84183 ⎘
Forming microstructural systems; Integrating an electronic processing unit with a micromechanical structure; Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure; Topology for facilitating the monolithic integration Topology for facilitating the monolithic integration not provided for in -
MEMS device package and method for manufacturing the same
#2Two-port SRAM connection structure
#3Vertical system integration
#4Manufacturing method for a micromechanical pressure sensor device and corresponding micromechanical pressure sensor device
#5Semiconductor structure and fabrication method thereof
#6Two-port SRAM connection structure
#7MEMS device with a capping substrate
#8MEMS device and method for manufacturing the same
#9Stress-controlled formation of TiN hard mask
#10Thin-film transistors incorporated into three dimensional MEMS structures
#11Method of fabricating integrated semiconductor device and structure thereof
#12MEMS device with a capping substrate
#13Epitaxial silicon CMOS-MEMS microphones and method for manufacturing
#14Method of fabricating integrated semiconductor device with MOS, NPN BJT, LDMOS, pre-amplifier and MEMS unit
#15Semiconductor device with integrated circuit electrically connected to a MEMS sensor by a through-electrode
#16Micromechanical component having a monolithically integrated circuit and method for manufacturing a component
#17Monolithic MEMS and integrated circuit device having a barrier and method of fabricating the same
#18Hybrid type semiconductor integrated circuit and method of manufacturing the same
#19Micromechanical sensor