Patents-Review.com
ClassID:

120276 ⎘

C23C16/50 - page 3 - CPC Classification

Classification description:

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges

Recent Application in this class:
#601
20210002762
2021-01-07

Temperature control assembly for substrate processing apparatus and method of using same

 #602
20200408959
2020-12-31

APPARATUS FOR PLASMA PROCESSING ON OPTICAL SURFACES AND METHODS OF MANUFACTURING AND USE THEREOF

 #603
20200407843
2020-12-31

GAS BARRIER FILM

 #604
20200399756
2020-12-24

PECVD process

 #605
20200396801
2020-12-17

Multi-zone heater

 #606
20200395199
2020-12-17

SUBSTRATE TREATMENT APPARATUS AND METHOD OF CLEANING INSIDE OF CHAMBER

 #607
20200392294
2020-12-17

Silylamine compound, composition for depositing silicon-containing thin film containing the same, and method for manufacturing silicon-containing thin film using the composition

 #608
20200385865
2020-12-10

Low deposition rates for flowable PECVD

 #609
20200385862
2020-12-10

Faceplate having a curved surface

 #610
20200381248
2020-12-03

Methods of post treating dielectric films with microwave radiation

 #611
20200378005
2020-12-03

Plasma processing apparatus

 #612
20200377682
2020-12-03

Polymer substrate with hard coat layer

 #613
20200373318
2020-11-26

Liner for V-NAND word line stack

 #614
20200373152
2020-11-26

Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition

 #615
20200373128
2020-11-26

Impedance matching network and method with reduced memory requirements

 #616
20200373127
2020-11-26

Impedance matching network and method with reduced memory requirements

 #617
20200370177
2020-11-26

Substrate processing chamber

 #618
20200370171
2020-11-26

Stain hiding fabric with metallic coating

 #619
20200370161
2020-11-26

Tetrahedral amorphous hydrogenated carbon and amorphous siloxane diamond-like nanocomposite

 #620
20200368776
2020-11-26

Apparatus and method for surface coating by means of grid control and plasma-initiated gas-phase polymerization

 #621
20200365391
2020-11-19

Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition

 #622
20200365388
2020-11-19

Method of processing substate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

 #623
20200365386
2020-11-19

Dynamic multi zone flow control for a processing system

 #624
20200360943
2020-11-19

Multiple section showerhead assembly

 #625
20200354833
2020-11-12

Method for forming a protective coating film for halide plasma resistance

 #626
20200354829
2020-11-12

Methods and apparatuses for forming graphene

 #627
20200350144
2020-11-05

Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces

 #628
20200348468
2020-11-05

Optical dielectric planar waveguide process

 #629
20200347609
2020-11-05

Multi-layered ventilation apparatus and methods of manufacturing thereof

 #630
20200346928
2020-11-05

Vanadium silicon carbonitride film, vanadium silicon carbonitride film coated member, and method for manufacturing the same

 #631
20200346924
2020-11-05

Method of manufacturing semiconductor device, substrate processing apparatus and program

 #632
20200343484
2020-10-29

Gas barrier film, optical element including gas barrier film, and method for producing gas barrier film

 #633
20200343078
2020-10-29

Active gas generation apparatus

 #634
20200340117
2020-10-29

Film formation apparatus and film formation method

 #635
20200339617
2020-10-29

Method of manufacturing ruthenium-containing thin film and ruthenium-containing thin film manufactured therefrom

 #636
20200332417
2020-10-22

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

 #637
20200328066
2020-10-15

PLASMA DENSIFICATION WITHIN A PROCESSING CHAMBER

 #638
20200312703
2020-10-01

Wafer positioning pedestal for semiconductor processing

 #639
20200312696
2020-10-01

Electrostatic-chuck heater

 #640
20200312637
2020-10-01

PLASMA PROCESSING APPARATUS AND MAINTENANCE METHOD THEREOF

 #641
20200312632
2020-10-01

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

 #642
20200307859
2020-10-01

METHOD AND APPARATUS FOR COATING CONTAINERS

 #643
20200303180
2020-09-24

Method of depositing thin film and method of manufacturing semiconductor device

 #644
20200299832
2020-09-24

Low temperature lift-off patterning for glassy carbon films

 #645
20200294798
2020-09-17

Film forming method and film forming apparatus

 #646
20200294788
2020-09-17

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium

 #647
20200291524
2020-09-17

Nano-coating protection method for electrical connectors

 #648
20200291519
2020-09-17

Depositing coatings on and within a housing, apparatus, or tool using a coating system positioned therein

