Compositions and methods using same for deposition of silicon-containing film

Fabrication and application of nanofiber ribbons and sheets and twisted and non-twisted nanofiber yarns

Methods and apparatuses for increasing reactor processing batch size

Estimation of lifetime remaining for a consumable-part in a semiconductor manufacturing chamber

Hollow cathode discharge (HCD) suppressing capacitively coupled plasma electrode and gas distribution faceplate

Method of fabricating substrate for culturing stem cell

Method of making aluminum-free neopentasilane

Chemical vapor deposition during additive manufacturing

Neural interface probe employing amorphous silicon carbide

Vacuum-coating system for coating lenses

Intermediate layer formed between base material and DLC layer and film-forming method thereof

Method for producing a graphene film

Organosilane precursors for ALD/CVD silicon-containing film applications and methods of using the same

BORON FILM REMOVING METHOD, AND PATTERN FORMING METHOD AND APPARATUS USING BORON FILM

Deposition radial and edge profile tunability through independent control of TEOS flow

Remote plasma oxidation chamber

Transfer-free method for producing graphene thin film

Monopole antenna array source with gas supply or grid filter for semiconductor process equipment

Monopole antenna array source for semiconductor process equipment

Monopole antenna array source with phase shifted zones for semiconductor process equipment

Chemical vapor deposition system including ground strap bar

DIFFUSER FOR UNIFORMITY IMPROVEMENT IN DISPLAY PECVD APPLICATIONS

Epitaxial growing device and method for making epitaxial structure using the same

Wafer Edge Contact Hardware and Methods to Eliminate Deposition at Wafer Backside Edge and Notch

Polymeric surface having reduced biomolecule adhesion to thermoplastic articles of such substrate

Plasma source for rotating susceptor

High registration particles-transferring system

Device and method for vacuum coating

Wafer positioning pedestal for semiconductor processing

Laminated film

Support ring with masked edge

METHODS AND APPARATUSES FOR DEPOSITION OF ADHERENT CARBON COATINGS ON INSULATOR SURFACES

ACTIVE SWITCH ARRAY SUBSTRATE, MANUFACTURING METHOD THEREFOR, AND DISPLAY PANEL USING THE SAME

Electrode assembly

Method for depositing high deposition rate, thick tetraethyl orthosilicate film with low compressive stress, high film stability and low shrinkage

Coating method of separator for fuel cell and separator for fuel cell

Plasma-resistant member

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

Fully Dense, Fluid Tight and Low Friction Coating Systems for Dynamically Engaging Load Bearing Surfaces for High Pressure High Temperature Applications

Ultra-high temperature precipitation process for manufacturing polysilicon

Repaired Airfoil with Improved Coating System and Methods of Forming the Same

Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxide

Fabrication method for two-dimensional materials

METHOD FOR MANUFACTURING COATED SUBSTRATES, COATED SUBSTRATES, USE THEREOF, AND SYSTEMS FOR MANUFACTURING COATED SUBSTRATES

SHEET AND LAMINATE

Feature fill with nucleation inhibition

SUBSTRATE PROCESSING APPARATUS

FULLY DENSE, FLUID TIGHT AND LOW FRICTION COATING SYSTEMS FOR DYNAMICALLY ENGAGING LOAD BEARING SURFACES FOR HIGH PRESSURE HIGH TEMPERATURE APPLICATIONS

Packaging for high purity solvents

Techniques and systems for continuous-flow plasma enhanced atomic layer deposition (PEALD)

Techniques and systems for continuous-flow plasma enhanced atomic layer deposition (PEALD)

Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors

Formulation for deposition of silicon doped hafnium oxide as ferroelectric materials

BIOSENSOR USING DNA-BASED CONDUCTIVE NANOWIRE AND METHOD FOR MANUFACTURING THE SAME

Plasma resistant coating of porous body by atomic layer deposition

Plasma resistant coating of porous body by atomic layer deposition

Polymer substrate with hardcoat layer, and manufacturing method for same

Application of bottom purge to increase clean efficiency

APPARATUS FOR PROCESSING A SURFACE OF SUBSTRATE AND METHOD OPERATING THE APPARATUS

PECVD process

Modulating the microstructure of metallic interconnect structures

Reactors for plasma-assisted processes and associated methods

High throughput vacuum deposition sources and system

REMOTE PLASMA BASED DEPOSITION OF GRADED OR MULTI-LAYERED SILICON CARBIDE FILM

Systems and methods for internal surface conditioning assessment in plasma processing equipment

