ClassID:

120139

C23C16/045 - CPC Classification

Classification description:

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes; Coating on selected surface areas, e.g. using masks Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates

Recent Application in this class:
#1
20260143978
2026-05-21

METHOD OF SELECTIVELY DEPOSITING MATERIAL ON NON-METALLIC SURFACE

#2
20260139374
2026-05-21

GROWTH OF GATE OXIDE LAYER WITH SILICON NITRIDE AND CONVERSION

#3
20260136848
2026-05-14

DEPOSITION OF METAL-CONTAINING FILMS

#4
20260136450
2026-05-14

SUPERCONDUCTING CAVITY SMOOTHNESS

#5
20260132508
2026-05-14

VARIABLE PRESSURE DOSING METHOD AND SYSTEM

#6
20260132089
2026-05-14

MULTI-PHASE CERAMIC MATRIX COMPOSITE

#7
20260130142
2026-05-07

Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features

#8
20260123302
2026-04-30

METHOD AND APPARATUS FOR DEPOSITING A CARBON-CONTAINING MATERIAL

#9
20260117374
2026-04-30

METHOD FOR RECYCLING AN EFFLUENT GAS FROM CHEMICAL VAPOR DEPOSITION OR INFILTRATION

#10
20260114254
2026-04-23

LOW-K DIELECTRIC FILM REPAIR FOR BOTTOM-UP METAL GROWTH

#11
20260112598
2026-04-23

PROCESS FOR PREPARING SILICON-CONTAINING COMPOSITE PARTICLES

#12
20260110080
2026-04-23

METHOD OF DEPOSITING FILM

#13
20260110079
2026-04-23

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

#14
20260110078
2026-04-23

CONTROLLABLE CARBON PECVD FILM DEPOSITION

#15
20260103793
2026-04-16

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#16
20260103792
2026-04-16

SEMICONDUCTOR PROCESSING APPARATUS AND RELATED METHODS

#17
20260098333
2026-04-09

INHIBITED OXIDE DEPOSITION FOR REFILLING SHALLOW TRENCH ISOLATION

#18
20260092905
2026-04-02

USE OF VAPOR DEPOSITION COATED FLOW PATHS FOR IMPROVED CHROMATOGRAPHY OF METAL INTERACTING ANALYTES

#19
20260092362
2026-04-02

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

#20
20260092360
2026-04-02

CYCLICAL DEPOSITION METHOD INCLUDING TREATMENT STEP AND APPARATUS FOR SAME

#21
20260085403
2026-03-26

DEPOSITION-ETCH SPECIES IADF AND IEDF CONTROL FOR CARBON GAPFILL PROCESSES

#22
20260085402
2026-03-26

Toposelective Vapor Deposition Using an Inhibitor

#23
20260061364
2026-03-05

STORAGE AND DELIVERY VESSELS AND RELATED METHODS

#24
20260060013
2026-02-26

METHODS FOR FILLING RECESSED FEATURES ON A SUBSTRATE WITH A FLOWABLE LAYER STRUCTURE

#25
20260055502
2026-02-26

PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS

#26
20260052962
2026-02-19

CHEMICAL PASSIVATION OF MOLYBDENUM PLUG OR TRENCH'S OUTER SURFACE TO PREVENT MO NITRIDATION OR OXIDATION AND MAINTAIN LOW CONTACT RESISTANCE

#27
20260052916
2026-02-19

IN-SITU CYCLE ALE METHOD FOR DIELECTRIC DEPOSITION FULL-FILL ON NARROW TRENCH

#28
20260047359
2026-02-12

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

#29
20260040908
2026-02-05

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

#30
20260035784
2026-02-05

RESISTIVE COATING FOR A CAPILLARY

#31
20260035783
2026-02-05

SIN FILM EMBEDDING METHOD AND FILM FORMATION APPARATUS

#32
20260024730
2026-01-22

MULTI-LAYER PLASMA RESISTANT COATING BY ATOMIC LAYER DEPOSITION

#33
20260022455
2026-01-22

FILM FORMING METHOD AND FILM FORMING APPARATUS

#34
20260022453
2026-01-22

SELECTIVE MOLYBDENUM FILL

#35
20260018402
2026-01-15

METHODS OF FILLING GAP ON SUBSTRATE SURFACE

#36
20260015721
2026-01-15

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

#37
20260014058
2026-01-15

METHODS AND SYSTEMS FOR COATING, CLEANING, AND INSPECTING PHARMACEUTICAL CONTAINERS FOR PARTICLES AND DEFECTS

#38
20260009124
2026-01-08

FILM FORMING METHOD AND FILM FORMING APPARATUS

#39
20260002256
2026-01-01

METHOD FOR PRODUCING SILICON FILM AND SILICON FILM

#40
20260002255
2026-01-01

PROCESS FOR PREPARING ELECTROACTIVE MATERIALS FOR METAL-ION BATTERIES

#41
20250391765
2025-12-25

Metallic Structure, Method of Preparing Same, and Electronic Device Including Same

