SEMICONDUCTOR APPARATUS FOR DEPOSITION PROCESS

CLAMPED DUAL-CHANNEL SHOWERHEAD

Treatments for controlling deposition defects

SILICON OXIDE COATED POLYMER FILMS AND LOW PRESSURE PECVD METHODS FOR PRODUCING THE SAME

SHOWER HEAD AND SUBSTRATE PROCESSING DEVICE

NITRIDE PROTECTIVE COATINGS ON AEROSPACE COMPONENTS AND METHODS FOR MAKING THE SAME

DEVICE FOR PLASMA TREATMENT OF ELECTRONIC MATERIALS

Lid stack for high frequency processing

Chucking process and system for substrate processing chambers

EXCLUSION RING WITH FLOW PATHS FOR EXHAUSTING WAFER EDGE GAS

Method and apparatus for plasma generation

METHOD FOR LARGE SURFACE COATING BASE ON CONTROL OF THIN FILM STRESS AND COATING STRUCTURE USEOF

Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device

LINER FOR V-NAND WORD LINE STACK

INNOVATIVE NANOPORE SEQUENCING TECHNOLOGY

SHADOW RING LIFT TO IMPROVE WAFER EDGE PERFORMANCE

METHOD OF DEPOSITING METAL FILMS

METHOD FOR THE SURFACE TREATMENT OF A JEWEL, IN PARTICULAR FOR THE WATCHMAKING INDUSTRY

ELECTRICALLY CONDUCTIVE MASKING TAPE

Method for producing contact lens packages

DETECTION AND LOCATION OF ANOMALOUS PLASMA EVENTS IN FABRICATION CHAMBERS

VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD

SUSCEPTOR CLEANING

HARD COAT LAMINATE

Substrate processing method and substrate processing apparatus

High temperature chemical vapor deposition lid

Methods for plasma depositing polymers comprising cyclic siloxanes and related compositions and articles

Boron nitride for mask patterning

Metal-doped carbon hardmasks

QUANTUM DOT-DOPED GLASS

MULTI-COLORED DECORATIVE COMPONENT AND METHOD

Methods and apparatus for reducing as-deposited and metastable defects in Amorphousilicon

SYSTEMS AND METHODS FOR MEDICAL PACKAGING

SYSTEMS AND METHODS FOR MEDICAL PACKAGING

STABLE BIS(ALKYL-ARENE) TRANSITION METAL COMPLEXES AND METHODS OF FILM DEPOSITION USING THE SAME

METHOD AND SYSTEM FOR FORMING METAL-INSULATOR-METAL CAPACITORS

CVD APPARATUS AND FILM FORMING METHOD

COATING FOR A TRIBOLOGICAL SURFACE OF A COMPONENT

SUBSTRATE TREATMENT APPARATUS WITH VIRTUAL DUMMY WAFER FUNCTION AND SUBSTRATE TREATMENT METHOD

CVD DEVICE PUMPING LINER

Pad raising mechanism in wafer positioning pedestal for semiconductor processing

SUBSTRATE SUPPORT APPARATUS, METHODS, AND SYSTEMS HAVING ELEVATED SURFACES FOR HEAT TRANSFER

METHOD OF FORMING AN ADHESION LAYER ON A PHOTORESIST UNDERLAYER AND STRUCTURE INCLUDING SAME

METHODS OF MANUFACTURING A PELLICLE HAVING GRAPHITE LAYER

Semiconductor Device and Method of Manufacture

Helium-free silicon formation

METAL COMPONENT AND MANUFACTURING METHOD THEREOF AND PROCESS CHAMBER HAVING THE METAL COMPONENT

OPTICAL THIN FILMS AND FABRICATION THEREOF

Temperable coatings comprising diamond-like carbon

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PRODUCING SEMICONDUCTOR DEVICE

METHODS AND SYSTEMS FOR FILLING A GAP

Processing chamber with multiple plasma units

Display panel, display apparatus, method of fabricating display panel, and counter substrate

