B81C2203/0757 - CPC Classification Index

ClassID:

84180 ⎘

B81C2203/0757 - CPC Classification

Classification description:

Forming microstructural systems; Integrating an electronic processing unit with a micromechanical structure; Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure Topology for facilitating the monolithic integration

Sub-classes:

B81C2203/0764 » Forming the micromechanical structure in a groove 6
B81C2203/0771 » Stacking the electronic processing unit and the micromechanical structure 119
B81C2203/0778 » Topology for facilitating the monolithic integration not provided for in to 19

Recent Application in this class:

20190062154

2019-02-28

Three-dimensional micro devices and method for their production

20180016136

2018-01-18

Method for manufacturing doubly re-entrant microstructures