#42
20250391655
2025-12-25

METHOD OF FILLING GAP AND PROCESSING SYSTEM FOR SAME

#43
20250391653
2025-12-25

METHODS OF REPAIRING LOW-K MATERIALS AFTER INTEGRATION OPERATIONS

#44
20250388515
2025-12-25

CVI MATRIX DENSIFICATION PROCESS

#45
20250385132
2025-12-18

METHODS OF FORMING CONDUCTIVE LINES TO REDUCE TIER DEFLECTION

#46
20250382704
2025-12-18

FILM FORMING METHOD AND FILM FORMING APPARATUS

#47
20250382698
2025-12-18

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

#48
20250382697
2025-12-18

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

#49
20250374580
2025-12-04

LOW K INNER SPACER FORMATION BY SELECTIVE PECVD PROCESS IN GATE-ALL-AROUND (GAA) NANOSHEET DEVICE

#50
20250369100
2025-12-04

A BARRIER DEPOSIT WITHIN A SUBSTRATE

#51
20250357109
2025-11-20

BOTTOM-UP GAP FILL USING NON-CONFORMAL POISONING

#52
20250354278
2025-11-20

ELECTROCHEMICAL WATER SPLITTING WITH A NIVOX CATALYST

#53
20250354256
2025-11-20

SUBSTRATE COMPRISING CONFORMAL METAL CARBIDE COATING

#54
20250347478
2025-11-13

METAL FOAM THERMAL INTERFACE MATERIALS

#55
20250346997
2025-11-13

FILM FORMING METHOD AND FILM FORMING APPARATUS

#56
20250346992
2025-11-13

FILM FORMING METHOD AND FILM FORMING APPARATUS

#57
20250340984
2025-11-06

NONCONFORMAL OXIDE FILM DEPOSITION USING CARBON-CONTAINING INHIBITOR

#58
20250340981
2025-11-06

FILM FORMING METHOD

#59
20250336680
2025-10-30

THIN FILM, METHOD OF FORMING THE SAME AND SEMICONDUCTOR DEVICE

#60
20250333837
2025-10-30

METHODS OF FILLING A RECESSED FEATURE ON A SUBSTRATE EMPLOYING METAL SEQUENTIAL INFILTRATION SYNTHESIS PROCESSES

#61
20250323046
2025-10-16

MOLYBDENUM DEPOSITION

#62
20250320607
2025-10-16

METHOD FOR MANUFACTURING COATED TUBULAR MEMBER HAVING AMORPHOUS CARBON DEPOSITION FILM FORMED ON INNER SURF ACE OF TUBULAR MEMBER