 #649
20200291515
2020-09-17

Gas supply apparatus

 #650
20200291513
2020-09-17

LAMINATED FILM

 #651
20200286716
2020-09-10

Chucking process and system for substrate processing chambers

 #652
20200283904
2020-09-10

Nano-coating protection method for electrical connectors

 #653
20200283903
2020-09-10

Nano-coating protection method for electrical connectors

 #654
20200283902
2020-09-10

Display apparatus and method of manufacturing the same

 #655
20200279757
2020-09-03

Substrate processing method and substrate processing apparatus

 #656
20200273679
2020-08-27

Semiconductor manufacturing apparatus

 #657
20200273676
2020-08-27

Apparatus for preventing contamination of self-plasma chamber

 #658
20200270749
2020-08-27

Methods for depositing silicon-containing films

 #659
20200266034
2020-08-20

Plasma processing apparatus

 #660
20200265974
2020-08-20

System for wireline cable coating

 #661
20200263302
2020-08-20

Silane recirculation for rapid carbon/silicon carbide or silicon carbide/silicon carbide ceramic matrix composites

 #662
20200263293
2020-08-20

APPARATUS FOR PRODUCING POLYCRYSTALLINE SILICON AND POLYCRYSTALLINE SILICON

 #663
20200259118
2020-08-13

LAMINATED FILM

 #664
20200258736
2020-08-13

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

 #665
20200251314
2020-08-06

Wafer chuck and processing arrangement

 #666
20200247830
2020-08-06

Compositions And Methods Using Same for Silicon Containing Films

 #667
20200243330
2020-07-30

Film deposition method

 #668
20200234960
2020-07-23

Ge-containing Co-film forming material, Ge-containing Co film and film forming method thereof

 #669
20200234945
2020-07-23

Polycrystalline ceramic substrate and method of manufacture

 #670
20200234932
2020-07-23

Heated pedestal design for improved heat transfer and temperature uniformity

 #671
20200227250
2020-07-16

Method and apparatus for filling a gap

 #672
20200217287
2020-07-09

BALL AND VALVE SEAT FOR FUEL INJECTOR, AND METHOD FOR COATING SAME

 #673
20200215566
2020-07-09

Processing chamber mixing systems

 #674
20200212355
2020-07-02

GAS BARRIER FILM AND FLEXIBLE ELECTRONIC DEVICE

 #675
20200207066
2020-07-02

FLEXIBLE BARRIER MEMBRANE AND METHOD FOR PRODUCING THE FLEXIBLE BARRIER MEMBRANE

 #676
20200203154
2020-06-25

Oxidation reduction for SiOC film

 #677
20200200947
2020-06-25

MULTILAYER ANTIREFLECTIVE ARTICLES AND METHODS OF FORMING THE SAME

 #678
20200199746
2020-06-25

COATING DEVICE AND COATING METHOD FOR TUBE-TYPE PERC SOLAR CELL

 #679
20200199743
2020-06-25

Methods for depositing a tungsten or molybdenum layer in the presence of a reducing co-reactant

 #680
20200198967
2020-06-25

Vanadium nitride film, and member coated with vanadium nitride film and method for manufacturing the same

 #681
20200198285
2020-06-25

FEXIBLE SUBSTRATE AND METHOD FOR FABRICATING SAME

 #682
20200194720
2020-06-18

Organic light-emitting element, method for producing organic light-emitting element, organic light-emitting device, method for producing organic light-emitting device, lighting device, moving object, image pickup device, and electronic apparatus