Multi-layer plasma resistant coating by atomic layer deposition

Piston ring and method for manufacturing same

Gas distribution apparatus for processing chambers

Self-aligned nanodots for 3D NAND flash memory

Method of manufacturing semiconductor device

Apparatus with concentric pumping for multiple pressure regimes

Item Having Optimized Adhesive Properties and Comprising a Silicon Organic Layer

Voltage-current probe for measuring radio-frequency electrical power in a high-temperature environment and method of calibrating the same

Plasma erosion resistant thin film coating for high temperature application

Method for PECVD overlay improvement

Substrate processing apparatus

Meta-optical device and method of manufacturing the same

Radical gas generation system

Techniques for filling a structure using selective surface modification

Boron doped tungsten carbide for hardmask applications

Structure for electric energy storage using carbon nanotubes

METHOD FOR PECVD DEPOSITION OF A GRAPHENE-BASED LAYER ON A SUBSTRATE

Apparatus and methods for wafer chucking on a susceptor for ALD

Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing

Wafer chuck and processing arrangement

Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity

Multi-layer plasma resistant coating by atomic layer deposition

Method and device for the surface treatment of substrates

Substrate treating apparatus and substrate treating method

Selective deposition of thin film dielectrics using surface blocking chemistry

Encapsulating film stacks for OLED applications with desired profile control

Plasma treatment apparatus

Method and apparatus for depositing a monolayer on a three dimensional structure

Method of manufacturing semiconductor device

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

LAMINATED FILM AND METHOD FOR MANUFACTURING LAMINATED FILM

Plasma distribution control

Substrate processing apparatus and method of manufacturing semiconductor device

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Plasma polymerization coating apparatus

Plasma device

Display device having integrated metamaterial lens

Conical wafer centering and holding device for semiconductor processing

Shower plate structure for exhausting deposition inhibiting gas

QUARTZ CRYSTAL MICROBALANCE UTILIZATION FOR FORELINE SOLIDS FORMATION QUANTIFICATION

Substrate processing apparatus

Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition

DEVICE FOR PRODUCING CONTINUOUS-GROWTH TYPE LARGE-AREA TRANSPARENT AND CONDUCTIVE GRAPHENE FILM

Pad raising mechanism in wafer positioning pedestal for semiconductor processing

Substrate treatment apparatus

Deposition Of Metal Films

Plasma source for a plasma CVD apparatus and a manufacturing method of an article using the plasma source

Ruthenium precursors for ALD and CVD thin film deposition and uses thereof

CEM switching device

Reducing EUV-induced material property changes

Apparatus for plasma atomic layer deposition

SHOWER HEAD AND ROLL-TO-ROLL PLASMA-PROCESSING APPARATUS INCLUDING THE SAME

LAMINATED FILM

Deposition apparatus and method for manufacturing semiconductor device using the same

Methods for processing substrates using small plasma chambers

SYSTEM INTEGRATING ATOMIC LAYER DEPOSITION AND REACTIVE ION ETCHING

Coated metal mold and method for manufacturing same

Selective inhibition in atomic layer deposition of silicon-containing films

GRAPHITE BOAT TRANSMISSION MECHANISM USED IN PECVD DEVICE

FILM FORMING APPARATUS

Low Temperature Atmospheric Pressure Atomic Layer Deposition (ALD) of Graphene on Stainless Steel Substrates as BPP Coating

Wafer positioning pedestal for semiconductor processing

PROCESSING SYSTEM

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

Methods and systems to modulate film stress

PLASMA TREATMENT WITH NON-POLYMERIZING COMPOUNDS THAT LEADS TO REDUCED DILUTE BIOMOLECULE ADHESION TO THERMOPLASTIC ARTICLES

COATING DEVICE OF COMPONENT FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND COATING METHOD THEREOF

Method and system for in situ formation of gas-phase compounds

Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity

Carrier plate for use in plasma processing systems

Use of silyl bridged alkyl compounds for dense OSG films

Precursors and flowable CVD methods for making low-k films to fill surface features

High Hardness Soft Film Structure

PECVD BOAT

Controlling the uniformity of PECVD deposition

Deposition apparatus including UV annealing unit and method for fabricating non-volatile memory device by using the deposition apparatus