#63
20250313948
2025-10-09

HIGH-DENSITY PLASMA (HDP) TOPOGRAPHY IMPROVEMENT WITH PARTIAL GAPFILL CARBON

#64
20250299947
2025-09-25

METHODS OF FORMING DIELECTRIC LAYERS THROUGH DEPOSITION AND ANNEAL PROCESSES

#65
20250298426
2025-09-25

APPARATUS FOR CONTROLLING VAPOR PRESSURE OF A SUBJECT MATERIAL CONTAINED THEREIN, AND RELATED METHODS AND SYSTEMS

#66
20250297358
2025-09-25

SELF-PLANARIZING SELECTIVE CARBON GAPFILL DEPOSITION

#67
20250290198
2025-09-18

METHOD OF DEPOSITING SILICON NITRIDE THIN FILM IN TRENCH OF SUBSTRATE

#68
20250289764
2025-09-18

CHEMICAL VAPOR DEPOSITION (CVD) AFTER HEAT TREATMENT FOR IMPROVED SILICON MELT INFILTRATION PROCESSING

#69
20250285920
2025-09-11

MOLYBDENUM FILL

#70
20250285918
2025-09-11

METHODS OF DEPOSITING IRIDIUM-CONTAINING FILMS FOR SEMICONDUCTOR DEVICES

#71
20250283214
2025-09-11

FILM FORMING METHOD AND FILM FORMING APPARATUS

#72
20250266262
2025-08-21

COMPONENT HAVING AT LEAST ONE FEATURE THAT HAS A VARYING CROSS-SECTIONAL SHAPE, SIZE, OR POSITION

#73
20250266256
2025-08-21

Methods for Depositing Gap-Filling Fluids and Related Systems and Devices

#74
20250263832
2025-08-21

LOCAL PART MASKING FOR IMPROVED UNIFORMITY IN CERAMIC MATRIX COMPOSITES

#75
20250257447
2025-08-14

TOOLING FOR FORCED-FLOW CHEMICAL VAPOR INFILTRATION PROCESS

#76
20250253187
2025-08-07

FLOWABLE CHEMICAL VAPOR DEPOSITION (FCVD) AND SACRIFICIAL ETCH PROTECTION PROCESSES

#77
20250253145
2025-08-07

SUBSTRATE PROCESSING METHOD

#78
20250253144
2025-08-07

COETANEOUS DEPOSITION-ETCHING FOR BOTTOM-UP CARBON GAPFILL

#79
20250250669
2025-08-07

LIQUID CHROMATOGRAPHY SYSTEM AND COMPONENT

#80
20250250667
2025-08-07

PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PROCESSING APPARATUS, AND RECORDING MEDIUM

#81
20250250666
2025-08-07

LATERAL GAP FILL

#82
20250246482
2025-07-31

GROWTH SUPPRESSION DEPOSITION FOR CVD TUNGSTEN GAP FILL WITH THERMAL TREATMENT

#83
20250246434
2025-07-31

METAL SILICIDE CONTACT FORMATION

#84
20250236953
2025-07-24

ATOMIC LAYER DEPOSITION DEVICE FOR UNIFORM COATING ON INNER SURFACE OF DOME SHAPED SURFACE

#85
20250232974
2025-07-17

METHOD OF FILLING A GAP

#86
20250230541
2025-07-17

Gapfill Process Using Pulsed High-Frequency Radio-Frequency (HFRF) Plasma

#87
20250230540
2025-07-17

SEAM PERFORMANCE IMPROVEMENT FOR LARGE AREA GAPFILL

#88
20250226214
2025-07-10

METHODS AND APPARATUSES FOR FILLING A GAP

#89
20250218790
2025-07-03

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

#90
20250215564
2025-07-03

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

#91
20250210344
2025-06-26

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM

#92
20250207247
2025-06-26

METHODS THAT UTILIZE PHOTOSENSITIVE ORGANOMETALLIC OXIDES FORMED BY CHEMICAL VAPOR POLYMERIZATION

#93
20250207246
2025-06-26

REDUCING CAPACITANCE IN SEMICONDUCTOR DEVICES

#94
20250198544
2025-06-19

ANTI-OXIDIZED METAL PIPE AND METHOD OF FABRICATING THE SAME

#95
20250197303
2025-06-19

PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY

#96
20250191909
2025-06-12

UNIFORM GAPFILL DEPOSITION ON SEMICONDUCTOR SUBSTRATES WITH VARYING GEOMETRIES

#97
20250188600
2025-06-12

SIDEWALL PASSIVATION USING ALDEHYDE OR ISOCYANATE CHEMISTRY FOR HIGH ASPECT RATIO ETCH

#98
20250188597
2025-06-12

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

#99
20250185263
2025-06-05

ROBUST ONO FILMS AND METHODS OF MAKING THEREOF

#100
20250183097
2025-06-05

LOW RESISTIVITY CONTACTS AND INTERCONNECTS

#101
20250183054
2025-06-05

SELECTIVE BOTTOM-UP FILL

#102
20250183041
2025-06-05

LOW RESISTANCE MOLYBDENUM DEPOSITION FOR LOGIC SOURCE/DRAIN CONTACTS

#103
20250179632
2025-06-05

SURFACE INHIBITION ATOMIC LAYER DEPOSITION

#104
20250171892
2025-05-29

APPARATUSES AND METHODS FOR FILLING A GAP

#105
20250171891
2025-05-29

METHOD OF FILLING GAPS ON SUBSTRATE SURFACE USING PLASMA

#106
20250171890
2025-05-29

