120137 ⎘
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes Coating on selected surface areas, e.g. using masks
Thin film deposition apparatus
#302Method for encapsulating a nanostructure, coated nanostructure and use of a coated nanostructure
#303Gas flow profile modulated control of overlay in plasma CVD films
#304Film forming apparatus
#305SELECTIVE DEPOSITION
#306Negative patterning approach for ultra-narrow gap devices
#307Substrate processing apparatus
#308Method and apparatus for forming nitride film
#309Selective deposition of tungsten
#310Mask frame assembly including pattern position adjusting mechanism and pattern position adjusting method using the mask frame assembly
#311Method and apparatus for selective film deposition using a cyclic treatment
#312Organic reactants for atomic layer deposition
#313Tungsten feature fill with nucleation inhibition
#314VAPOR DEPOSITION MASK, VAPOR DEPOSITION DEVICE, METHOD FOR MANUFACTURING VAPOR DEPOSITION MASK, AND VAPOR DEPOSITION METHOD
#315Atomic layer deposition-inhibiting material
#316Deposition of organic films
#317Deposition of organic films
#318Apparatus and method for selective deposition
#319Patterned film structure, patterned film composite structure, method of selective inhibition of formation of organic film and method of selective adjustment of thickness of organic film
#320Selective deposition with surface treatment
#321Selective deposition through formation of self-assembled monolayers
#322DEPOSITION-MASK MANUFACTURING METHOD, DEPOSITION MASK, DEPOSITION DEVICE, AND DEPOSITION METHOD
#323METHOD FOR COATING THE NOSE OF THE CAMS OF A CAMSHAFT WITH DLC, CAMSHAFT OBTAINED IN THIS WAY AND FACILITY FOR IMPLEMENTING SAID METHOD
#324COMBINED ANNEAL AND SELECTIVE DEPOSITION SYSTEMS
#325Nitride film forming method and storage medium
#326Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method
#327Method for forming a protective film
#328Facile route to templated growth of two-dimensional layered materials
#329Susceptor and method for manufacturing same
#330Method for coating the nose of the cams of a camshaft with DLC, camshaft obtained in this way and facility for implementing said method
#331Nano deposition and ablation for the repair and fabrication of integrated circuits
#332Bottom-up gap-fill by surface poisoning treatment
#333Suppressing aging of platinum group metal particles in a catalytic converter
#334Deposition Of Conformal And Gap-Fill Amorphous Silicon Thin-Films
#335Methods of forming an ALD-inhibiting layer using a self-assembled monolayer
#336Apparatus and method for selective deposition
#337Selective formation of metallic films on metallic surfaces
#338Device and method for printing silicon sealant
#339Selective deposition on metal or metallic surfaces relative to dielectric surfaces
#340Methods for thin film deposition
#341Hybrid layers for use in coatings on electronic devices or other articles
#342Frame for mask plate and mask plate
#343Feature fill with multi-stage nucleation inhibition
#344SYSTEM AND METHOD FOR CHEMICALLY PATTERNED PAPER MICROFLUIDIC DEVICES
#345Mask frame assembly and manufacturing method of the same
#346ENTWINED MANIFOLDS FOR VAPOR DEPOSITION AND FLUID MIXING
#347MASK FRAME ASSEMBLY FOR THIN LAYER DEPOSITION, METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING DISPLAY APPARATUS BY USING THE MASK FRAME ASSEMBLY
#348Selective deposition of thin film dielectrics using surface blocking chemistry
#349Reactive coating processes
#350Single platform, multiple cycle spacer deposition and etch
#351Gas flow profile modulated control of overlay in plasma CVD films
#352Ultrathin multilayer metal alloy liner for nano Cu interconnects
#353Ultrathin multilayer metal alloy liner for nano Cu interconnects
#354Selective step coverage for micro-fabricated structures
#355Selective deposition utilizing masks and directional plasma treatment
#356Method of protecting lamination stacks of a component of an electric machine and component obtained by the method
#357Selective deposition
#358METHOD FOR PRODUCING A SURFACE STRUCTURE ON A PRESSING TOOL BY APPLYING METAL COATINGS
#359Atomic layer deposition method for coating a substrate surface using successive surface reactions with multiple precursors
#360Use of an inhibitor molecule in chemical vapor deposition to afford deposition of copper on a metal substrate with no deposition on adjacent SIO2 substrate
