Surface-coated cutting tool and method of producing the same

DISUBSTITUTED ALKYNE DICOBALT HEXACARBONYL COMPOUNDS, METHOD OF MAKING AND METHOD OF USE THEREOF

Surface-coated cutting tool and method of producing the same

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

COATING DEVICE OF COMPONENT FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND COATING METHOD THEREOF

Coated cutting tool

Cutting tool

COATED CUTTING TOOL

Deposition of charge trapping layers

Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures

Nitride underlayer and fabrication method thereof

Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap

Coated cutting tool

Multi-layer coating with diffusion barrier layer and erosion resistant layer

Processing apparatus and cover member

Surface-coated cutting tool and method of producing the same

MULTI-COMPOSITION FIBER WITH REFRACTORY ADDITIVE(S) AND METHOD OF MAKING

Method of manufacturing semiconductor device

AUTOMATED PROCESS CONTROL OF ATOMIC LAYER DEPOSITION OF TITANIUM NITRIDE THROUGH TREATMENT GAS PULSE TIME

Substrate processing apparatus and substrate processing method

Surface-coated cutting tool in which hard coating layers exhibits excellent chipping resistance

Method of producing self-supporting nitride semiconductor substrate

Method for producing Group III nitride semiconductor including growing Group III nitride semiconductor through flux method

Deposition of smooth metal nitride films

ANALYSIS METHOD FOR SILANOL GROUP OF SUBSTRATE SURFACE

Formation of a transition metal nitride

Film forming apparatus and gas injection member used therefor

NON-METALLIC COATING FOR STEEL SUBSTRATES AND METHOD FOR FORMING THE SAME

Seed wafer for GaN thickening using gas- or liquid-phase epitaxy

Digital pattern generator having charge drain coating

Gas supply apparatus and gas supply method

Film forming method, film forming system and surface processing method

Method and apparatus for forming nitride film

Surface coated cutting tool and method for manufacturing the same

Process for coating an article and coating produced thereby

Fabrication of correlated electron material devices with reduced interfacial layer impedance

MULTI-LAYER COATING WITH DIFFUSION BARRIER LAYER AND EROSION RESISTANT LAYER

Coated tool

Nitride semiconductor template, manufacturing method thereof, and epitaxial wafer

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF FORMING LITHIUM-BASED FILM BY USING THE SAME

Thin film deposition system capable of physical vapor deposition and chemical vapor deposition simultaneously

Wear resistant coatings for tool dies

ALD of metal-containing films using cyclopentadienly compounds

ALD of hafnium-containing films using cyclopentadienyl compounds

Lanthanum Precursors For Deposition Of Lanthanum, Lanthanum Oxide And Lanthanum Nitride Films

Multilayer structured coatings for cutting tools

C-plane GaN substrate

Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor

Deposition Method of Metallic Carbon Film

CVD coated cutting tool

CASTING SYSTEM FOR INVESTMENT CASTING PROCESS

Apparatus for manufacturing group III nitride single crystal, method for manufacturing group III nitride single crystal using the apparatus, and aluminum nitride single crystal

SURFACE COATED CUTTING TOOL

Deposition device and deposition method

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SURFACE-COATED CUTTING TOOL IN WHICH HARD COATING LAYER EXHIBITS EXCELLENT CHIPPING RESISTANCE

Surface-coated cutting tool in which hard coating layer exhibits excellent chipping resistance

VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD

Coated cutting tool insert with MT-CVD TiCN on TiAI(C,N)

Group 13 element nitride crystal layer and function element

Method for manufacturing nitride semiconductor template

Cleaning method and laminate of aluminum nitride single-crystal substrate

Trim method for patterning during various stages of an integration scheme

Multilayer iron nitride hard magnetic materials

Electric discharge generator and power supply device of electric discharge generator

Forming iron nitride hard magnetic materials using chemical vapor deposition or liquid phase epitaxy