EMBEDDING METHOD AND SUBSTRATE PROCESSING APPARATUS

#107
20250163573
2025-05-22

METHODS FOR FORMING MOLYBDENUM SURFACES WITH INCREASED DIFFUSION BARRIER

#108
20250163570
2025-05-22

METHOD AND APPARATUS OF EMBEDDING RUTHENIUM INTO RECESS

#109
20250163231
2025-05-22

COATING TECHNOLOGY FOR PLASTIC CONTAINERS

#110
20250155069
2025-05-15

ANTI-OXIDIZED METAL PIPE AND METHOD OF FABRICATING THE SAME

#111
20250154644
2025-05-15

HIGH PRESSURE INERT OXIDATION AND IN-SITU ANNEALING PROCESS TO IMPROVE FILM SEAM QUALITY AND WER

#112
20250149383
2025-05-08

TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION

#113
20250149330
2025-05-08

METHOD FOR ETCHING FEATURES USING A TARGETED DEPOSITION FOR SELECTIVE PASSIVATION

#114
20250149328
2025-05-08

REMOTE PLASMA BASED DEPOSITION OF SILICON CARBIDE FILMS USING SILICON-CONTAINING AND CARBON-CONTAINING PRECURSORS

#115
20250137120
2025-05-01

METHOD OF MANUFACTURE OF GRAPHENE COATED SURFACES BY ATOMIC OR MOLECULAR LAYER DEPOSITION

#116
20250137119
2025-05-01

DEPOSITION OF CARBON GAPFILL MATERIALS

#117
20250122611
2025-04-17

METHOD FOR PROCESSING SUBSTRATE

#118
20250122610
2025-04-17

Method and system for filling a gap

#119
20250109497
2025-04-03

CHEMICAL VAPOR INFILTRATION DENSIFICATION METHOD USING SINGLE-PILE PLATES FOR A SEMI-FORCED FLOW

#120
20250108478
2025-04-03

SPONGE-LIKE POROUS BODY, POLISHING PAD, LIQUID ABSORBING PAD, CLEANING SPONGE, CULTIVATION SPONGE AND METHOD FOR PRODUCING SPONGE-LIKE POROUS BODY

#121
20250101575
2025-03-27

Methods for Depositing Film Layers

#122
20250079160
2025-03-06

GAPFILL METHOD, SYSTEM AND APPARATUS

#123
20250075326
2025-03-06

CERAMIC MATRIX COMPOSITE SURFACE ROUGHNESS

#124
20250075321
2025-03-06

GROWTH OF THIN OXIDE LAYER WITH SILICON NITRIDE AND CONVERSION

#125
20250075314
2025-03-06

FORMING FILMS WITH IMPROVED STEP COVERAGE

#126
20250067664
2025-02-27

DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS

#127
20250066905
2025-02-27

METHODS AND SYSTEMS FOR FILLING A GAP

#128
20250066261
2025-02-27

SINGLE-CYCLE RAPID DENSIFICATION OF CARBON/CARBON COMPONENTS FOR AIR AND SPACE APPLICATIONS

#129
20250054752
2025-02-13

METHOD TO SMOOTH SIDEWALL ROUGHNESS AND MAINTAIN REENTRANT STRUCTURES DURING DIELECTRIC GAP FILL

#130
20250051908
2025-02-13

LARGE GRAIN TUNGSTEN GROWTH IN FEATURES

#131
20250038050
2025-01-30

FEATURE FILL WITH NUCLEATION INHIBITION

#132
20250034702
2025-01-30

Quantum Printing Nanostructures Within Carbon Nanopores

#133
20250003059
2025-01-02

SUBSTRATE PROCESSING METHOD

#134
20240417138
2024-12-19

PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS

#135
20240411224
2024-12-12

PATTERNING OF COMPLEX METAL OXIDE STRUCTURES

#136
20240401189
2024-12-05

FORMATION OF MEMORY DEVICE CHANNEL HOLES USING DOPED FILM LAYER

#137
20240399671
2024-12-05

BONDING FOR HIGH-TEMPERATURE COMPOSITE APPLICATIONS

#138
20240392434
2024-11-28

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTAINING FILM

#139
20240384398
2024-11-21

Process for preparing electroactive materials for metal-ion batteries

#140
20240379368
2024-11-14

BOTTOM-UP METAL NITRIDE FORMATION

#141
20240376598
2024-11-14

PROCESS GAS RAMP DURING SEMICONDUCTOR PROCESSING

#142
20240360547
2024-10-31

METHOD AND APPARATUS FOR EMBEDDING RUTHENIUM IN RECESS FORMED ON SUBSTRATE SURFACE

#143
20240352576
2024-10-24

METHODS AND SYSTEMS FOR FILLING A GAP

#144
20240332002
2024-10-03

ELECTRONIC DEVICES COMPRISING SILICON CARBIDE MATERIALS

#145
20240327981
2024-10-03

Liquid chromatography system and component

#146
20240327973
2024-10-03

PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS

#147
20240318564
2024-09-26

PULSE-MANAGED PLASMA METHOD FOR COATING ON INTERNAL SURFACES OF WORKPIECES

#148
20240309503
2024-09-19

ELECTRONIC DEVICE BASED ON MULTILAYER THIN FILM AND METHOD FOR MANUFACTURING THE SAME USING A THREE-DIMENSIONAL STRUCTURE

