120139 ⎘
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes; Coating on selected surface areas, e.g. using masks Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
Mask and deposition apparatus including the same
#302In-situ PECVD cap layer
#303METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
#304Substrate processing method
#305Substrate processing method and substrate processing device
#306PART HAVING CORROSION-RESISTANT LAYER, MANUFACTURING PROCESS APPARATUS HAVING SAME, AND METHOD OF MANUFACTURING PART
#307Sequential infiltration synthesis apparatus and a method of forming a patterned structure
#308Apparatus For Single Chamber Deposition And Etch
#309Seamless Gapfill Of Metal Nitrides
#310Methods of Lowering Deposition Rate
#311MOLYBDENUM FILL
#312Bifunctional porous non-noble metal phosphide catalyst for overall water splitting and methods of making and using same
#313Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
#314Pulsing plasma treatment for film densification
#315TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
#316Methods for low resistivity and stress tungsten gap fill
#317MOLYBDENUM DEPOSITION
#318YTTRIUM/LANTHANIDE METAL PRECURSOR COMPOUND, COMPOSITION FOR FORMING FILM INCLUDING THE SAME, AND METHOD OF FORMING YTTRIUM/LANTHANIDE METAL CONTAINING FILM USING THE SAME
#319Quantum printing nanostructures within carbon nanopores
#320Quantum printing nanostructures within carbon nanopores
#321METHODS FOR FILLING A GAP AND RELATED SYSTEMS AND DEVICES
#322Method for etching features using a targeted deposition for selective passivation
#323Semiconductor device and method for manufacturing semiconductor device
#324Apparatus associated with analysis of thin film layer and manufacturing method thereof
#325Semiconductor device, method and machine of manufacture
#326Depositing Coatings On and Within A Housing, Apparatus, or Tool Using a Coating System Positioned Therein
#327Depositing coatings on and within housings, apparatus, or tools
#328Process for making a fabric based substrate bearing a carbon based coating
#329Plasma etching method and plasma etching apparatus
#330Methods of forming electronic devices comprising silicon carbide materials
#331PECVD coated pharmaceutical packaging
#332Method for manufacturing semiconductor device and substrate processing apparatus
#333Semiconductor Device Providing a Biosensor to Test for Pathogen
#334Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
#335Dielectric gapfill using atomic layer deposition (ALD), inhibitor plasma and etching
#336Selective deposition of metals, metal oxides, and dielectrics
#337METHOD OF FORMING A STRUCTURE INCLUDING SILICON-CARBON MATERIAL, STRUCTURE FORMED USING THE METHOD, AND SYSTEM FOR FORMING THE STRUCTURE
#338SURFACE PROTECTION AGAINST CAVITATION EROSION
#339PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON-BASED COATINGS ON SURFACES
#340Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
#341Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
#342Multi-layer plasma resistant coating by atomic layer deposition
#343ENHANCED NB3SN SURFACES FOR SUPERCONDUCING CAVITIES
#344Conformal deposition of silicon carbide films
#345Substrate processing method and substrate processing system
#346Methods and apparatus for low resistivity and stress tungsten gap fill
#347Method of forming a semiconductor device with air gaps for low capacitance interconnects
#348HDP sacrificial carbon gapfill
#349Method of filling gaps with carbon and nitrogen doped film
#350Step coverage using an inhibitor molecule for high aspect ratio structures
#351Thin free-standing oxide membranes
#352Method for a treatment to deposit a barrier coating
#353Mitigating pyrophoric deposits during SiC CVI/CVD processes by introducing a mitigation agent into an exhaust conduit downstream of a reaction chamber
#354Feature fill with nucleation inhibition
#355Apparatus for processing a substrate
#356Method and apparatus for selective film formation in semiconductor substrate processing
#357POLYMER PROCESS BAGS AND METHODS FOR MANUFACTURING THE SAME
#358Bottom-up metal nitride formation
#359Process for preparing electroactive materials for metal-ion batteries
#360Depositing coatings on and within housings, apparatus, or tools utilizing counter current flow of reactants
#361Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
#362System and method for vapor deposition coating of extrusion dies using impedance disks
#363Methods of forming metal chalcogenide pillars
#364Articles for creating hollow structures in ceramic matrix composites
#365CHEMICAL VAPOUR INFILTRATION OR DEPOSITION PROCESS
#366DOWNHOLE SAND CONTROL SCREEN SYSTEM
#367Coating of nano-scaled cavities
#368Method for depositing a gap-fill layer by plasma-assisted deposition
#369Liquid chromatography system and component
#370ACTIVATED CARBON MODIFIED BY ATOMIC LAYER DEPOSITION AND METHODS THEREOF
