84181 ⎘
Forming microstructural systems; Integrating an electronic processing unit with a micromechanical structure; Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure; Topology for facilitating the monolithic integration Forming the micromechanical structure in a groove
Two-port SRAM connection structure
#2Multi-faced component-based electromechanical device
#3Two-port SRAM connection structure
#4MEMS device with a capping substrate
#5MEMS device
#6Electronic device, method for producing the same, and oscillator