#149
20240301547
2024-09-12

CHEMICAL VAPOR INFILTRATION TOOLING HOLE MODIFICATION FOR OPTIMIZING INFILTRATION IN CERAMIC MATRIX COMPOSITES

#150
20240295020
2024-09-05

METHOD AND APPARATUS FOR EMBEDDING TUNGSTEN INTO RECESS FORMED ON SUBSTRATE

#151
20240290609
2024-08-29

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#152
20240287673
2024-08-29

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

#153
20240287672
2024-08-29

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

#154
20240282580
2024-08-22

MULTI-LAYER FEATURE FILL

#155
20240282571
2024-08-22

METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

#156
20240279799
2024-08-22

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

#157
20240279798
2024-08-22

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

#158
20240279797
2024-08-22

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

#159
20240279796
2024-08-22

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

#160
20240279795
2024-08-22

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

#161
20240279794
2024-08-22

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

#162
20240279793
2024-08-22

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

#163
20240274433
2024-08-15

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#164
20240271275
2024-08-15

COATINGS FOR TOOLING

#165
20240264336
2024-08-08

NON-LINE-OF-SIGHT DEPOSITION OF COATING ON INTERNAL COMPONENTS OF ASSEMBLED DEVICE

#166
20240263306
2024-08-08

FILM FORMING METHOD AND FILM FORMING DEVICE

#167
20240263301
2024-08-08

CHAMFER-LESS VIA INTEGRATION SCHEME

#168
20240254619
2024-08-01

SUBSTRATE PROCESSING METHOD

#169
20240241296
2024-07-18

METHOD FOR FABRICATING A BLAZED GRATING

#170
20240234544
2024-07-11

INNER SPACER LINER FOR GATE-ALL-AROUND DEVICE

#171
20240234097
2024-07-11

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

#172
20240229239
2024-07-11

FLOATING TOOLING ASSEMBLY FOR CHEMICAL VAPOR INFILTRATION

#173
20240229235
2024-07-11

Electrolyte and Method for Cobalt Electrodeposition

#174
20240222192
2024-07-04

SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING

#175
20240213032
2024-06-27

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

#176
20240209500
2024-06-27

PROCESSING SYSTEM AND METHODS FOR FORMING VOID-FREE AND SEAM-FREE TUNGSTEN FEATURES

#177
20240209497
2024-06-27

METHOD OF FORMING PATTERN STRUCTURE INCLUDING SILICON NITRIDE

#178
20240189184
2024-06-13

ATOMIC LAYER DEPOSITION COATED PHARMACEUTICAL PACKAGING AND IMPROVED SYRINGES AND VIALS, E.G. FOR LYOPHILIZED/COLD-CHAIN DRUGS/VACCINES

#179
20240183035
2024-06-06

AREA SELECTIVE DEPOSITION THROUGH SURFACE SILYLATION

#180
20240183030
2024-06-06

SUBSTRATE TREATMENT APPARATUS USING SUPERCRITICAL FLUID

#181
20240175121
2024-05-30

FILM FORMING METHOD, PROCESSING APPARATUS, AND PROCESSING SYSTEM

#182
20240175120
2024-05-30

LOW RESISTIVITY GAPFILL

#183
20240170281
2024-05-23

DEPOSITION METHOD AND DEPOSITION APPARATUS

#184
20240160099
2024-05-16

Methods for increasing the density of high-index nanoimprint lithography films

#185
20240158911
2024-05-16

PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY

#186
20240153817
2024-05-09

METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SURFACE OF A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS AND RELATED SEMICONDUCTOR DEVICE STRUCTURES