RPCVD Apparatus and Methods for Forming a Film

Uniform in situ cleaning and deposition

Semiconductor manufacturing apparatus and semiconductor device manufacturing method

BIDIRECTIONAL INDEXING APPARATUS

Temperature control assembly for substrate processing apparatus and method of using same

Selective cobalt deposition on copper surfaces

HEAT INSULATING CONTAINER AND METHOD FOR PRODUCING THE SAME

SYSTEMS AND METHODS FOR IMPROVED CARBON ADHESION

Semiconductor wafer and method for manufacturing same

Depositing Coatings On and Within A Housing, Apparatus, or Tool Using a Coating System Positioned Therein

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

PROTECTIVE MULTILAYER COATING FOR PROCESSING CHAMBER COMPONENTS

METHOD FOR PRODUCING COATINGS WITH ADAPTED COATING PROPERTIES

Solids vaporizer

Process for making a fabric based substrate bearing a carbon based coating

Detection chip and modification method therefor

CHAMBER-ACCUMULATION EXTENSION VIA IN-SITU PASSIVATION

Compositions comprising silacycloalkanes and methods using same for deposition of silicon-containing film

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

Plasma processing method and plasma processing apparatus

Plasma polymerization coating with uniformity control

Systems and methods for reducing effluent build-up in a pumping exhaust system

Stain hiding fabric with metallic coating

METHOD FOR FORMING A LAYER OF ALUMINA AT THE SURFACE OF A METALLIC SUBSTRATE

Polymeric surface having reduced biomolecule adhesion to thermoplastic articles and methods of plasma treatment

METHOD AND SYSTEM FOR FORMING BORON NITRIDE ON A SURFACE OF A SUBSTRATE

Incorporating semiconductors on a polycrystalline diamond substrate

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

IMPEDANCE MATCHING NETWORK AND METHOD

PECVD coated pharmaceutical packaging

Methods of forming a microelectronic device, and related systems and additional methods

SixNy AS A NUCLEATION LAYER FOR SiCxOy

Medical device with plasma modified oxide layer and method of forming such a device

Organic light-emitting element, method for producing organic light-emitting element, organic light-emitting device, method for producing organic light-emitting device, lighting device, moving object, image pickup device, and electronic apparatus

Plasma processing apparatus

METHOD FOR PREPARING PEROVSKITE SOLAR CELL ABSORBING LAYER BY MEANS OF CHEMICAL VAPOR DEPOSITION

POLYMERIC SURFACE HAVING REDUCED BIOMOLECULE ADHESION TO THERMOPLASTIC ARTICLES OF SUCH SUBSTRATE

Using controlled gas pressure for backside wafer support

Films of desired composition and film properties

Films of desired composition and film properties

Films of desired composition and film properties

Films of desired composition and film properties

ORGANOSILANE PRECURSORS FOR ALD/CVD/SOD OF SILICON-CONTAINING FILM APPLICATIONS

METHOD OF TREATING A SUBSTRATE

Nano-coating protection method for electrical devices

GROUP IV ELEMENT CONTAINING PRECURSORS AND DEPOSITION OF GROUP IV ELEMENT CONTAINING FILMS

Methods to eliminate of deposition on wafer bevel and backside

Substrate processing method

Formulation for deposition of silicon doped hafnium oxide as ferroelectric materials

Multi-layer protective coating

DIAMOND-LIKE CARBON COATINGS AND METHODS OF MAKING THE SAME

LITHIUM METAL SURFACE MODIFICATION USING CARBONATE PASSIVATION

METHOD FOR COATING A MECHANICALLY HIGHLY LOADED SURFACE OF A COMPONENT, AND COATED COMPONENT ITSELF

BIODEGRADABLE AND COMPOSTABLE VESSELS, SUCH AS COFFEE PODS, COATED WITH PECVD COATINGS OR LAYERS

NOVEL AND EFFECTIVE HOMOGENIZE FLOW MIXING DESIGN

Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features

Multi-layer plasma resistant coating by atomic layer deposition

Gas transport system

Ultralight robust plate materials

COATINGS

FILM FORMING APPARATUS, FILM FORMING METHOD, AND FILM FORMING SYSTEM

Valve module and substrate processing device comprising the same

Hydrophobic Low-Dielectric-Constant Film and Preparation Method Therefor

Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma

Method of simultaneous silicidation on source and drain of NMOS and PMOS transistors

Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine compound and method for manufacturing silicon-containing thin using the same

MONOPOLE ANTENNA ARRAY SOURCE FOR SEMICONDUCTOR PROCESS EQUIPMENT

Gasbox for semiconductor processing chamber

METHODS AND APPARATUSES FOR DEPOSITION OF ADHERENT CARBON COATINGS ON INSULATOR SURFACES

Water barrier laminate

Substrate support for chucking of mask for deposition processes

Multi-pressure bipolar electrostatic chucking

ELECTRIC ARC MITIGATING FACEPLATE

Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition

METHOD OF REDUCING DEFECTS IN A MULTI-LAYER PECVD TEOS OXIDE FILM

CHLORODISILAZANES

PRODUCTION PROCESS DETERMINATION DEVICE FOR SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, PRODUCTION PROCESS DETERMINATION METHOD FOR SUBSTRATE PROCESSING APPARATUS, LEARNING MODEL GROUP, GENERATION METHOD OF LEARNING MODEL GROUP, AND PROGRAM

CERAMIC HEATER

TRANSPARENT NANO LAYERED WATER BARRIERS AND METHODS FOR MANUFACTURING THE SAME

Neural interface device manufacturing method

MODULAR ZONE CONTROL FOR A PROCESSING CHAMBER

Gas supply unit and substrate processing apparatus including gas supply unit

BEVEL BACKSIDE DEPOSITION ELIMINATION

Feature fill with nucleation inhibition

SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

APPARATUS FOR PROCESSING SUBSTRATE

SYSTEMS AND METHODS FOR DETERMINING RESIDUAL COMPOUNDS IN PLASMA PROCESS

Doping semiconductor films

METHOD FOR RESIDUE NON-UNIFORMITY MODULATION

SHOWERHEAD FOR DEPOSITION TOOLS HAVING MULTIPLE PLENUMS AND GAS DISTRIBUTION CHAMBERS

Rotary mechanism and substrate processing apparatus

Systems and methods for depositing low-κdielectric films

Systems and methods for cleaning low-k deposition chambers

Method for efficiently eliminating graphene wrinkles formed by chemical vapor deposition

Methods for depositing gap filling fluid

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

Decorative PVD coated items and radomes and methods of making same

VACUUM PROCESSING APPARATUS

Polycrystalline ceramic substrate and method of manufacture

Vertical branched graphene

Carrier ring used in a deposition chamber

Black component decorated with stones and manufacturing method thereof

NANOCRYSTALLINE GRAPHENE AND METHOD OF FORMING NANOCRYSTALLINE GRAPHENE

Gas phase production of radicals for dielectrics

SILICON COMPOUNDS AND METHODS FOR DEPOSITING FILMS USING SAME

Deposition of low-stress boron-containing layers

Optical dielectric planar waveguide process

Multi-layer deposition and treatment of silicon nitride films

Methods and systems to modulate film stress

Deposition of semiconductor integration films

Plasma-enhanced chemical vapor deposition method of forming lithium-based film by using the same

Copper-filled carbon nanotubes and synthesis methods thereof

Hydrogen management in plasma deposited films

Switchable delivery for semiconductor processing system

Substrate processing system and temperature control method

SILICON NITRIDE AND SILICON OXIDE DEPOSITION METHODS USING FLUORINE INHIBITOR

Methods for producing high-density carbon films for hardmasks and other patterning applications

Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium

IMAGE FORMING METHOD AND IMAGE-FORMED PRODUCT

High temperature chemical vapor deposition lid

Preparation Method Of Miniature Solid Silicon Needle

STAGE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

MOUNTINGS FOR FULLY COATING BODIES, IN PARTICULAR STENTS, BY MEANS OF PECVD

LAMINATED BODY, FLEXIBLE ELECTRONIC DEVICE, AND LAMINATED-BODY MANUFACTURING METHOD

Apparatus and methods for wafer chucking on a susceptor for ALD

Plasma boat for receiving wafers with regulated plasma deposition

Heated ceramic faceplate

Film deposition apparatus with gas entraining openings

ANTISTATIC COATINGS FOR PLASTIC VESSELS

Nitride protective coatings on aerospace components and methods for making the same

Directional deposition for semiconductor fabrication

Real-time control of temperature in a plasma chamber

CONDUCTIVE STRUCTURE AND METHOD OF CONTROLLING WORK FUNCTION OF METAL

Deposition apparatus including an off-axis lift-and-rotation unit and methods for operating the same

SILICON PRECURSOR AND METHOD OF FABRICATING SILICON-CONTAINING THIN FILM USING THE SAME

LIFT PIN AND VACUUM PROCESSING APPARATUS

Methods And Apparatus For Pulsed Inductively Coupled Plasma For Surface Treatment Processing

Solid source precursor vessel

SILACYCLIC COMPOUNDS AND METHODS FOR DEPOSITING SILICON-CONTAINING FILMS USING SAME

Methods of forming structures including vanadium boride and vanadium phosphide layers

Method and apparatus for filling a gap

CONTINUOUS FLOW SYSTEM AND METHOD FOR COATING SUBSTRATES

Faceplate with edge flow control

RETICLE POD HAVING COATED SENSOR ZONES

METHOD FOR GENERATING AND PROCESSING A UNIFORM HIGH DENSITY PLASMA SHEET

Techniques and apparatus for selective shaping of mask features using angled beams

Method of forming a nitrogen-containing carbon film and system for performing the method

Plasma processing apparatus and plasma processing method

Lid stack for high frequency processing

Amorphous carbon multilayer coating with directional protection

RF power compensation to reduce deposition or etch rate changes in response to substrate bulk resistivity variations

Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium

Substrate processing system, substrate processing method, and controller

SPECIFIC TYPE ION SOURCE AND PLASMA FILM FORMING APPARATUS

FILM FORMING APPARATUS AND FILM FORMING METHOD

Precursors and methods for preparing silicon-containing films

PROCESS FOR PRODUCING CARBON-NANOTUBE GRAFTED SUBSTRATE

THIN FILM FORMING DEVICE AND THIN FILM FORMING METHOD USING THE SAME

PULSING MIXTURE OF PRECURSOR AND SUPERCRITICAL FLUID TO TREAT SUBSTRATE SURFACE

Layer stack for display applications

SEMICONDUCTOR SUBSTRATE SUPPORT WITH WAFER BACKSIDE DAMAGE CONTROL

Coating apparatus and coating method

Vapor deposition of carbon-based films

SUBSTRATE SUPPORT, PLASMA PROCESSING SYSTEM, AND METHOD OF PLACING ANNULAR MEMBER

Method and system for forming metal-insulator-metal capacitors

Plasma electrolytic polished diesel engine components

METHOD OF FORMING LOW-K MATERIAL LAYER, STRUCTURE INCLUDING THE LAYER, AND SYSTEM FOR FORMING SAME

Coating apparatus and movable electrode arrangement, movable support arrangement, and application thereof

Fluid transfer system in a charged particle system

BALL AND VALVE SEAT FOR FUEL INJECTOR, AND METHOD FOR COATING THE SAME

Photothermal evaporation material integrating light absorption and thermal insulation, preparation application thereof, use thereof

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium

Deposition radial and edge profile tunability through independent control of TEOS flow

Vanadium nitride film, and member coated with vanadium nitride film and method for manufacturing the same

Methods for pressure ramped plasma purge

PROCESSING APPARATUS AND PROCESSING METHOD

Semiconductor device

PLASMA TREATMENT APPARATUS

Active gas generation apparatus and deposition processing apparatus

Preparation method for bifacial perc solar cell

Method of forming high aspect ratio features

Metal triamine compound, method for preparing the same, and composition for depositing metal-containing thin film including the same

