84142 ⎘
Manufacture or treatment of microstructural devices or systems; Treatments for avoiding stiction of elastic or moving parts of MEMS Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts
Anti-Stiction Process for Mems Device
#2MEMS ELECTROSTATIC ACTUATOR BLADE CONFIGURATIONS AND METHODS OF MANUFACTURE
#3ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION
#4SEMICONDUCTOR MEMS STRUCTURE AND METHOD OF FORMING THE SAME
#5METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#6ASYMMETRIC FILLER AS TEMPERATURE TRANSIENT FIX
#7METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
#8METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
#9ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
#10Method and structure for CMOS-MEMS thin film encapsulation
#11Roughness selectivity for MEMS movement stiction reduction
#12METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#13Method and system for fabricating a MEMS device
#14Method and system for fabricating a MEMS device
#15MEMS device and method for making the same
#16Anti-stiction enhancement of ruthenium contact
#17Anti-stiction process for MEMS device
#18Mems device having a rugged package and fabrication process thereof
#19Roughness selectivity for MEMS movement stiction reduction
#20Dual back-plate and diaphragm microphone
#21Selective self-assembled monolayer patterning with sacrificial layer for devices
#22MEMS apparatus with anti-stiction layer
#23Method and structure for CMOS-MEMS thin film encapsulation
#24Fence structure to prevent stiction in a MEMS motion sensor
#25Anti-stiction process for MEMS device
#26MEMS DEVICE HAVING A RUGGED PACKAGE AND FABRICATION PROCESS THEREOF
#27Dual back-plate and diaphragm microphone
#28Rough layer for better anti-stiction deposition
#29Method of stiction prevention by patterned anti-stiction layer
#30Semiconductor device and manufacture thereof
#31Method of fabricating semiconductor structure
#32Comb MEMS Device and Method of Making a Comb MEMS Device
#33Method for manufacturing a micromechanical sensor
#34Fence structure to prevent stiction in a MEMS motion sensor
#35Systems and methods for uniform target erosion magnetic assemblies
#36Anti-stiction process for MEMS device
#37Method of stiction prevention by patterned anti-stiction layer
#38Semiconductor device and manufacture thereof
#39Manufacturing method of micro-electro-mechanical systems device
#40Method and structure for CMOS-MEMS thin film encapsulation
#41Semiconductor MEMS structure
#42MEMS structure with graphene component
#43Controlled deposition of metal and metal cluster ions by surface field patterning in soft-landing devices
#44Semiconductor MEMS structure and manufacturing method thereof
#45Rough layer for better anti-stiction deposition
#46Method and structure for CMOS-MEMS thin film encapsulation
#47Pressure sensor
#48RESONANCE-ACTUATION OF MICROSHUTTER ARRAYS
#49Comb MEMS device and method of making a comb MEMS device
#50Semiconductive structure and manufacturing method thereof
#51METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
#52Semiconductor sensing structure and manufacturing method thereof
#53MEMS structure having rounded edge stopper and method of fabricating the same
#54METHOD FOR FORMING ANTI STICTION COATING AND ANTI STICTION COATING THEREOF
#55Self-removal anti-stiction coating for bonding process
#56Substrate structure, semiconductor structure and method for fabricating the same
#57Method of selectively removing an anti-stiction layer on a eutectic bonding area
#58Method for MEMS structure with dual-level structural layer and acoustic port
#59Coatings for relatively movable surfaces
#60Methods of forming microstructure and electronic device having moveable component
#61Pressure sensor and manufacture method thereof
#62METHOD FOR FORMING ANTI STICTION COATING AND ANTI STICTION COATING THEREOF
#63Reducing MEMS stiction by introduction of a carbon barrier
#64Controlled deposition of metal and metal cluster ions by surface field patterning in soft-landing devices
#65Apparatus and method for preventing stiction of MEMS devices encapsulated by active circuitry
#66DEPOSITION TECHNIQUE FOR DEPOSITING A COATING ON A DEVICE
#67Method for MEMS structure with dual-level structural layer and acoustic port
