93336 ⎘
Sulfonic acids; Halides, esters, or anhydrides thereof; Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing oxygen atoms bound to the carbon skeleton containing etherified hydroxy groups bound to the carbon skeleton
Sub-classes:Resist composition, patterning process, and barium salt
#2Resist composition and patterning process
#3Resist composition, method of forming resist pattern, polymeric compound, and compound
#4Resist composition, method of forming resist pattern, compound and acid generator
#5Composite film, flexible substrate including the composite film, and organic light emitting device including the flexible substrate
#6Manufacturing method for sulfonic acid group-containing ether compound
#7Resist composition, method of forming resist pattern, compound and acid generator