Method of Forming Anti-Reflection Coatings

CHAMBER DESIGN FOR SEMICONDUCTOR PROCESSING

Graphene structure and method of forming the graphene structure

Symmetric plasma source to generate pie-shaped treatment

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Targeted heat control systems

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device

SELS nano finger sidewall coating layer

Ribbon beam plasma enhanced chemical vapor deposition system for anisotropic deposition of thin films

Silicon carbonitride gapfill with tunable carbon content

Polycrystalline ceramic substrate

Substrate tray for use in thin-film formation device

Methods of forming high boron-content hard mask materials

Method for depositing large-area graphene layer and apparatus for continuous graphene deposition

Plasma source for rotating susceptor

High throughput vacuum deposition sources and system

Initiation modulation for plasma deposition

Inline measurement of process gas dissociation using infrared absorption

Processing Chamber With Multiple Plasma Units

Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure

Temperature measurement system, temperature measurement method, and substrate processing apparatus

Disilylamine compound, method for preparing the same, and composition for depositing silicon-containing thin film including the same

Upper electrode and plasma processing apparatus

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTAINING FILM

Self-supporting ultra-fine nanocrystalline diamond thick film

Nanowire-Mesh Templated Growth of Out-of-Plane Three-Dimensional Fuzzy Graphene

Method of growing titanium nitride on silicon substrate free from silicon nitride interface by using a titanium seed layer

SURFACE ENCASING MATERIAL LAYER

Semiconductor process chamber with heat pipe

ULTRAFINE BUBBLE GENERATING APPARATUS AND METHOD OF MANUFACTURING ELEMENT SUBSTRATE

PECVD coated pharmaceutical packaging

Method and device for the surface treatment of substrates

Control method and plasma processing apparatus

CARRIER RING USED IN A DEPOSITION CHAMBER

Apparatus, probe assembly and methods for treating containers

METHOD AND APPARATUS OF ACHIEVING HIGH INPUT IMPEDANCE WITHOUT USING FERRITE MATERIALS FOR RF FILTER APPLICATIONS IN PLASMA

Reactor system including a gas distribution assembly for use with activated species and method of using same

Method of preparing white light-emitting material

RF current measurement in semiconductor processing tool

Carrier plate for use in plasma processing systems

Method for forming boron-based film, formation apparatus

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Susceptor having cooling device

Method of manufacturing an implant and an implant with two coatings

CVD device pumping liner

Semiconductor manufacturing device

Integrated surface treatments and coatings for artificial lift pump components

EXHAUST COMPONENT CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS INCLUDING EXHAUST COMPONENT

OBJECT WITH A HIGH-TEMPERATURE-RESISTANT OMNIPHOBIC NON-STICK COATING, AND METHOD FOR PRODUCING SUCH AN OBJECT

Method of fabricating hexagonal boron nitride

MOISSANITE ORNAMENT AND METHOD FOR COATING DIAMOND FILM ON SURFACE OF MOISSANITE ORNAMENT

Shower head structure and plasma processing apparatus using the same

Low-k dielectric films

REMOTE CAPACITIVELY COUPLED PLASMA DEPOSITION OF AMORPHOUS SILICON

Substrate processing apparatus

Plasma enhanced CVD with periodic high voltage bias

Display device having integrated metamaterial lens

ELECTROSTATIC CHUCK FOR DAMAGE-FREE SUBSTRATE PROCESSING

TINTED METAL PLATED PARTS AND METHODS OF MANUFACTURING TINTED METAL PARTS

Ultra-fine nanocrystalline diamond precision cutting tool and manufacturing method therefor

Control system for plasma chamber having controllable valve

METHOD OF MANUFACTURE OF A FILM MADE OF VANADIUM DISULFIDE FILM AND FILM WHICH CAN BE OBTAINED BY THIS METHOD

Plasma erosion resistant thin film coating for high temperature application