#68Low-voltage MEMS shutter assemblies
#69Reducing MEMS stiction by introduction of a carbon barrier
#70Method for wafer-level surface micromachining to reduce stiction
#71METHOD AND APPARATUS FOR APPLICATION OF ANTI-STICTION COATING
#72Wafer-level passivation structure of micro-device, micro-device including the same, and methods of manufacturing wafer-level passivation structure and micro-device
#73METHOD OF PREVENTING STICTION OF MEMS DEVICES
#74Releasing and post-releasing processes in fabrications for micromirror array devices
#75Microstructure and electronic device
#76Self-removal anti-stiction coating for bonding process
#77METHOD FOR COATING MICROMECHANICAL COMPONENTS OF A MICROMECHANICAL SYSTEM, IN PARTICULAR A WATCH AND RELATED MICROMECHANICAL COATED COMPONENT
#78Method of fabricating a membrane having a tapered pore
#79Vapor deposition of anti-stiction layer for micromechanical devices
#80Controlled deposition of metal and metal cluster ions by surface field patterning in soft-landing devices
#81MEMS devices with multi-component sacrificial layers
#82MOVING STRUCTURE AND LIGHT SCANNING MIRROR USING THE SAME
#83Display device with at least one movable stop element
#84Electret condenser
#85Selective UV-Ozone dry etching of anti-stiction coatings for MEMS device fabrication
#86Display device with desiccant
#87MEMS devices with multi-component sacrificial layers
#88MICROMECHANICAL COMPONENT HAVING AN ANTI-ADHESIVE LAYER
#89Wear-resistant, carbon-doped metal oxide coatings for MEMS and nanoimprint lithography
#90Method of manufacturing a micromechanical part
#91Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
#92Method of fabricating a membrane having a tapered pore
#93Methods for forming metal layers for a MEMS device integrated circuit
#94Anti-stiction technique for electromechanical systems and electromechanical device employing same
#95MEMS DEVICES WITH PROTECTIVE COATINGS
#96Method for Depositing an Anti-Adhesion Layer
#97Electromechanical device treatment with water vapor
#98MEMS Passivation with Phosphonate Surfactants
#99Method of Forming a Micromechanical Device with Microfluidic Lubricant Channel
#100Micro electro-mechanical system and method of manufacturing the same
#101Aluminum fluoride films for microelectromechanical system applications
#102PACKAGING MICRO DEVICES
#103Preparation of microelectromechanical system device using an anti-stiction material and selective plasma sputtering
#104MICRO DEVICES HAVING ANTI-STICTION MATERIALS
#105In SITU application of anti-stiction materials to micro devices
#106Micro-mechanical structure and method for manufacturing the same
#107Methods for producing MEMS with protective coatings using multi-component sacrificial layers
#108Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor
#109Electret condenser
#110Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
#111Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
#112Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
#113Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
#114Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
#115Spatial light modulator multi-layer mirror plate
#116Stacked structure and production method thereof
#117Antistiction MEMS substrate and method of manufacture
#118Anti-stiction technique for electromechanical systems and electromechanical device employing same
#119System and method of providing a regenerating protective coating in a MEMS device
#120Micromachine and manufacturing method
#121Tungsten coated silicon fingers
#122Surface lubrication in microstructures
#123Method for removing a sacrificial material with a compressed fluid
#124MEMS passivation with phosphonate surfactants
#125MEMS passivation with transition metals
#126Surface processing method for a chip device and a chip device formed by he method
#127Surface processes in fabrications of microstructures
#128Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
#129Methods for forming composite coatings on MEMS devices
#130AlOatomic layer deposition to enhance the deposition of hydrophobic or hydrophilic coatings on micro-electromechanical devices
#131Forming a eutectic bond between a wafer having an anti-stiction coating and a cap wafer