Technique to prevent aluminum fluoride build up on the heater

Fuel cell separator and coating method of seperator for fuel cell separator

Film forming apparatus, cleaning method for film forming apparatus and recording medium

PARALLEL PAIR CABLE

Charge transfer roller for use in an additive deposition system and process

LOADING WORKPIECES IN A COATING SYSTEM

Carbon bridged aminosilane compounds for high growth rate silicon-containing films

Support ring with masked edge

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Method for depositing ALD films using halide-based precursors

Cobalt etch back

COMMON DEPOSITION PLATFORM, PROCESSING STATION, AND METHOD OF OPERATION THEREOF

Oxygen compatible plasma source

Remote plasma based deposition of graded or multi-layered silicon carbide film

Dual-channel showerhead with improved profile

Dual-channel showerhead with improved profile

Method of Preparing Corrosion Resistant Coatings

Film forming apparatus

HARD MASK AND MANUFACTURING METHOD THEREOF

Method of manufacturing semiconductor device

Film forming apparatus

Sputtering showerhead

Method of forming a silicon nitride film using Si—N containing precursors

Plasma processing method

Methods and apparatus for processing chamber cleaning end point detection

Systems and methods for detection of plasma instability by electrical measurement

Substrate processing apparatus

MASK ETCH FOR PATTERNING

Thick tungsten hardmask films deposition on high compressive/tensile bow wafers

Pentachlorodisilane

DISCHARGE ELECTRODE

Control system for plasma chamber having controllable valve and method of using the same

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Systems and methods for reducing effluent build-up in a pumping exhaust system

PECVD process

THIN FILM MANUFACTURING DEVICE AND THIN FILM MANUFACTURING METHOD

METHOD OF DEPOSITING THIN FILM

2,2,4,4-tetrasilylpentasilane and its compositions, methods and uses

Silicon-based deposition for semiconductor processing

Precursors and flowable CVD methods for making low-K films to fill surface features

APPARATUS FOR PLASMA PROCESSING ON OPTICAL SURFACES AND METHODS OF MANUFACTURING AND USE THEREOF

Method for manufacturing diamond-like carbon film

MANUFACTURING METHOD OF TRANSPARENT ELECTRODE

Substrate processing apparatus

Suppressing interfacial reactions by varying the wafer temperature throughout deposition

Polycrystalline ceramic substrate and method of manufacture

Film forming apparatus and gas injection member used therefor

MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE COATING WITH INTERMITTENT RESTORATION PLASMA

Rare-earth oxide based chamber material

Rare-earth oxide based chamber material

Method for manufacturing packaging comprising a container printed on directly and treated by plasma

Aluminum fluoride mitigation by plasma treatment

Method and apparatus for filling a gap

Film forming method and method of manufacturing thin film transistor

Method and apparatus for filling a gap

Method and apparatus for filling a gap

Fixture comprising magnetic means for holding rotary symmetric workpieces

Hollow cathode plasma source

Plasma Process and Reactor for the Thermochemical Treatment of the Surface of Metallic Pieces

Amorphous hydrocarbon based film, and sliding member and sliding system with said film

INDEX MATCHING LAYER IN OPTICAL APPLICATIONS

Metal component and manufacturing method thereof and process chamber having the metal component

DNA sequencing with stacked nanopores

Method of manufacturing polymer-free everolimus-eluting coronary stent fabricated by electrospinning technique