Inter-anchored multilayer refractory coatings

Energy release using tunable reactive materials

NITRIDE SEMICONDUCTOR LIGHT EMITTING ELEMENT AND METHOD FOR MANUFACTURING THE SAME

PVD-coated cutting tools and method for making the same

Protective layer for PECVD graphite boats

TRIBOLOGICAL SYSTEM WITH REDUCED COUNTER BODY WEAR

Chamber component with protective coating suitable for protection against fluorine plasma

Coating, cutting tool, and method of manufacturing coating

Surface-coated cutting tool having hard coating layer that exhibits excellent chipping resistance

Surface-coated cutting tool

Gas supply device and valve device

Surface-coated cutting tool

Tantalum compound and methods of forming thin film and fabricating integrated circuit device by using the same

Method of manufacturing semiconductor device

Antiwetting coating for liquid metal

Oleophilic foams for oil spill mitigation

Nanostructured coated substrates for use in cutting tool applications

Surface-coated cutting tool having hard coating layer that exhibits excellent chipping resistance

METHOD OF MANUFACTURING SUBSTRATE FOR EPITAXY

Advanced coating method and materials to prevent HDP-CVD chamber arcing

Coated extrusion tool

Niobium-Nitride film forming compositions and vapor deposition of Niobium-Nitride films

Large aluminum nitride crystals with reduced defects and methods of making them

Methods of forming resistive memory elements

Coated sliding element

Coating for metal components, method for coating a metal component, piston for internal combustion engines and motor vehicle

Molybdenum silylcyclopentadienyl and silylallyl complexes and use thereof in thin film deposition

Organic Germanium Amine Compound and Method for Depositing Thin Film Using the Same

Surface-coated cutting tool and method for producing the same

Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium

Cubic boron nitride sintered body cutting tool

Deposition of smooth metal nitride films

METHOD FOR TREATMENT OF METALLIC POWDER FOR SELECTIVE LASER MELTING

ALD of metal-containing films using cyclopentadienyl compounds

Nitride semiconductor single crystal substrate manufacturing method

Method of manufacturing semiconductor device

Method for producing semiconductor epitaxial wafer and semiconductor epitaxial wafer

Hard coating, cutting tool, and method for producing hard coating

Method for protecting layer by forming hydrocarbon-based extremely thin film

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Cutting tool

Surface-coated titanium carbonitride-based cermet cutting tool having excellent chipping resistance

Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same

Precursor Composition for Forming Zirconium-Containing Film and Method for Forming Zirconium-Containing Film Using Same

Charge drain coating for electron-optical MEMS

INORGANIC ALD FILM ON AN ORGANIC POLYMER SURFACE

Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same

Growth of nitride films

TiAlCN layers with lamellar structure

Coated cutting tool

Enhanced surface treatments

Apparatus and method for the reduction of impurities in films

Coated sliding element

Vanadium-containing film forming compositions and vapor deposition of vanadium-containing films

Single platform, multiple cycle spacer deposition and etch

TANTALUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION OF TANTALUM-CONTAINING FILMS

Method of overlay in extreme ultra-violet (EUV) lithography

Copper metal film, method for preparing the same, and method for forming copper interconnect for semiconductor device using the same

CVD coated cutting insert and method of making the same

CVD-coated article and CVD process of making the same

Boron-containing compounds, compositions, and methods for the deposition of a boron containing films

Method of manufacturing a semiconductor device and recording medium

METAL COMPLEXES CONTAINING AMIDOIMINE LIGANDS

PVD-coated cutting tools and method for making the same

Piezoelectric thin film, manufacturing method therefor, and piezoelectric element

ALD of metal-containing films using cyclopentadienyl compounds

Selective deposition

Low temperature CVD coatings and applications thereof

COATED CUTTING TOOL

Article having coating including compound of aluminum, boron and nitrogen

Metal deposition on substrates

Method of manufacturing semiconductor device

Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use

Gas turbine engine component with abrasive surface formed by electrical discharge machining

METHOD FOR DEPOSITING METAL-CONTAINING FILM USING PARTICLE-REDUCTION STEP

Nanocomposite refractory coatings and applications thereof

Inter-anchored multilayer refractory coatings

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

Titanium-containing film forming compositions for vapor deposition of titanium-containing films