 #683
20200194254
2020-06-18

Method for manufacturing semiconductor device and film forming apparatus

 #684
20200194232
2020-06-18

Apparatus and method for coating and in particular plasma coating of containers

 #685
20200190662
2020-06-18

SYSTEMS AND METHODS FOR GENERATING ALIGNED CARBON NANOTUBES

 #686
20200185273
2020-06-11

FEATURE FILL WITH NUCLEATION INHIBITION

 #687
20200185200
2020-06-11

Multi-layer plasma resistant coating by atomic layer deposition

 #688
20200181780
2020-06-11

Temperable coatings comprising diamond-like carbon

 #689
20200176301
2020-06-04

Pad raising mechanism in wafer positioning pedestal for semiconductor processing

 #690
20200173026
2020-06-04

High registration particles-transferring system

 #691
20200173025
2020-06-04

Substrate Processing Apparatus

 #692
20200173021
2020-06-04

Chemical vapor deposition of thick inorganic coating on a polarizer

 #693
20200173019
2020-06-04

Ultralight robust plate materials

 #694
20200173016
2020-06-04

Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing

 #695
20200170134
2020-05-28

ULTRAVIOLET LIGHT-RESISTANT ARTICLES AND METHODS FOR MAKING THE SAME

 #696
20200168439
2020-05-28

Impedance matching network and method

 #697
20200165727
2020-05-28

1-Methyl-1-Iso-Propoxy-Silacycloalkanes And Dense Organosilica Films Made Therefrom

 #698
20200165726
2020-05-28

Gas diffuser mounting plate for reduced particle generation

 #699
20200165723
2020-05-28

Substrate holder and film forming apparatus

 #700
20200161171
2020-05-21

SCALED LINER LAYER FOR ISOLATION STRUCTURE

 #701
20200152452
2020-05-14

Methods of encapsulation

 #702
20200152430
2020-05-14

DEVICE AND METHOD FOR PLASMA TREATMENT OF ELECTRONIC MATERIALS

 #703
20200149164
2020-05-14

THERMAL METAL CHEMICAL VAPOR DEPOSITION APPARATUS AND PROCESS

 #704
20200148712
2020-05-14

Ruthenium precursors for ALD and CVD thin film deposition and uses thereof

 #705
20200144440
2020-05-07

Method for manufacturing photoelectric conversion device

 #706
20200144051
2020-05-07

Processing method and substrate processing apparatus

 #707
20200141026
2020-05-07

System and method for increasing group III-nitride semiconductor growth rate and reducing damaging ion flux

 #708
20200141000
2020-05-07

Substrate processing methods

 #709
20200126773
2020-04-23

Electrostatic-chuck heater

 #710
20200124884
2020-04-23

Electro-optic silicon nitride via electric poling

 #711
20200123652
2020-04-23

Synthesis of carbon-based nanostructures using eutectic compositions

 #712
20200123651
2020-04-23

Deposition apparatus and deposition method using the same

 #713
20200123645
2020-04-23

Plasma Process and Reactor for the Thermochemical Treatment of the Surface of Metallic Pieces

 #714
20200118813
2020-04-16

Ozone for selective hydrophilic surface treatment

 #715
20200118799
2020-04-16

Plasma processing apparatus and precoating method

 #716
20200115799
2020-04-16

Silane recirculation for rapid carbon/silicon carbide or silicon carbide/silicon carbide ceramic matrix composites

 #717
20200115797
2020-04-16

Substrate processing apparatus having a gas-mixing manifold

 #718
20200111665
2020-04-09

COMPOSITION FOR DEPOSITING SILICON-CONTAINING THIN FILM AND METHOD FOR MANUFACTURING SILICON-CONTAINING THIN FILM USING THE SAME

 #719
20200111664
2020-04-09

Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine compound and method for manufacturing silicon-containing thin film using the same

 #720
20200109473
2020-04-09

High throughput vacuum deposition sources and system thereof

 #721
20200109469
2020-04-09

Method for treatment medical devices made from nickel-titanium (NiTi) alloys

 #722
20200105502
2020-04-02

Inductive coil structure and inductively coupled plasma generation system

 #723
20200098702
2020-03-26

Methods and apparatus to eliminate wafer bow for CVD and patterning HVM systems

 #724
20200098651
2020-03-26

Systems and methods for controlling plasma instability in semiconductor fabrication