#187
20240150890
2024-05-09

SUBSTRATE PROCESSING METHOD

#188
20240145236
2024-05-02

SUBSTRATE PROCESSING METHOD

#189
20240145234
2024-05-02

Conformal deposition of silicon carbide films

#190
20240141479
2024-05-02

ACOUSTIC WAVE ASSISTED CHEMICAL VAPOR IINFILTRATION

#191
20240133034
2024-04-25

FLOATING TOOLING ASSEMBLY FOR CHEMICAL VAPOR INFILTRATION

#192
20240133028
2024-04-25

Electrolyte and Method for Cobalt Electrodeposition

#193
20240133027
2024-04-25

Nanoporous GaN on p-type GaN: A Mg out-diffusion compensation layer for heavily Mg-doped p-type GaN

#194
20240124976
2024-04-18

FILM FORMING METHOD AND FILM FORMING APPARATUS

#195
20240117563
2024-04-11

Method of coating onto fabric substrates by means of plasma

#196
20240110284
2024-04-04

Selective Deposition of Thin Films with Improved Stability

#197
20240110281
2024-04-04

STACKING TOOL FIXTURE FOR FORCED FLOW CHEMICAL VAPOR INFILTRATION

#198
20240105444
2024-03-28

Methods for Forming Low Resistivity Contacts

#199
20240102158
2024-03-28

METHOD FOR FORMING CARBONACEOUS STRUCTURE AND SUBSTRATE HAVING THE CARBONACEOUS STRUCTURE

#200
20240102156
2024-03-28

METHODS FOR PROVIDING A PRECURSOR MIXTURE TO A REACTION CHAMBER

#201
20240093357
2024-03-21

Semiconductor Device, Method and Machine of Manufacture

#202
20240087885
2024-03-14

METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS

#203
20240074944
2024-03-07

PECVD coated pharmaceutical packaging

#204
20240071749
2024-02-29

SUBSTRATE PROCESSING METHOD

#205
20240071747
2024-02-29

SUBSTRATE PROCESSING METHOD

#206
20240063053
2024-02-22

SUBSTRATE PROCESSING METHOD

#207
20240060174
2024-02-22

METHOD OF FORMING MATERIAL WITHIN A RECESS

#208
20240044026
2024-02-08

AEROSOL-ASSISTED CHEMICAL VAPOR DEPOSITION METHOD AND NiVOx MATERIAL FOR ELECTROCHEMICAL WATER OXIDATION

#209
20240043990
2024-02-08

METHOD FOR FORMING LAYER ON DIFFERENT-DENSITY PATTERN REGIONS

#210
20240035151
2024-02-01

METHODS OF SELECTIVE DEPOSITION OF MOLYBDENUM

#211
20240035150
2024-02-01

Depositing coatings on and within housings, apparatus, or tools utilizing counter current flow of reactants