Titanium aluminum and tantalum aluminum thin films

Vapor source using solutions of precursors in tertiary amines

System and method for measuring cooling of a component

Multilayer structured coatings for cutting tools

Film formation device

METHOD FOR PRODUCING A COMPOSITE MATERIAL WITH A CARBIDE MATRIX

Method and apparatus to deposit pure titanium thin film at low temperature using titanium tetraiodide precursor

Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate

Tool having CVD coating

Processing apparatus

Surface coated cutting tool

Wear resistant vapor deposited coating, method of coating deposition and applications therefor

BIS(ALKYLIMIDO)-BIS(ALKYLAMIDO)TUNGSTEN MOLECULES FOR DEPOSITION OF TUNGSTEN-CONTAINING FILMS

Single platform, multiple cycle spacer deposition and etch

Semiconductor device manufacturing method and substrate processing apparatus

INTEGRATED PRE-CLEAN AND DEPOSITION OF LOW-DAMAGE LAYERS

Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition

BIS(ALKYLIMIDO)-BIS(ALKYLAMIDO)MOLYBDENUM MOLECULES FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS

APPARATUS AND METHODS FOR SAFELY PROVIDING HAZARDOUS REACTANTS

Surface-coated cutting tool and process for producing same

Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition

SURFACE COATED MEMBER AND METHOD FOR MANUFACTURING SAME

Surface coated member and method for manufacturing same

Method for coating a sliding element using a nanoparticles infused coating

Thin film structure and method of fabricating the same

Self-aligned barrier and capping layers for interconnects

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

Method of depositing a film

Selective deposition of noble metal thin films

Method of manufacturing semiconductor device and method of maintaining deposition apparatus

Fluorine-containing conductive films

Substrate processing apparatus

COATING LAYER OF ZIRCONIUM COMPOSITE MATERIAL AND METHOD OF FORMING COATING LAYER

Method for manufacturing high durability heart valve

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium

Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium

Deposition system with multi-cathode and method of manufacture thereof

COATED SNAP CUTTER BLADE AND METHOD OF MAKING SAME

Film forming apparatus

Coated metallic products and methods for making the same

Method of manufacturing semiconductor device and substrate processing apparatus

Method for operating semiconductor manufacturing equipment

METHOD OF FABRICATING NITRIDE FILM AND METHOD OF CONTROLLING COMPRESSIVE STRESS OF THE SAME

Hard-coated tool and its production method

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

Method of forming metal-containing film

Integration of ALD barrier layer and CVD Ru liner for void-free Cu filling

Surface coated cutting tool

Semiconductor device manufacturing method and substrate processing apparatus

Substrate processing apparatus and method of manufacturing semiconductor device

Methods of depositing cobalt manganese films

Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same

SYSTEM AND METHOD FOR FORMING GAN-BASED DEVICE

Method for treating a surface of a timepiece component, and timepiece component obtained from such a method

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

Radiation shielding for a CVD reactor

Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer readable recording medium

Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same

Coated probe and method of fabricating the same

Film deposition using precursors containing amidoimine ligands

METHOD FOR FORMING MANGANESE-CONTAINING FILM

Film forming method and film forming apparatus

Tungsten nitrido precursors for the CVD of tungsten nitride, carbonitride, and oxide films

Method for producing a hard material layer on a substrate, hard material layer and cutting tool

Method for forming Ti-containing film by PEALD using TDMAT or TDEAT

Thin film forming method

Surface-coated cutting tool

Coated body and method for coating a body

Method for forming TiSiN thin film layer by using atomic layer deposition

GAS BARRIER FILM

Film-forming apparatus

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

Method of depositing film

ALD of zirconium-containing films using cyclopentadienyl compounds

CERAMIC HEATER

Method of depositing film

Method for forming TiN and storage medium

Hard-material-coated bodies composed of metal, cemented hard material, cermet or ceramic and processes for producing such bodies

Methods for the deposition of manganese-containing films using diazabutadiene-based precursors