#371Quantum printing nanostructures within carbon nanopores
#372ANTISTATIC COATINGS FOR PLASTIC VESSELS
#373Process for manufacturing a pure porous 3D diamond
#374Artificial blood vessel
#375Method and apparatus for filling a gap
#376TUNGSTEN FEATURE FILL
#377Methods for increasing the density of high-index nanoimprint lithography films
#378METHODS FOR INCREASING THE REFRACTIVE INDEX OF HIGH-INDEX NANOIMPRINT LITHOGRAPHY FILMS
#379Multi-layer feature fill
#380LAYER FORMING METHOD
#381Method and apparatus for filling a gap
#382Quantum printing methods
#383Quantum printing nanostructures within carbon nanopores
#384Quantum printing apparatus and method of using same
#385Seal plates for chemical vapor infiltration and deposition chambers
#386Ceramic matrix composite component having low density core and method of making
#387Method for densifying porous annular substrates by chemical vapour infiltration
#388CVI matrix densification process
#389Method for densifying porous annular substrates by chemical vapour infiltration
#390Composites and methods of forming composites having friction and wear plugs
#391Method of depositing tungsten and other metals in 3D NAND structures
#392Ceramic matrix composite structures with controlled microstructures fabricated using chemical vapor infiltration (CVI)
#393Electronic devices comprising silicon carbide materials
#394Methods of manufacturing semiconductor devices
#395Metal triamine compound, method for preparing the same, and composition for depositing metal-containing thin film including the same
#396Methods for making bifunctional porous non-noble metal phosphide catalyst for overall water splitting, electrodes for overall water splitting, and methods for electrocatalytic water splitting
#397METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
#398Process for location-specific slurry based coatings for internally-cooled component
#399Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
#400Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure
#401COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTAINING FILM
#402PECVD coated pharmaceutical packaging
#403Assembly for chemical vapor infiltration of a fiber preform and method of infiltrating a fiber preform
#404Vessels, containers, and surfaces coated with water barrier coatings
#405Modular treatment apparatus for containers
#406Production method for composite material
#407Nuclear reactor component having a coating of amorphous chromium carbide
#408Sequential infiltration synthesis apparatus and a method of forming a patterned structure
#409Chamfer-less via integration scheme
#410Method for forming RuSi film and substrate processing system
#411PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
#412PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
#413Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
#414Pulse-managed plasma method for coating on internal surfaces of workpieces
#415Method for fabricating ceramic matrix composite components
#416Coating of fluid-permeable materials
#417Manufacturing of coated items
#418Deposition method
#419Method for producing a consolidated fiber preform
#420Deposition of SiN
#421Method for Manufacturing a Semiconductor Device
#422SELECTIVE DEPOSITION OF TUNGSTEN
#423System and method for enhancing a diffusion limited CVI/CVD process
#424PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
#425Process for manufacturing a composite friction component
#426Process for manufacturing a silicon carbide coated body
#427Non-line-of-sight deposition of coating on internal components of assembled device
#428METHOD AND APPARATUS FOR COATING CONTAINERS
#429Ceramic matrix composite manufacturing
#430Film forming method and film forming apparatus
#431Depositing coatings on and within housings, apparatus, or tools
#432Methods and apparatus for depositing materials on a continuous substrate
#433Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions
#434Patterning of complex metal oxide structures
#435Methods of atomic layer deposition for selective film growth
#436Method for creating a dielectric filled nanostructured silica substrate for flat optical devices
#437Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
#438Liquid chromatography system and component
#439METHOD AND DEVICE FOR PLASMA TREATMENT OF CONTAINERS
#440Metal coated polymembrane
#441Methods for treating superconducting cavities
#442Plasma coating lance for internal coatings
#443Coating of nano-scaled cavities
#444Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing
#445Infiltrating carbon nanotubes with carbon to prevent delamination from a substrate
#446DEVICE FOR INTERNALLY COATING CONTAINERS
#447Methods for chemical vapor infiltration and densification of porous substrates
#448Method and apparatus for filling a gap
#449HIGH ASPECT RATIO DEPOSITION
#450Method for producing a ceramic matrix composite component