#212
20240035149
2024-02-01

BOTTOM UP MOLYBDENUM GAPFILL

#213
20240026529
2024-01-25

CONFORMAL MOLYBDENUM DEPOSITION

#214
20240026528
2024-01-25

POROUS INORGANIC FILMS VIA POLYMER SWELLING INFILTRATION

#215
20240026527
2024-01-25

METHOD OF DEPOSITING SILICON BASED DIELECTRIC FILM

#216
20240011151
2024-01-11

METHOD FOR FORMING CARBON FILM AND FILM FORMING APPARATUS

#217
20240006180
2024-01-04

LOW RESISTANCE PULSED CVD TUNGSTEN

#218
20240003394
2024-01-04

Composites and methods of forming composites having friction and wear plugs

#219
20230416909
2023-12-28

METHOD FOR FORMATION OF CONFORMAL ALD SIO2 FILMS

#220
20230416907
2023-12-28

PROCESS FOR MANUFACTURING SILICON-CONTAINING MATERIALS

#221
20230416095
2023-12-28

NANOMATERIAL MANUFACTURING METHODS

#222
20230407463
2023-12-21

SEAL PLATES FOR CHEMICAL VAPOR INFILTRATION & DEPOSITION CHAMBERS

#223
20230407462
2023-12-21

Infiltrated carbon nanotubes

#224
20230399737
2023-12-14

FILM FORMING METHOD AND FILM FORMING APPARATUS

#225
20230395774
2023-12-07

PROCESS FOR PREPARING SILICON-CONTAINING COMPOSITE PARTICLES

#226
20230393103
2023-12-07

USE OF VAPOR DEPOSITION COATED FLOW PATHS FOR IMPROVED CHROMATOGRAPHY OF METAL INTERACTING ANALYTES

#227
20230392254
2023-12-07

INORGANIC POROUS COATINGS AND METHODS OF MAKING THE SAME

#228
20230383409
2023-11-30

SYRINGE WITH PECVD LUBRICATION

#229
20230374656
2023-11-23

FILLING METHOD AND FILM FORMING APPARATUS

#230
20230366083
2023-11-16

Quantum printing nanostructures within carbon nanopores

#231
20230360907
2023-11-09

Method of Filling Gaps with Carbon and Nitrogen Doped Film

#232
20230357924
2023-11-09

LOW TEMPERATURE FLOWABLE VANADIUM OXIDE GAP FILL

#233
20230357922
2023-11-09

SIN FILM EMBEDDING METHOD AND FILM FORMATION APPARATUS

#234
20230349040
2023-11-02

METHOD OF FORMING STRUCTURE INCLUDING A DOPED ADHESION FILM

#235
20230348334
2023-11-02

CVI matrix densification process

#236
20230340661
2023-10-26

Gapfill Process Using Pulsed High-Frequency Radio-Frequency (HFRF) Plasma

#237
20230335397
2023-10-19

Method and apparatus for filling a gap

#238
20230332289
2023-10-19

DEVICE FOR DIFFUSING A PRECURSOR WITH A CONTAINER HAVING AT LEAST ONE POROUS ELEMENT ALLOWING THE GENERATION OF AN AEROSOL TOWARDS A GROWTH SURFACE

#239
20230332286
2023-10-19

Low refractive index surface layers and related methods

#240
20230323529
2023-10-12

METHOD AND DEVICE FOR THE OUTER-WALL AND/OR INNER-WALL COATING OF HOLLOW BODIES

#241
20230313366
2023-10-05

RESISTIVE COATING FOR A CAPILLARY

#242
20230304146
2023-09-28

VIBRO-THERMALLY ASSISTED CHEMICAL VAPOR INFILTRATION

#243
20230303305
2023-09-28

METHOD AND PACKAGE FOR REDUCING THE DEGRADATION OF A DRUG AND/OR EXCIPIENT, E.G. POLYSORBATE STABILIZER, IN A PHARMACEUTICAL PRODUCT

#244
20230298936
2023-09-21

COMBINED SELF-FORMING BARRIER AND SEED LAYER BY ATOMIC LAYER DEPOSITION

#245
20230295795
2023-09-21

METHODS AND SYSTEMS FOR FILLING GAP FEATURES ON SUBSTRATE SURFACES

#246
20230290639
2023-09-14

LOW RESISTANCE GATE OXIDE METALLIZATION LINER

#247
20230279542
2023-09-07

Quantum printing methods

#248
20230272720
2023-08-31

Bifurcated fabric architecture for airfoils, methods of manufacture thereof and airfoils comprising the same

#249
20230272542
2023-08-31

High Performance Bifunctional Porous Non-Noble Metal Phosphide Catalyst for Overall Water Splitting

#250
20230272524
2023-08-31

DEVICES HAVING A RARE EARTH (OXY) FLUORIDE COATING FOR IMPROVED RESISTANCE TO CORROSIVE CHEMICAL ENVIRONMENTS AND METHODS FOR MAKING AND USING THESE DEVICES