Method for the chemical vapor infiltration of refractive substances

BLANK FOR NANOIMPRINT MOLD, NANOIMPRINT MOLD, AND METHODS FOR PRODUCING SAID BLANK AND SAID NANOIMPRINT MOLD

Method of manufacturing semiconductor device

Method for preparing a coating for protecting a part against oxidation

Method of forming a layer using a trialkylsilane silicon precursor compound

Deposition of smooth metal nitride films

Systems and methods for remote plasma atomic layer deposition

Methods for depositing films comprising cobalt and cobalt nitrides

Metal amide deposition precursors and their stabilization with an inert ampoule liner

Cutting tool

Coated cutting tool

Structure including thin primer film and method of producing said structure

TiN film forming method and storage medium

Film deposition apparatus having a turntable and film deposition method

LOW FRICTION COATING LAYER, LOW FRICTION COATING METHOD AND LOW FRICTION COATING APPARATUS

Method of producing a nitride semiconductor crystal with precursor containing carbon and oxygen, and nitride semiconductor crystal and semiconductor device made by the method

Vapor source using solutions of precursors in terpenes

Metal heterocyclic compounds for deposition of thin films

Chemical vapor deposition of wear resistant coatings onto piston ring running face, side face, and inner diameter in one coating run

Method for depositing layers on a glass substrate by means of low-pressure PECVD

Reaction tube, substrate processing apparatus and method of manufacturing semiconductor device

Cutting tool

Self-aligned barrier and capping layers for interconnects

Coated cutting tool

Method for forming compound epitaxial layer by chemical bonding and epitaxy product made by the same method

Method for depositing dielectric films

Hardmask materials

Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus

Diamond and diamond composite material

Methods for manganese nitride integration

METHOD FOR DEPOSITING A TRANSPARENT BARRIER LAYER SYSTEM

SURFACE-COATED CUTTING TOOL

Methods for depositing manganese and manganese nitrides

Method of integrating buried threshold voltage adjustment layers for CMOS processing

Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium

Selective atomic layer depositions

Nanostructured Multi-Layer Coating on Carbides

Method of depositing metals using high frequency plasma

Methods of fabricating metal hard masks

Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and non-transitory computer-readable recording medium

Semiconductor devices having nitrided gate insulating layer and methods of fabricating the same

Thermally stable volatile precursors

LAMINATE AND PROCESS FOR PRODUCING LAMINATE

Coating layer for cutting tools

Enhanced work function layer supporting growth of rutile phase titanium oxide

Germanium antimony telluride materials and devices incorporating same

Metal-Aluminum Alloy Films From Metal PCAI Precursors And Aluminum Precursors

Cutting insert with a titanium oxycarbonitride coating and method for making the same

Surface-coated cutting tool

HEATING CHAMBER HAVING REACTION PREVENTING LAYER AND LAYER FORMING METHOD THEREOF

Phase Change Memory Device

APPARATUS FOR THERMAL AND PLASMA ENHANCED VAPOR DEPOSITION AND METHOD OF OPERATING

Beam-induced deposition of low-resistivity material

Coated metallic products and methods for making the same

Method for forming thin film using radicals generated by plasma

Surface-coated cutting tool

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SEMICONDUCTOR DEVICE

Hardmask materials

Method and system for binding halide-based contaminants

Process for passivating dielectric films

Surface coated cutting tool with excellent chipping resistance

Formation of liner and barrier for tungsten as gate electrode and as contact plug to reduce resistance and enhance device performance

Coated tool

Coated bodies made of metal, hard metal, cermet, or ceramic, and method(s) for coating of such bodies

Method of forming titanium nitride film

APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICES AND SUBSTRATES

Method of forming metal-containing film

NANOLAYER DEPOSITION USING PLASMA TREATMENT

Injection molding method

Solution based precursors

Formation of a tantalum-nitride layer

Deposition of group IV metal-containing films at high temperature

Chemical vapor deposition process for aluminum silicon nitride

Gallium nitride-based LED fabrication with PVD-formed aluminum nitride buffer layer

Method of manufacturing semiconductor device and substrate processing apparatus