#451DEVICE FOR COATING CONTAINERS
#452Oxidation reduction for SiOC film
#453FEATURE FILL WITH NUCLEATION INHIBITION
#454Feature fill with multi-stage nucleation inhibition
#455Multi-layer plasma resistant coating by atomic layer deposition
#456Method of filling gaps with carbon and nitrogen doped film
#457Thermal metal chemical vapor deposition process
#458Monolithic gas distribution manifold and various construction techniques and use cases therefor
#459Plasma Resistant Multi-Layer Coatings and Related Methods of Preparing Same
#460Air data probe corrosion protection
#461Selective deposition of metals, metal oxides, and dielectrics
#462Method of forming conformal silicon carbide film by cyclic CVD
#463Methods of manufacturing semiconductor devices
#464Semiconductor device, method and machine of manufacture
#465FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION
#466Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
#467Method of making a fibrous part using slotted seal plates and slotted preforms for chemical vapor deposition densification
#468Integrated circuit devices based on metal ion migration and methods of fabricating same
#469Surface modification to improve amorphous silicon gapfill
#470Method for manufacturing structure
#471Electrochemical doping of thin metal layers employing underpotential deposition and thermal treatment
#472Precursors and flowable CVD methods for making low-k films to fill surface features
#473Apparatus including metallized-ceramic tubes for radio-frequency and gas delivery
#474PECVD coated pharmaceutical packaging
#475Gas distribution for chemical vapor deposition/infiltration
#476Oleophilic foams for oil spill mitigation
#477Method of using DLI-MOCVD to provide a nuclear reactor component with a coating of amorphous chromium carbide
#478Abrasive tips for ceramic matrix composite blades and methods for making the same
#479Coated product and production method
#480SYSTEMS FOR MODIFYING PRESSURE DIFFERENTIAL IN A CHEMICAL VAPOR PROCESS
#481PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON-BASED COATINGS ON SURFACES
#482Multi-component conductive structures for semiconductor devices
#483Method and apparatus for deposition of low-k films
#484Film formation method
#485Metal structures, devices, and methods
#486Metal components with inert vapor phase coating on internal surfaces
#487Method of chemical vapor infiltration or deposition
#488Separator for secondary cell having excellent heat resistance and shutdown properties
#489Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
#490Apparatus and method for deposition and etch in gap fill
#491Deposition of boron and carbon containing materials
#492METHODS AND APPARATUS FOR CONTROLLED CHEMICAL VAPOR DEPOSITION
#493Blood sample collection tube
#494Syringe with PECVD lubrication
#495Method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces
#496Controlling the uniformity of PECVD deposition
#497Apparatus for UV flowable dielectric
#498Plasma enhanced atomic layer deposition (PEALD) of SiN using silicon-hydrohalide precursors
#499Syringe with PECVD lubricity layer
#500Tungsten feature fill with nucleation inhibition
#501Method of forming a semiconductor device with air gaps for low capacitance interconnects
#502Gapfill of variable aspect ratio features with a composite PEALD and PECVD method
#503Deposition of SiN
#504Method and apparatus for filling a gap
#505COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTAINING FILM
#506Method of forming tungsten film and controller
#507LOCATION-SPECIFIC SLURRY BASED COATINGS FOR INTERNALLY-COOLED COMPONENT AND PROCESS THEREFOR
#508Deposition apparatus and deposition method
#509Methods of forming metal chalcogenide pillars
#510Conformal deposition of silicon carbide films
#511Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures
#512RESIN CONTAINER COATING DEVICE
#513Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
#514BIOCOMPATIBLE AND HEMOCOMPATIBLE MATERIAL AND FILTER
#515Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
#516Tungsten feature fill with nucleation inhibition
#517Mitigating pyrophoric deposits in exhaust piping during SIC CVI/CVD processes by introducing water vapor into an outlet portion of a reaction chamber
#518Method of manufacturing tantalum carbide coating layer using chemical vapor deposition and tantalum carbide manufactured using the same
#519Atomic layer deposition of tungsten for enhanced fill and reduced substrate attack
#520Method of increasing the uniformity of chemical vapor deposition on fibrous material through the imposition of pressure waves
#521Gap fill using carbon-based films
#522Method and system for treating a surface
#523Modulating the microstructure of metallic interconnect structures
#524Method of filling recess and processing apparatus
#525Thin metal coating methods for high conductivity graphane-metal composites and methods of manufacture
