Patents-Review.com
ClassID:

84154 ⎘

B81C2203/0172 - CPC Classification

Classification description:

Forming microstructural systems; Packaging MEMS Seals

Sub-classes:
Recent Application in this class:
#1
20260125261
2026-05-07

MEMS ELECTROSTATIC ACTUATOR BLADE CONFIGURATIONS AND METHODS OF MANUFACTURE

 #2
20250346484
2025-11-13

MICROMECHANICAL DEVICE AND METHOD FOR PRODUCING A MICROMECHANICAL DEVICE HAVING A MEMS SUBSTRATE AND A CAP SUBSTRATE AND A CAVERN ENCLOSED BY MEMS SUBSTRATE AND CAP SUBSTRATE

 #3
20250145452
2025-05-08

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

 #4
20240425360
2024-12-26

MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME

 #5
20240262682
2024-08-08

METHOD FOR PRODUCING A MICROMECHANICAL DEVICE COMPRISING A CAVITY HAVING A MELT SEAL

 #6
20240109771
2024-04-04

METHODS FOR SEALING CAVITIES IN MICRO-FABRICATED DEVICES AND MICRO-FABRICATED DEVICES FABRICATED IN ACCORDANCE WITH SAME

 #7
20240051819
2024-02-15

METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE

 #8
20230375983
2023-11-23

FABRICATION OF GLASS CELLS FOR HERMETIC GAS ENCLOSURES

 #9
20230331546
2023-10-19

MEMS STRUCTURE

 #10
20220315414
2022-10-06

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

 #11
20220315411
2022-10-06

Inertial sensor and method for manufacturing the same

 #12
20210380404
2021-12-09

MEMS device, manufacturing method of the same, and integrated MEMS module using the same

 #13
20210323816
2021-10-21

THROUGH-SUBSTRATE CONDUCTOR SUPPORT

 #14
20200391995
2020-12-17

Methods for packaging a microelectromechanical systems device

 #15
20200198966
2020-06-25

Micromechanical device and method for manufacturing a micromechanical device

 #16
20200189909
2020-06-18

Microelectromechanical systems packages and methods for packaging a microelectromechanical systems device

 #17
20200024127
2020-01-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #18
20200017356
2020-01-16

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #19
20200017355
2020-01-16

Planar cavity mems and related structures, methods of manufacture and design structures

 #20
20190382262
2019-12-19

Through-substrate conductor support

 #21
20190329252
2019-10-31

MICROFLUIDIC CELL AND METHOD FOR THE PRODUCTION THEREOF

 #22
20190321821
2019-10-24

Microfluidic component package

 #23
20190315621
2019-10-17

Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite

 #24
20190315619
2019-10-17

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #25
20190248644
2019-08-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #26
20190233277
2019-08-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #27
20190169017
2019-06-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #28
20190152767
2019-05-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #29
20180346318
2018-12-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #30
20180327255
2018-11-15

SYSTEMS AND METHODS FOR MULTI-SENSOR INTEGRATED SENSOR DEVICES

 #31
20180319652
2018-11-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #32
20180257931
2018-09-13

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #33
20180244514
2018-08-30

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #34
20180238720
2018-08-23

Methods for fabricating an apparatus having a hermetic seal

 #35
20180194618
2018-07-12

MEMS devices and methods of forming the same

 #36
20180186629
2018-07-05

Through-substrate conductor support

 #37
20180072568
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #38
20180072567
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #39
20180072566
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #40
20180057357
2018-03-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #41
20180050903
2018-02-22

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #42
20180009658
2018-01-11

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #43
20170233247
2017-08-17

Low cost wafer level process for packaging MEMS three dimensional devices

 #44
20170217755
2017-08-03

Pressure sensor, manufacturing method of pressure sensor, altimeter, electronic apparatus, and moving object

 #45
20170210618
2017-07-27

MEMS devices and methods of forming the same

 #46
20170199217
2017-07-13

ELECTRONIC DEVICE, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND PHYSICAL-QUANTITY SENSOR

 #47
20170197822
2017-07-13

Membrane transducer structures and methods of manufacturing same using thin-film encapsulation

 #48
20170158491
2017-06-08

LASER RESEAL HAVING SPECIAL DIAPHRAGM STRUCTURE

 #49
20170129774
2017-05-11

Pressure sensor

 #50
20170129772
2017-05-11

Semiconductor structure and method for fabricating the same

 #51
20170121170
2017-05-04

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #52
20170081178
2017-03-23

SEMICONDUCTOR DEVICE PACKAGE WITH SEAL STRUCTURE

 #53
20170022048
2017-01-26

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #54
20160362295
2016-12-15

Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS)

 #55
20160355397
2016-12-08

Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation

 #56
20160355392
2016-12-08

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #57
20160325986
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #58
20160325983
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #59
20160325982
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #60
20160289064
2016-10-06

Thin Film Encapsulation of Electrodes

 #61
20160289063
2016-10-06

Electromechanical device including a suspended structure and method of fabricating the same

 #62
20160272487
2016-09-22

Semiconductor pressure sensor and method of fabricating same

 #63
20160244321
2016-08-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #64
20160161957
2016-06-09

Integration of pressure sensors into integrated circuit fabrication and packaging

 #65
20160099124
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #66
20160083245
2016-03-24

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #67
20160075554
2016-03-17

INTERNAL BARRIER FOR ENCLOSED MEMS DEVICES

 #68
20160060099
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #69
20160055282
2016-02-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #70
20160025664
2016-01-28

Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation

 #71
20160023889
2016-01-28

Membrane transducer structures and methods of manufacturing same using thin-film encapsulation

 #72
20160023888
2016-01-28

Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS)

 #73
20150375994
2015-12-31

Pressure sensor and manufacture method thereof

 #74
20150316517
2015-11-05

Device comprising a fluid channel provided with at least one micro or nanoelectronic system and method for carrying out such a device

 #75
20150274509
2015-10-01

MEMS device and method of manufacturing the same

 #76
20150232323
2015-08-20

Method for producing a micromechanical component, and micromechanical component

 #77
20150185247
2015-07-02

Magnet placement for integrated sensor packages

 #78
20150183635
2015-07-02

Integration of pressure or inertial sensors into integrated circuit fabrication and packaging

 #79
20150166333
2015-06-18

MEMS encapsulation by multilayer film lamination

 #80
20150158721
2015-06-11

MEMS device with sealed cavity and release chamber and related double release method

 #81
20150137283
2015-05-21

MEMS devices, packaged MEMS devices, and methods of manufacture thereof

 #82
20150097260
2015-04-09

Single silicon wafer micromachined thermal conduction sensor

 #83
20150041932
2015-02-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #84
20140015069
2014-01-16

MEMS devices, packaged MEMS devices, and methods of manufacture thereof

 #85
20110318861
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #86
20110316101
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #87
20110316099
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #88
20110316098
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #89
20110316097
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #90
20110315528
2011-12-29

Methods of manufacture for micro-electro-mechanical system (MEMS)

 #91
20110315527
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #92
20110315526
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

 #93
20110314669
2011-12-29

Method of manufacturing a micro-electro-mechanical system (MEMS)

 #94
15363389
2017-12-05

Structure and formation method of semiconductor device structure

 #95
15333810
2018-01-30

MEMS sensor with electronics integration

 #96
14456808
2019-06-04

Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite