for sealing an access opening to a cavity and MEMS component comprising a sealing element

 #46
20190092632
2019-03-28

Micro-device having a metal-semiconductor compound layer protected against HF etching and method for making the same

 #47
20190030529
2019-01-31

Attachment method for microfluidic device

 #48
20180308670
2018-10-25

Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition

 #49
20180267075
2018-09-20

MEMS manufacturing method and MEMS manufacturing apparatus

 #50
20180201503
2018-07-19

Micro-electro-mechanical system (MEMS) structures and design structures

 #51
20180201502
2018-07-19

Micro-electro-mechanical system (MEMS) structures and design structures

 #52
20180179052
2018-06-28

Micro-electro-mechanical system (MEMS) structures and design structures

 #53
20180179049
2018-06-28

MEMS sensors with selectively adjusted damping of suspension

 #54
20180174851
2018-06-21

Thin film metal silicides and methods for formation

 #55
20180155183
2018-06-07

Low friction coating formed of boron-doped zinc oxide thin film and micromachine

 #56
20180148328
2018-05-31

Process for producing an electromechanical device

 #57
20180118560
2018-05-03

Method and structure for CMOS-MEMS thin film encapsulation

 #58
20170297901
2017-10-19

Semiconductor structure and manufacturing method thereof

 #59
20170272050
2017-09-21

Resonator manufacturing method

 #60
20170260042
2017-09-14

Method and structure for CMOS-MEMS thin film encapsulation

 #61
20170234754
2017-08-17

Waterproof member, manufacturing method of waterproof member, pressure sensor, and electronic module

 #62
20170174510
2017-06-22

METHOD OF ADDRESSING FILM LIFTOFF IN MEMS FABRICATION

 #63
20170015548
2017-01-19

Open cavity package using chip-embedding technology

 #64
20160353210
2016-12-01

Micromechanical structure comprising carbon material and method for fabricating the same

 #65
20160264410
2016-09-15

Micro-electro-mechanical system (MEMS) structures and design structures

 #66
20160264408
2016-09-15

Manufacture of microneedles

 #67
20160264406
2016-09-15

Micro-electro-mechanical system (MEMS) structures and design structures

 #68
20160264405
2016-09-15

Micro-Electro-Mechanical System (MEMS) structures and design structures

 #69
20160233097
2016-08-11

Thin film metal silicides and methods for formation

 #70
20160200568
2016-07-14

Substrate etch

 #71
20160052775
2016-02-25

Micro-sensor body and method for manufacturing the same, as well as micro-sensor

 #72
20160031701
2016-02-04

Micromechanical structure and method for fabricating the same

 #73
20150368090
2015-12-24

Micro-electro-mechanical system (MEMS) structures and design structures

 #74
20140308771
2014-10-16

Method for forming micro-electro-mechanical system (MEMS) beam structure

 #75
20140078640
2014-03-20

Thin film device and method for manufacturing thin film device

 #76
20140004374
2014-01-02

Multi-layer encapsulated structures

 #77
20130234270
2013-09-12

Atomic layer deposition strengthening members and method of manufacture

 #78
20130106875
2013-05-02

METHOD OF IMPROVING THIN-FILM ENCAPSULATION FOR AN ELECTROMECHANICAL SYSTEMS ASSEMBLY

 #79
20120329253
2012-12-27

Method of manufacturing semiconductor device

 #80
20120234688
2012-09-20

Method for Electrochemical Fabrication

 #81
20120228143
2012-09-13

Method for electromechanical fabrication

 #82
20110308957
2011-12-22

Structuring three-dimensional components with non-diffusing noble or special metals and their alloys, with use being made of sputter technology

 #83
20110247941
2011-10-13

Method for electrochemical fabrication

 #84
20110209970
2011-09-01

SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY

 #85
20110180410
2011-07-28

Electrochemically Fabricated Structures Having Dielectric or Active Bases and Methods of and Apparatus for Producing Such Structures

 #86
20110156528
2011-06-30

MICRO ACTUATOR, MICRO ACTUATOR SYSTEM, AND METHOD FOR FABRICATING MICRO ACTUATOR

 #87
20100314724
2010-12-16

Selective UV-Ozone dry etching of anti-stiction coatings for MEMS device fabrication

 #88
20100314258
2010-12-16

Electrochemical Fabrication Processes Incorporating Non-Platable Metals and/or Metals that are Difficult to Plate On

 #89
20100264037
2010-10-21

Method for Electrochemical Fabrication

 #90
20100193366
2010-08-05

Method for electrochemical fabrication

 #91
20090234425
2009-09-17

Method for producing implant structures for contacting or electrostimulation of living tissue cells or nerves

 #92
20090038948
2009-02-12

Electrochemically Fabricated Structures Having Dielectric or Active Bases and Methods of and Apparatus for Producing Such Structures

 #93
20080268580
2008-10-30

Method for low-temperature sealing of a cavity under vacuum or under controlled atmosphere

 #94
20080230390
2008-09-25

Method for Electrochemical Fabrication

 #95
20080179279
2008-07-31

Method for Electrochemical Fabrication

 #96
20080121618
2008-05-29

Method of electrochemical fabrication

 #97
20080116554
2008-05-22

PACKAGING MICRO DEVICES

 #98
20080110857
2008-05-15

Method of Electrochemical Fabrication

 #99
20080110856
2008-05-15

Method for electrochemical fabrication

 #100
20080099338
2008-05-01

Method for Electrochemical Fabrication

 #101
20080006850
2008-01-10

System and method for forming through wafer vias using reverse pulse plating

 #102
20070181430
2007-08-09

Method For Electrochemical Fabrication

 #103
20070158200
2007-07-12

Electrochemical fabrication processes incorporating non-platable metals and/or metals that are difficult to plate on

 #104
20070015304
2007-01-18

Low compressive TiNx, materials and methods of making the same

 #105
20060232374
2006-10-19

Tear-resistant thin film methods of fabrication

 #106
20060068125
2006-03-30

Method for producing carbon surface films by plasma exposure of a carbide compound

 #107
20050233551
2005-10-20

Method for depositing silicon by pulsed cathodic vacuum arc

 #108
20050067292
2005-03-31

Electrochemically fabricated structures having dielectric or active bases and methods of and apparatus for producing such structures

 #109
15055072
2017-05-23

Semiconductor structure and manufacturing method thereof