 #725
20200095674
2020-03-26

Gap-fill with aluminum-containing films

 #726
20200090931
2020-03-19

Substrate processing apparatus and method of producing semiconductor device

 #727
20200090911
2020-03-19

Substrate processing apparatus

 #728
20200090909
2020-03-19

FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION

 #729
20200083056
2020-03-12

Metal and metal-derived films

 #730
20200083028
2020-03-12

Multi-functional protective coating

 #731
20200083024
2020-03-12

Multi-layer protective coating

 #732
20200081402
2020-03-12

Decorative article and timepiece

 #733
20200075321
2020-03-05

NON-UV HIGH HARDNESS LOW K FILM DEPOSITION

 #734
20200071822
2020-03-05

Semiconductor manufacturing apparatus having an insulating plate

 #735
20200071820
2020-03-05

Direct liquid injection system for thin film deposition

 #736
20200068329
2020-02-27

Manufacturing method for diamond-like carbon vibrating diaphragm and loudspeaker

 #737
20200066607
2020-02-27

Suppressing interfacial reactions by varying the wafer temperature throughout deposition

 #738
20200063255
2020-02-27

Fixed and portable coating apparatuses and methods

 #739
20200058539
2020-02-20

COATING MATERIAL FOR PROCESSING CHAMBERS

 #740
20200058516
2020-02-20

Systems and methods for internal surface conditioning assessment in plasma processing equipment

 #741
20200058496
2020-02-20

Precursors and flowable CVD methods for making low-k films to fill surface features

 #742
20200058476
2020-02-20

Plasma treatment method

 #743
20200058475
2020-02-20

Controlling multiple plasma processes

 #744
20200051790
2020-02-13

PRESSURE CONTROL RING, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #745
20200048769
2020-02-13

Method and system for growth of graphene nanostripes by plasma enhanced chemical vapor deposition

 #746
20200048419
2020-02-13

Gas barrier film and method for producing gas barrier film

 #747
20200048286
2020-02-13

SILICON COMPOUNDS AND METHODS FOR DEPOSITING FILMS USING SAME

 #748
20200046606
2020-02-13

PECVD coated pharmaceutical packaging

 #749
20200043719
2020-02-06

Substrate processing apparatuses and substrate processing methods

 #750
20200035613
2020-01-30

Semiconductor device

 #751
20200032397
2020-01-30

ZIRCONIUM, HAFNIUM, TITANIUM PRECURSORS AND DEPOSITION OF GROUP 4 CONTAINING FILMS USING THE SAME

 #752
20200027706
2020-01-23

Real-time control of temperature in a plasma chamber

 #753
20200023299
2020-01-23

REMOTE FLUORINATION OF FIBROUS FILTER WEBS

 #754
20200020512
2020-01-16

CHAMBER CLEANING PROCESS

 #755
20200018882
2020-01-16

Manufacturing method of phase difference element, phase difference element, and projection image display device

 #756
20200017972
2020-01-16

Nozzle for uniform plasma processing

 #757
20200013627
2020-01-09

Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity

 #758
20200013615
2020-01-09

Selective growth of SIO2 on dielectric surfaces in the presence of copper

 #759
20200013613
2020-01-09

Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition

 #760
20200013612
2020-01-09

Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition

 #761
20200002171
2020-01-02

Apparatus and method for synthesizing vertically aligned carbon nanotubes

 #762
20190393446
2019-12-26

GAS BARRIER FILM AND FILM FORMING METHOD

 #763
20190393057
2019-12-26

SUBSTRATE PROCESSING APPARATUS

 #764
20190393031
2019-12-26

Processing method and plasma processing apparatus

 #765
20190393030
2019-12-26

Carbon Gapfill Films

 #766
20190390344
2019-12-26

PROCESS MODULE

 #767
20190390342
2019-12-26

Thin film processing apparatus and thin film processing method

 #768
20190385850
2019-12-19

Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors

 #769
20190385840
2019-12-19

Silicon compounds and methods for depositing films using same

 #770
20190385823
2019-12-19

Chemical control features in wafer process equipment

 #771
20190385820
2019-12-19

Apparatus and method for deposition and etch in gap fill

 #772
20190384181
2019-12-19

Display device having integrated metamaterial lens

 #773
20190382891
2019-12-19

METHOD AND SOLUTION FOR RESOLVING CGT MURA ISSUE

 #774
20190382885
2019-12-19

METHOD TO OBTAIN SiC CLASS OF FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