#361Method of analyzing growth of two-dimensional material
#362Alcohol assisted ALD film deposition
#363Methods for thermally forming a selective cobalt layer
#364Fabrication of biscrolled fiber using carbon nanotube sheet
#365Selective area deposition of metal films by atomic layer deposition (ALD) and chemical vapor deposition (CVD)
#366Method of processing substrate, substrate processing apparatus, and recording medium
#367Tungsten feature fill with nucleation inhibition
#368Electrically reconfigurable deposition masks
#369Laminate, barrier film and method for manufacturing these
#370Selective formation of metallic films on metallic surfaces
#371Carbon nanostructure, and method and apparatus for manufacturing carbon nanostructure
#372Thin film deposition apparatus
#373Segmented graphene growth on surfaces of a patterned substrate layer and devices thereof
#374Method for reducing particle generation at bevel portion of substrate
#375Fabrication of biscrolled fiber using carbon nanotube sheet
#376Dual selective deposition
#377Coating inspection method
#378Nano deposition and ablation for the repair and fabrication of integrated circuits
#379Methods and apparatus for selective deposition of cobalt in semiconductor processing
#380Spatial deposition of material using short-distance reciprocating motions
#381Forming method and forming apparatus of carbon nanotubes
#382Methods and Apparatus for Combinatorial PECVD or PEALD
#383Systems and Methods for Parallel Combinatorial Vapor Deposition Processing
#384Methods of selective layer deposition
#385Gate-tunable graphene-ferroelectric hybrid structure for photonics and plasmonics
#386METHOD AND DEVICE FOR CONTROLLING PATTERN AND STRUCTURE FORMATION BY AN ELECTRIC FIELD
#387Method of fabricating a uniformly aligned planar array of nanowires using atomic layer deposition
#388Method of forming mask structure
#389Thin-film depositing apparatus
#390Method and apparatus for direct formation of nanometer scaled features
#391PRINTING OF COLORED PATTERN USING ATOMIC LAYER DEPOSITION
#392Cluster apparatus for treating substrate
#393Patterned processing kits for material processing
#394FORMATION OF A SUPRA-MONOLAYER NANOPATTERN AND ITS USES
#395Methods for applying a coating to a substrate in rolled form
#396Method to increase interconnect reliability
#397Methods for forming a conductive material and methods for forming a conductive structure
#398Deposition mask and deposition apparatus having the same
#399THIN FILM DEPOSITING APPARATUS AND THIN FILM DEPOSITION METHOD USING THE SAME
#400Laminate body, gas barrier film, and method of manufacturing the same
#401Method and apparatus for high-K gate performance improvement and combinatorial processing
#402Method to control amorphous oxide layer formation at interfaces of thin film stacks for memory and logic components
#403THIN FILM DIELECTRIC LAYER FORMATION
#404Patterned thin film dielectric stack formation
#405Combinatorial approach for screening of ALD film stacks
#406Hybrid layers for use in coatings on electronic devices or other articles
#407Method of depositing a thin film
#408Method and system for ion-assisted processing
#409Methods for improving corrosion resistance and applications in electrical connectors
#410Selective atomic layer depositions
#411Laser crystal components joined with thermal management devices
#412Precursors and methods for the selective deposition of cobalt and manganese on metal surfaces
#413Selective formation of metallic films on metallic surfaces
#414OXIDE MESOSTRUCTURED FILM AND METHOD FOR MANUFACTURING THE SAME
#415System and method for tissue construction using an electric field applicator
#416Systems and methods for depositing materials on either side of a freestanding film using selective thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same
#417Enhanced Isolation For Combinatorial Atomic Layer Deposition (ALD)
#418Production method for semiconductor device
#419Combinatorial approach for screening of ALD film stacks
#420Manufacturing method of semiconductor device
#421Method for selectively depositing noble metals on metal/metal nitride substrates
#422Thin film forming apparatus
#423Continuous patterned layer deposition
#424Combinatorial plasma enhanced deposition techniques
#425Method of making a nanostructure