#526Swirled flow chemical vapor deposition
#527Nanocomposite membranes and methods of forming the same
#528Method of forming film
#529Method and apparatus for coating plastic bottles
#530Molding processes for metallic foams, apparatuses, and products
#531NbMC layers
#532Systems and methods for forming a composite structure
#533Vapor deposition mask, method for producing organic semiconductor element, and method for producing organic el display
#534Coated packaging
#535Coating apparatus for containers
#536Method and apparatus for depositing cobalt in a feature
#537Apparatus associated with analysis of thin film layer and manufacturing method thereof
#538Seamless ruthenium gap fill
#539Integration of ALD copper with high temperature PVD copper deposition for BEOL interconnect
#540Module including metallized ceramic tubes for RF and gas delivery
#541Ruthenium metal feature fill for interconnects
#542Method for manufacturing a semiconductor device
#543Native or uncontrolled oxide reduction by HWCVD H* using specific metal chamber liner
#544Chemical vapor deposition process to build 3D foam-like structures
#545Carbon/carbon composites and methods of making carbon/carbon composites having increased fiber volume and ceramic compounds
#546Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same
#547Use of vapor deposition coated flow paths for improved chromatography of metal interacting analytes
#548Gas distribution for chemical vapor deposition/infiltration
#549Feature fill with multi-stage nucleation inhibition
#550Method and device for the plasma processing of containers
#551PROCESS OF FILLING THE HIGH ASPECT RATIO TRENCHES BY CO-FLOWING LIGANDS DURING THERMAL CVD
#552Film forming method and patterning method
#553Electroplated Au for conformal coating of high aspect ratio silicon structures
#554Bond coatings having a molten silicon-phase contained between refractory layers
#555Articles for creating hollow structures in ceramic matrix composites
#556Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
#557Layer forming method
#558Method for fabricating ceramic matrix composite components
#559Method for depositing a silicon nitride film and film deposition apparatus
#560Method for depositing a silicon nitride film and film deposition apparatus
#561Method for depositing a silicon nitride film and film deposition apparatus
#562System and method for enhancing a diffusion limited CVI/CVD process
#563Method and apparatus for forming silicon film
#564Method and device for plasma treatment of containers
#565Ceramic matrix composite articles and methods for forming same
#566COMPOSITE MATERIAL AND METHOD FOR MAKING
#567Ceramic matrix composite articles and methods for forming same
#568Tungsten feature fill
#569Ceramic matrix composite manufacturing
#570Low refractive index surface layers and related methods
#571Pharmaceutical and other packaging with low oxygen transmission rate
#572Silicon nitride films with high nitrogen content
#573Method of manufacturing semiconductor device and method of forming metal oxide film
#574Silicon-nitride-containing thermal chemical vapor deposition coating
#575Composite matrix using a hybrid deposition technique
#576Ceramic matrix full hoop blade track
#577Converter for generating a secondary light from a primary light, light-emitting elements which contains such a converter, and method for producing the converter and the light-emitting elements
#578FACILITY FOR TREATING CONTAINERS BY MICROWAVE PLASMA, COMPRISING A SOLID-STATE GENERATOR AND ADJUSTMENT METHOD
#579Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing
#580Substrate pedestal module including metallized ceramic tubes for RF and gas delivery
#581Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions
#582REMOTE PLASMA BASED DEPOSITION OF SILICON CARBIDE FILMS USING SILICON-CONTAINING AND CARBON-CONTAINING PRECURSORS
#583Deposition of boron and carbon containing materials
#584Continuous fiber-reinforced silicon carbide member, manufacturing method thereof, and nuclear reactor structural member
#585Pharmaceutical package for ophthalmic formulations
#586Selective atomic layer deposition with post-dose treatment
#587Method of forming a tungsten film having a low resistance
#588Sacrificial 3-dimensional weaving method and ceramic matrix composites formed therefrom
#589DENSIFYING FILMS IN SEMICONDUCTOR DEVICE
#590Film deposition method
#591Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
#592Downhole drill bit with coated cutting element
#593Method and apparatus for deposition of low-k films
#594Surface modification to improve amorphous silicon gapfill
#595Semiconductor structure of interconnect and fabrication method thereof
#596Method of filling recess and processing apparatus
#597CVD Mo deposition by using MoOCl
#598Method of burying sample trench
#599Gas container
#600Feature fill with nucleation inhibition