 #775
20190378730
2019-12-12

Processing method and plasma processing apparatus

 #776
20190378696
2019-12-12

APPARATUS FOR SUPPRESSING PARASITIC PLASMA IN PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION CHAMBER

 #777
20190376186
2019-12-12

PECVD apparatus for in-situ deposition of film stacks

 #778
20190376183
2019-12-12

Substrate processing chamber with showerhead having cooled faceplate

 #779
20190362939
2019-11-28

Radical deactivation component, plasma processing apparatus using the same and radical deactivation method

 #780
20190358123
2019-11-28

Blood sample collection tube

 #781
20190355575
2019-11-21

Method of manufacturing semiconductor device

 #782
20190352778
2019-11-21

Syringe with PECVD lubrication

 #783
20190345609
2019-11-14

Graphene production using plasma-enhanced chemical vapor deposition

 #784
20190344018
2019-11-14

Controlling the uniformity of PECVD deposition

 #785
20190341292
2019-11-07

Wafer positioning pedestal for semiconductor processing

 #786
20190338421
2019-11-07

Nano-coating protection method for electrical devices

 #787
20190338420
2019-11-07

PRESSURE SKEW SYSTEM FOR CONTROLLING CENTER-TO-EDGE PRESSURE CHANGE

 #788
20190338158
2019-11-07

Gas barrier film and method of producing a gas barrier film

 #789
20190337012
2019-11-07

Nano-coating protection method for electrical connectors

 #790
20190333743
2019-10-31

GAS SPRAYER FOR SUBSTRATE TREATMENT DEVICE, AND SUBSTRATE

 #791
20190328299
2019-10-31

Syringe with PECVD lubricity layer

 #792
20190326555
2019-10-24

Flexible organic-inorganic passivation layer and method of fabricating the same

 #793
20190326463
2019-10-24

Cost-efficient high power PECVD deposition for solar cells

 #794
20190326124
2019-10-24

Method for processing workpiece

 #795
20190326105
2019-10-24

Processing system and processing method

 #796
20190322826
2019-10-24

Method for preparing carbon nanotube/polymer composite

 #797
20190318925
2019-10-17

Monoorganoaminodisilane Precursors and Methods for Depositing Films Comprising Same

 #798
20190316253
2019-10-17

Forming iron nitride hard magnetic materials using chemical vapor deposition or liquid phase epitaxy

 #799
20190316250
2019-10-17

Methods to improve front-side process uniformity by back-side metallization

 #800
20190309416
2019-10-10

CHLORODISILAZANES

 #801
20190304776
2019-10-03

Substrate processing method

 #802
20190304710
2019-10-03

STRUCTURE FOR ELECTRIC ENERGY STORAGE USING CARBON NANOTUBES

 #803
20190301014
2019-10-03

Substrate processing apparatus and method

 #804
20190295837
2019-09-26

Method and apparatus for filling a gap

 #805
20190292662
2019-09-26

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

 #806
20190292661
2019-09-26

Film deposition apparatus with gas entraining openings

 #807
20190292658
2019-09-26

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTAINING FILM

 #808
20190292410
2019-09-26

Adhesive silicon oxynitride film

 #809
20190287845
2019-09-19

Support ring with plasma spray coating

 #810
20190287767
2019-09-19

Treatment unit for a facility for treating the surface of a substrate in motion, corresponding facility and method of implementation