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF FORMING LITHIUM-BASED FILM BY USING THE SAME

Apparatus and method for deposition and etch in gap fill

FLEXIBLE SENSOR

Growth method of graphene

SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD

Display apparatus and method of manufacturing the same

Methods of filling a flowable material in a gap of an assembly module

Remote plasma based deposition of oxygen doped silicon carbide films

Coil filament for plasma enhanced chemical vapor deposition source

PLASMA GENERATOR APPARATUS

Showerhead curtain gas method and system for film profile modulation

Substrate temperature monitoring

Low-friction coating production method and sliding method

METHODS FOR PLASMA DEPOSITING POLYMERS COMPRISING CYCLIC SILOXANES AND RELATED COMPOSITIONS AND ARTICLES

RESIN CONTAINER AND RESIN-CONTAINER COATING APPARATUS

Method for Preparing Transparent Sheet Materials

Si—O—N—P related fabrication methods, surface treatments and uses thereof

Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor

Compositions and methods using same for deposition of silicon-containing films

Substrate processing method and substrate processing apparatus

Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching

Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces

Diffusion resistant electrostatic clamp

NON-SHADOW FRAME PLASMA PROCESSING CHAMBER

Film deposition apparatus

Compositions and methods using same for deposition of silicon-containing film

Filling a cavity in a substrate using sputtering and deposition

COMPOSITE SUBSTRATE MANUFACTURING METHOD AND COMPOSITE SUBSTRATE

Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication

Substrate processing device and substrate processing method

Adjustable side gas plenum for edge rate control in a downstream reactor

Fabrication and application of nanofiber ribbons and sheets and twisted and non-twisted nanofiber yarns

Advanced temperature control for wafer carrier in plasma processing chamber

Methods of encapsulation

METHOD TO DEPOSIT CONFORMAL AND LOW WET ETCH RATE ENCAPSULATION LAYER USING PECVD

Linear compressor and method for manufacturing a linear compressor

Selective cobalt deposition on copper surfaces

Method for separating a carbon structure from a seed structure

MANUFACTURING METHOD FOR LAMINATED BODY

Method for PECVD overlay improvement

Toroidal plasma channel with varying cross-section areas along the channel

PLASMA APPARATUS

Method and apparatus to prevent deposition rate/thickness drift, reduce particle defects and increase remote plasma system lifetime

Film forming apparatus and film forming method

Enhanced Spatial ALD Of Metals Through Controlled Precursor Mixing

Coating device and coating method

Film forming method and film forming apparatus

Systems, Devices, and/or Methods for Managing Batteries

Ultra-conformal carbon film deposition

Plasma abatement solids avoidance by use of oxygen plasma cleaning cycle

PET containers with enhanced silicon dioxide barrier coating

Formation of a layer on a semiconductor substrate

PLASMA CVD APPARATUS

Method for forming sealing film, and sealing film

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

Apparatus and method for providing a uniform flow of gas

Exhaust manifold in a CVD reactor

System and method for temperature control in plasma processing system

Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition

Decorative article and timepiece

Gas turbine in situ inflatable bladders for on-wing repair

PLASMA PROCESSING APPARATUS

Substrate support assembly with non-uniform gas flow clearance

Laminated film and flexible electronic device

PROCESS FOR MANUFACTURING A CUSTOMIZABLE MEDICAL DEVICE AND DEVICE OBTAINED BY SAID PROCESS

Durable 3D geometry conformal anti-reflection coating

Multi-zone pedestal for plasma processing

Robust high performance low hydrogen silicon carbon nitride (SiCNH) dielectrics for nano electronic devices

Robust high performance low hydrogen silicon carbon nitride (SiCNH) dielectrics for nano electronic devices

Plasma stabilization method and deposition method using the same

HEATED SUBSTRATE SUPPORT

Diamond-like coating for piston ring surfaces, piston ring and processes for preparing the same

Plasma suppression behind a showerhead through the use of increased pressure

Components such as edge rings including chemical vapor deposition (CVD) diamond coating with high purity SP3 bonds for plasma processing systems

SEMICONDUCTOR MANUFACTURING APPARATUS

FILM DEPOSITION METHOD

FLUORO POLYMER CONTACT LAYER TO CARBON NANOTUBE CHUCK

PLASMA PROCESSING APPARATUS AND PRECOATING METHOD

Electric discharge generator and power supply device of electric discharge generator

Lid assembly for a processing system to facilitate sequential deposition techniques

A PROCESS FOR PREPARATION OF A COMPOSITE LAYER OR A LAMINATE, AND PRODUCT OBTAINED THEREWITH

Chemical control features in wafer process equipment

PECVD COATED PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS

Substrate support with quadrants

Systems and methods for internal surface conditioning in plasma processing equipment

Oxide etch selectivity systems and methods

Lamination transfer films for forming antireflective structures

SUBSTRATE WITH AMORPHOUS, COVALENTLY-BONDED LAYER AND METHOD OF MAKING THE SAME

Forming iron nitride hard magnetic materials using chemical vapor deposition or liquid phase epitaxy

Water-barrier laminate

Film deposition method

Substrate processing apparatus

Film deposition method

Deposition apparatus

Dual-feed tunable plasma source