#426Maskant free diffusion coating process
#427Microcontact printed films as an activation layer for selective atomic layer deposition
#428APPARATUS AND METHOD FOR COMBINATORIAL PLASMA DISTRIBUTION THROUGH A MULTI-ZONED SHOWERHEAD
#429MANUFACTURING METHOD OF SEMICONDUCTOR APPARATUS
#430Apparatus and method for combinatorial gas distribution through a multi-zoned showerhead
#431Atomic layer deposition for controlling vertical film growth
#432Direct Synthesis of Patterned Graphene by Deposition
#433Integrated circuits having interconnects and heat dissipators based on nanostructures
#434Protective film and method for producing same
#435PROCESS SEQUENCING FOR HPC ALD SYSTEM
#436Method and apparatus for depositing LED organic film
#437Laser crystal components joined with thermal management devices
#438Method for forming barrier film on wiring line
#439Smoothing agents to enhance nucleation density in thin film chemical vapor deposition
#440Combinatorial plasma enhanced deposition techniques
#441Combinatorial plasma enhanced deposition techniques
#442Fabrication of biscrolled fiber using carbon nanotube sheet
#443Combinatorial plasma enhanced deposition techniques
#444Combinatorial plasma enhanced deposition techniques
#445Electronic device
#446Combinatorial plasma enhanced deposition techniques
#447Confined Lateral Growth of Crystalline Material
#448Method and apparatus for depositing LED organic film
#449Method for patterning a substrate using ion assisted selective depostion
#450Method for manufacturing a submillimetric electrically conductive grid coated with an overgrid
#451Film-forming method and film-forming apparatus
#452Sealing structure and fuel cell having the sealing structure
#453Method for applying a layer to a substrate
#454Reactive site deactivation against vapor deposition
#455Shadow ring for modifying wafer edge and bevel deposition
#456Method and apparatus for processing bevel edge
#457Method for selective deposition and devices
#458METHOD FOR SELECTIVE DEPOSITION AND DEVICES
#459Method for selective deposition and devices
#460Hybrid layers for use in coatings on electronic devices or other articles
#461MULTILAYER FILM STRUCTURE, AND METHOD AND APPARATUS FOR TRANSFERRING NANO-CARBON MATERIAL
#462COATING AND A METHOD FOR PRODUCING A COATING
#463Thin film deposition apparatus
#464CURVED MICROWAVE PLASMA LINE SOURCE FOR COATING OF THREE-DIMENSIONAL SUBSTRATES
#465SELECTIVE DEPOSITION OF SIGE LAYERS FROM SINGLE SOURCE OF SI-GE HYDRIDES
#466Multi-Step Method to Selectively Deposit Ruthenium Layers of Arbitrary Thickness on Copper
#467Integrated circuits having interconnects and heat dissipators based on nanostructures
#468Atomic Layer Deposition Process
#469Thin film deposition apparatus
#470METHOD FOR FORMING SILICON DOTS
#471MASK FOR FILM FORMATION AND MASK-AFFIXING METHOD
#472Substrate reactor with adjustable injectors for mixing gases within reaction chamber
#473DEPOSITION METHOD AND A DEPOSITION APPARATUS OF FINE PARTICLES, A FORMING METHOD AND A FORMING APPARATUS OF CARBON NANOTUBES, AND A SEMICONDUCTOR DEVICE AND A MANUFACTURING METHOD OF THE SAME
#474METHOD FOR MANUFACTURE AND COATING OF NANOSTRUCTURED COMPONENTS
#475Controlled growth of a nanostructure on a substrate, and electron emission devices based on the same
#476Structure comprises an As-deposited doped single crystalline Si-containing film
#477Methods for forming a conductive material, methods for selectively forming a conductive material, methods for forming platinum, and methods for forming conductive structures
#478PRE-COATING AND WAFER-LESS AUTO-CLEANING SYSTEM AND METHOD
#479Separate injection of reactive species in selective formation of films
#480Apparatus and method for fabricating one-dimensional nanostructures on flexible substrates
#481Selective growth of polycrystalline silicon-containing semiconductor material on a silicon-containing semiconductor surface
#482Scanning probe assisted localized CNT growth
#483Method of forming semiconductor devices containing metal cap layers
#484Method for selectively etching areas of a substrate using a gas cluster ion beam
#485Edge healing and field repair of plasma coating
#486Combinatorial plasma enhanced deposition techniques
#487Method for applying selectively a layer to a structured substrate by the usage of a temperature gradient in the substrate