 #811
20190284697
2019-09-19

Deposition apparatus and deposition method

 #812
20190284689
2019-09-19

Plasma Enhanced ALD System

 #813
20190284055
2019-09-19

SiH-free vinyldisilanes

 #814
20190276933
2019-09-12

Plasma polymerization coating with uniformity control

 #815
20190272989
2019-09-05

METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #816
20190271810
2019-09-05

Optical dielectric planar waveguide process

 #817
20190271075
2019-09-05

Compositions and Methods Using Same for Deposition of Silicon-Containing Films

 #818
20190264889
2019-08-29

Optical element for a motor vehicle

 #819
20190264321
2019-08-29

Fuel cell separator and coating method for fuel cell separator

 #820
20190263722
2019-08-29

Rare-earth oxide based chamber material

 #821
20190259582
2019-08-22

Semiconductor manufacturing apparatus and method of manufacturing semiconductor device

 #822
20190256467
2019-08-22

Nitrogen-containing ligands and their use in atomic layer deposition methods

 #823
20190255563
2019-08-22

Method for producing coated metallic substrates and coated metallic substrates

 #824
20190252288
2019-08-15

Semiconductor substrate

 #825
20190252159
2019-08-15

Mounting apparatus for object to be processed and processing apparatus

 #826
20190249305
2019-08-15

Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same

 #827
20190249304
2019-08-15

RESIN CONTAINER COATING DEVICE

 #828
20190244794
2019-08-08

Plasma processing apparatus

 #829
20190244792
2019-08-08

Chemical control features in wafer process equipment

 #830
20190227050
2019-07-25

Innovative nanopore sequencing technology

 #831
20190226091
2019-07-25

Active gas-generating device and film formation apparatus

 #832
20190221458
2019-07-18

Advanced temperature monitoring system and methods for semiconductor manufacture productivity

 #833
20190218665
2019-07-18

Apparatus and method for fabricating a semiconductor device

 #834
20190214627
2019-07-11

Apparatus and Method of Treating a Lithium-Ion-Battery Part

 #835
20190214519
2019-07-11

Cost-efficient high power PECVD deposition for solar cells

 #836
20190211452
2019-07-11

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION EQUIPMENT

 #837
20190211450
2019-07-11

Shower plate structure for supplying carrier and dry gas

 #838
20190203353
2019-07-04

Substrate support unit and deposition apparatus including the same

 #839
20190194808
2019-06-27

Method of decreasing visible flickering effects in a light emitting diode array operated by pulse width modulated signals

 #840
20190189437
2019-06-20

Method for processing workpiece

 #841
20190181002
2019-06-13

Method for manufacturing semiconductor device with helium-containing gas

 #842
20190180984
2019-06-13

Antenna and plasma deposition apparatus

 #843
20190177845
2019-06-13

Semiconductor Process Chamber

 #844
20190172747
2019-06-06

Modulating the microstructure of metallic interconnect structures

 #845
20190172704
2019-06-06

ROBUST HIGH PERFORMANCE LOW HYDROGEN SILICON CARBON NITRIDE (SiCNH) DIELECTRICS FOR NANO ELECTRONIC DEVICES

 #846
20190169749
2019-06-06

Display apparatus and method of manufacturing the same

 #847
20190169748
2019-06-06

Heating stage and apparatus having the same

 #848
20190169212
2019-06-06

AMINOCHLOROHYDRIDODISILANES

 #849
20190164755
2019-05-30

Method of forming amorphous silicon layer

 #850
20190161854
2019-05-30

Medical device with plasma modified oxide layer and method of forming such a device

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20190161351
2019-05-30

Nanocrystalline graphene and method of forming nanocrystalline graphene

 #852
20190160818
2019-05-30

PROCESS FOR FORMING INKJET NOZZLE CHAMBERS

 #853
20190157157
2019-05-23

Methods, apparatus and system for forming a FinFET device comprising a first portion capable of operating at a first voltage and a second portion capable of operating at a second voltage

 #854
20190157084
2019-05-23

Directional deposition for semiconductor fabrication

 #855
20190157078
2019-05-23

Methods of encapsulation

 #856
20190157076
2019-05-23

Selective growth of SiO2 on dielectric surfaces in the presence of copper

 #857
20190157049
2019-05-23

Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device

 #858
20190157038
2019-05-23

Gas spraying apparatus for substrate processing apparatus and substrate processing apparatus