#251
20230272522
2023-08-31

METHOD FOR FUNCTIONALIZING A POLYMER-BASED SUBSTRATE BY CHEMICAL DEPOSITION OF A THIN LAYER

#252
20230260783
2023-08-17

Methods of manufacturing semiconductor devices

#253
20230257870
2023-08-17

COATED ITEMS AND MANUFACTURING THEREOF

#254
20230250726
2023-08-10

Ceramic matrix composite component having low density core and method of making

#255
20230245896
2023-08-03

CONFORMAL THERMAL CVD WITH CONTROLLED FILM PROPERTIES AND HIGH DEPOSITION RATE

#256
20230243037
2023-08-03

Ceramic matrix composite surface roughness

#257
20230242453
2023-08-03

Method for depositing a coating on a yarn in a microwave field

#258
20230242323
2023-08-03

PACKAGES COMPRISING ANTI-MICROBIAL COATINGS FOR PREVENTING CONTAMINATION, E.G. AFTER FIRST USE OF THE PRODUCT

#259
20230238505
2023-07-27

METHOD FOR PROCESSING NEGATIVE ELECTRODE PLATE, SODIUM-METAL NEGATIVE ELECTRODE PLATE AND RELATED DEVICE

#260
20230235450
2023-07-27

TRANSPARENT MESOPOROUS MATERIALS AND DEVICES COMPRISING SAME

#261
20230227978
2023-07-20

Air data probe corrosion protection

#262
20230227972
2023-07-20

THIN FILM DEPOSITION METHOD AND METHOD OF FABRICATING ELECTRONIC DEVICE USING THE SAME

#263
20230227368
2023-07-20

Method for coating fibers in a fluidized bed

#264
20230220542
2023-07-13

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

#265
20230219858
2023-07-13

METHOD FOR FABRICATING CERAMIC MATRIX COMPOSITE COMPONENTS

#266
20230215703
2023-07-06

SEALING SURFACES OF COMPONENTS USED IN PLASMA ETCHING TOOLS USING ATOMIC LAYER DEPOSITION

#267
20230212753
2023-07-06

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

#268
20230207309
2023-06-29

METHOD AND APPARATUS FOR FILLING A GAP

#269
20230203646
2023-06-29

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS PRECURSOR INTERACTION

#270
20230192563
2023-06-22

PARTICLE ENHANCEMENT OF CERAMIC MATRIX COMPOSITES, METHOD OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME

#271
20230183856
2023-06-15

Sequential infiltration synthesis apparatus

#272
20230175118
2023-06-08

Methods of forming low resistivity titanium nitride thin film in horizontal vias and related devices

#273
20230175117
2023-06-08

SEAM MITIGATION AND INTEGRATED LINER FOR GAP FILL

#274
20230174431
2023-06-08

Method for coating short fibres

#275
20230173475
2023-06-08

entitled METHOD FOR PREPARING A CATALYST FOR ENVIRONMENTAL DECONTAMINATION BY MEANS OF NON-SELECTIVE REDUCTIVE HETEROGENEOUS ELECTROCATALYSIS

#276
20230167544
2023-06-01

Method and system for forming a conformal silicon carbon nitride layer and structure formed using same

#277
20230162977
2023-05-25

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#278
20230160056
2023-05-25

Method for densifying composite matertals

#279
20230154754
2023-05-18

LOSS PREVENTION DURING ATOMIC LAYER DEPOSITION

#280
20230150727
2023-05-18

Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus

#281
20230133542
2023-05-04

METHOD FOR PRODUCING POROUS BASE MATERIAL HAVING PORE WITH SURFACE MODIFIED AND POROUS BASE MATERIAL HAVING PORE WITH SURFACE MODIFIED

#282
20230130557
2023-04-27

REACTANT GAS PULSE DELIVERY

#283
20230110364
2023-04-13

ATMOSPHERIC PRESSURE REMOTE PLASMA CVD DEVICE, FILM FORMATION METHOD, AND PLASTIC BOTTLE MANUFACTURING METHOD

#284
20230110175
2023-04-13

MICROFLUIDIC MEMS DEVICE COMPRISING A BURIED CHAMBER AND MANUFACTURING PROCESS THEREOF

#285
20230104924
2023-04-06

Atomic Layer Deposition (ALD) for Multi-Layer Ceramic Capacitors (MLCCs)

#286
20230098575
2023-03-30

Methods and systems for filling a gap

#287
20230097847
2023-03-30

Percolation doping of inorganic-organic frameworks for multiple device applications

#288
20230096453
2023-03-30

SUBSTRATE PROCESSING METHOD

#289
20230093323
2023-03-23

FILM FORMING APPARATUS, FILM FORMING METHOD, AND FILM FORMING SYSTEM

#290
20230092958
2023-03-23

VESSELS, CONTAINERS, AND SURFACES COATED WITH WATER BARRIER COATINGS

#291
20230080027
2023-03-16

STORAGE AND DELIVERY VESSELS AND RELATED METHODS

#292
20230074641
2023-03-09

BIOPHARMACEUTICAL MANUFACTURING PROCESS AND PRODUCT

#293
20230074549
2023-03-09

Quantum printing apparatus and method of using same

#294
20230074081
2023-03-09

DEVICE AND METHOD FOR COATING CHANNELS OF A SAMPLE BY MEANS OF VAPOR DEPOSITION

#295
20230070199
2023-03-09

TOPOLOGY-SELECTIVE DEPOSITION METHOD AND STRUCTURE FORMED USING SAME

#296
20230065627
2023-03-02

Method for depositing a gap-fill layer by plasma-assisted deposition

#297
20230043629
2023-02-09

METHOD OF FORMING A STRUCTURE INCLUDING A SILICON CARBIDE LAYER

#298
20230041794
2023-02-09

TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION

#299
20230033741
2023-02-02

DIELECTRIC FILLED NANOSTRUCTURED SILICA SUBSTRATE FOR FLAT OPTICAL DEVICES

#300
20230022195
2023-01-26

Mask and deposition apparatus including the same