#488Indexable cutting insert and method for producing the same
#489Separate injection of reactive species in selective formation of films
#490Methods of selectively depositing silicon-containing films
#491Inhibitors for selective deposition of silicon containing films
#492Controlled growth of a nanostructure on a substrate
#493Selective ruthenium deposition on copper materials
#494Film position adjusting method, memory medium and substrate processing system
#495HYBRID PHOTOVOLTAICALLY ACTIVE LAYER AND METHOD FOR FORMING SUCH A LAYER
#496Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition
#497Process for selectively depositing copper thin films on substrates with copper and ruthenium areas via vapor deposition
#498Method for improving the selectivity of a CVD process
#499Atomic layer deposition method and semiconductor device formed by the same
#500METHOD OF MANUFACTURING AN OPTICAL ELEMENT FROM SILICA OR GLASS
#501Fabrication method of size-controlled, spatially distributed nanostructures by atomic layer deposition
#502Substrate processing apparatus and semiconductor device producing method
#503Manufacturing method of semiconductor apparatus
#504Metal catalyzed selective deposition of materials including germanium and antimony
#505Substrate with transparent conductive oxide film, process for its production and photoelectric conversion element
#506LOCAL PLASMA PROCESSING
#507Nanosize Heater-Mounted Nozzle and Method for Manufacturing Same and Method for Forming Micro Thin Film
#508Support device with discrete getter material microelectronic devices
#509System and method of selectively depositing Ruthenium films by digital chemical vapor deposition
#510METHODS AND SYSTEMS FOR SELECTIVELY DEPOSITING SI-CONTAINING FILMS USING CHLOROPOLYSILANES
#511PATTERNED ELECTROLESS METALLIZATION PROCESSES FOR LARGE AREA ELECTRONICS
#512Method for the organised growth of nanostructures
#513Integrated circuits having interconnects and heat dissipators based on nanostructures
#514Apparatus for processing substrate and apparatus for processing electron source substrate
#515METHODS OF SELECTIVELY FORMING AN EPITAXIAL SEMICONDUCTOR LAYER USING ULTRA HIGH VACUUM CHEMICAL VAPOR DEPOSITION TECHNIQUE AND BATCH-TYPE ULTRA HIGH VACUUM CHEMICAL VAPOR DEPOSITION APPARATUS USED THEREIN
#516Local plasma processing
#517Deposition methods
#518Method of preparing catalyst layer for synthesis of carbon nanotubes and method of synthesizing carbon nanotubes using the same
#519Systems and methods for producing single-walled carbon nanotubes (SWNTs) on a substrate
#520Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition
#521Selective deposition of silicon-containing films
#522Method and apparatus for treating a substrate
#523Method for selective chemical vapor deposition of nanotubes
#524Methods of depositing electrically active doped crystalline Si-containing films
#525Substrate with transparent conductive oxide film, process for its production and photoelectric conversion element
#526Extrusion die coating method
#527Method and apparatus for depositing LED organic film
#528Plasma-assisted enhanced coating
#529Surface and composition enhancements to high aspect ratio C-MEMS
#530System and method for controlling nanostructure growth
#531Method of depositing polysilicon
#532Method of forming a capacitor
#533Combinatorial synthesis of material chips
#534Process for manufacturing microelectronic, microoptoelectronic or micromechanical devices
#535Wafer structure with discrete gettering material
#536Processing method utilizing an apparatus to be sealed against workpiece
#537Electron source producing apparatus and method
#538Method and apparatus for fabricating commercially feasible and structurally robust nanotube-based nanomechanical devices
#539Systems and methods for producing single-walled carbon nanotubes (SWNTS) on a substrate
#540Elongated nano-structures and related devices
#541Substrate with transparent conductive oxide film, process for its production and photoelectric conversion element
#542Area selective CVD of metallic films using precursor gases and inhibitors
#543Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
#544Biomimetic membranes and methods of making biomimetic membranes
#545Scalable graphene nanoribbon arrays for digital transistors
#546Selective coating of a component using a potting process