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Forming microstructural systems; Packaging MEMS; Seals Using microheaters for bonding the lid
Process for encapsulation of a microelectronic device by easily manipulated thin or ultrathin substrates
#2Targeted control of the absorption behavior during laser resealing
#3Laser reseal including a protective structure
#4Microelectromechanical device packages with integral heaters
#5Covering Device for an Organic Substrate, Substrate with a Covering Device, and Method for Producing a Covering Device
#6Microelectromechanical device packages with integral heaters
#7Microstructure sealing tool and methods of using the same
#8Method for attaching chips in a flip-chip arrangement
#9Microelectromechanical device packages with integral heaters
#10Microelectromechanical device packages with integral heaters