 #859
20190153601
2019-05-23

Showerhead tilt mechanism

 #860
20190148416
2019-05-16

Layer stack for display applications

 #861
20190140196
2019-05-09

Method for manufacturing display substrate

 #862
20190136379
2019-05-09

Substrate treating apparatus and method

 #863
20190134663
2019-05-09

Silacyclic Compounds and Methods for Depositing Silicon-Containing Films Using Same

 #864
20190133882
2019-05-09

Coated packaging

 #865
20190131585
2019-05-02

APPARATUS OF PECVD AND MANUFACTURING METHOD OF OLED PANEL

 #866
20190131485
2019-05-02

Crystallisation of amorphous silicon from a silicon-rich aluminium substrate

 #867
20190122884
2019-04-25

Methods for plasma depositing polymers comprising cyclic siloxanes and related compositions and articles

 #868
20190122872
2019-04-25

System and method for substrate processing chambers

 #869
20190119810
2019-04-25

Method, materials and process for native oxide removal and regrowth of dielectric oxides for better biosensor performance

 #870
20190115208
2019-04-18

Polycrystalline ceramic substrate

 #871
20190115206
2019-04-18

Method of depositing thin film and method of manufacturing semiconductor device

 #872
20190112708
2019-04-18

ELECTROSTATIC CONTROL OF METAL WETTING LAYERS DURING DEPOSITION

 #873
20190108985
2019-04-11

Batch type plasma substrate processing apparatus

 #874
20190106294
2019-04-11

Pulley for an elevator with a friction reducing coating and method for manufacturing same

 #875
20190100840
2019-04-04

Plasma processing apparatus

 #876
20190097175
2019-03-28

THIN FILM ENCAPSULATION SCATTERING LAYER BY PECVD

 #877
20190097103
2019-03-28

Semiconductor continuous array layer

 #878
20190096673
2019-03-28

APPARATUS FOR FORMING A LAYER ON A SUBSTRATE AND METHOD OF FORMING AN AMORPHOUS SILICON LAYER ON A SUBSTRATE USING THE SAME

 #879
20190096640
2019-03-28

Plasma processing apparatus

 #880
20190088521
2019-03-21

System for coupling a voltage to portions of a substrate

 #881
20190088465
2019-03-21

Method for producing silicon nitride film and silicon nitride film

 #882
20190085455
2019-03-21

Substrate processing apparatus

 #883
20190078205
2019-03-14

Apparatus and method for providing a uniform flow of gas

 #884
20190074505
2019-03-07

METHOD FOR MANUFACTURING ELECTROCHEMICAL DEVICE

 #885
20190074176
2019-03-07

Oxide with higher utilization and lower cost

 #886
20190074164
2019-03-07

Reaction chamber and semiconductor processing apparatus

 #887
20190067071
2019-02-28

Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing

 #888
20190066980
2019-02-28

Ceramic Material Assembly For Use In Highly Corrosive Or Erosive Semiconductor Processing Applications

 #889
20190066882
2019-02-28

Wire-drawing method and system

 #890
20190062920
2019-02-28

Method for Producing Flexible Substrate, Flexible Substrate and Flexible Display Panel

 #891
20190062906
2019-02-28

Film forming apparatus with cover which minimizes debris in the chamber

 #892
20190058118
2019-02-21

CEM switching device

 #893
20190055648
2019-02-21

GAS SUPPLY APPARATUS

 #894
20190051568
2019-02-14

System and method for temperature control in plasma processing system

 #895
20190051511
2019-02-14

Method for depositing a silicon nitride film and film deposition apparatus

 #896
20190048469
2019-02-14

VAPOR DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS

 #897
20190048468
2019-02-14

Plasma treatment device and structure of reaction vessel for plasma treatment

 #898
20190035665
2019-01-31

Multi-zone pedestal for plasma processing

 #899
20190032214
2019-01-31

Showerhead tilt mechanism

 #900
20190024236
2019-01-24

Method for synthesising a material