Symmetric plasma source to generate pie shaped treatment

Gas splitting by time average injection into different zones by fast gas valves

Protective layer for PECVD graphite boats

TRIBOLOGICAL SYSTEM WITH REDUCED COUNTER BODY WEAR

SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD

Etching device and etching method

Vapor deposition apparatus

Chamber component with protective coating suitable for protection against fluorine plasma

Deposition apparatus

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS FOR FORMING FILM INCLUDING AT LEAST TWO DIFFERENT ELEMENTS

Electrostatic powder feeder

SUBSTRATE PROCESSING APPARATUS

Process for producing carbon-nanotube grafted substrate

Gas barrier film

Apparatus and method for reducing substrate sliding in process chambers

Plasma processing apparatus

Film formation apparatus

ELECTROSTATIC CONTROL OF METAL WETTING LAYERS DURING DEPOSITION

Ultralight robust plate materials

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

UNIFORM WAFER TEMPERATURE ACHIEVEMENT IN UNSYMMETRIC CHAMBER ENVIRONMENT

METHOD OF FABRICATING A MICROELECTRONIC DEVICE WITH BURIED DARK LAYERS

Film deposition method and film deposition apparatus

Antistatic coatings for plastic vessels

METHOD FOR PRODUCTION OF A COMPOSITE LAYER COMPRISING A PLASTIC FOIL AND A LAYER DEPOSITED THEREON

Packaging for high purity solvents

In-situ film annealing with spatial atomic layer deposition

Plasma etching method, plasma etching device, plasma processing method, and plasma processing device

Piston ring and process for producing same

Method of processing a substrate support assembly

Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system

BAFFLE PLATE, PLASMA PROCESSING APPARATUS USING THE SAME, SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING SUBSTRATE

RUBBER-LAMINATED SEALING VALVE

Method and system for in-situ formation of intermediate reactive species

Method for manufacturing radiation window and a radiation window

Plasma processing detection indicator using inorganic substance as a color-change layer

PRE-COATED SHIELD USING IN VHF-RF PVD CHAMBERS

COATING METHOD OF SEPARATOR FOR FUEL CELL AND SEPARATOR FOR FUEL CELL

Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability

Systems and methods for detection of plasma instability by optical diagnosis

Techniques for filling a structure using selective surface modification

Systems and methods for controlling plasma instability in semiconductor fabrication

Method of producing plasma by multiple-phase alternating or pulsed electrical current

Mechanical chameleon through dynamic real-time plasmonic tuning

Electrochemically actuatable electronic component and process for producing the actuatable electronic component

Method for growing vertically oriented single-walled carbon nanotubes with the same electronic properties and for reproducing single-walled carbon nanotubes with the same electronic properties

Fabrication and application of nanofiber ribbons and sheets and twisted and non-twisted nanofiber yarns

Syringe with PECVD lubricity layer, apparatus and method for transporting a vessel to and from a PECVD processing station, and double wall plastic vessel

Material layers, semiconductor devices including the same, and methods of fabricating material layers and semiconductor devices

Member for Plasma Processing Apparatus and Plasma Processing Apparatus

Plasma CVD device and method of manufacturing magnetic recording medium

Plasma processing method and plasma processing apparatus

Counter flow mixer for process chamber

Coating for metal components, method for coating a metal component, piston for internal combustion engines and motor vehicle

Systems and methods for tilting a wafer for achieving deposition uniformity

Sliding element, internal combustion engine and process for obtaining sliding element

Nitrogen-containing ligands and their use in atomic layer deposition methods

Ultraviolet light-resistant articles and methods for making the same

Selective inhibition in atomic layer deposition of silicon-containing films

Substrate processing apparatus and methods

Silica polymer pen lithography

Methods Of Depositing Flowable Films Comprising SiO and SiN

HIGH PRODUCTIVITY PECVD TOOL FOR WAFER PROCESSING OF SEMICONDUCTOR MANUFACTURING

Semiconductor manufacturing system including deposition apparatus

Chemical vapor deposition apparatus and method for manufacturing semiconductor device using the same

METHOD FOR PREVENTING INTERFERENCE COLORS ON THINLY COATED METAL SURFACES

Method for depositing dielectric film in trenches by PEALD

Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same

Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same

ZIRCONIUM, HAFNIUM, TITANIUM PRECURSORS AND DEPOSITION OF GROUP 4 CONTAINING FILMS USING THE SAME

Polymer substrate with hard coat layer and manufacturing method for such polymer substrate

Plasma generator, annealing device, deposition crystallization apparatus and annealing process

Coated solder material and method for producing same

Trilayer coated pharmaceutical packaging

Methodology for chamber performance matching for semiconductor equipment

Purge and pumping structures arranged beneath substrate plane to reduce defects

Fabrication and application of nanofiber ribbons and sheets and twisted and non-twisted nanofiber yarns

Diffuser temperature control

Plasma CVD apparatus

APPARATUS FOR PROCESSING OF A MATERIAL ON A SUBSTRATE AND METHOD FOR MEASURING OPTICAL PROPERTIES OF A MATERIAL PROCESSED ON A SUBSTRATE

Gas mixer and semiconductor device fabricating apparatuses including the same

Method of manufacturing display device using bottom surface exposure

PROCESS FOR DEPOSITING A THIN COATING AND PRODUCT OBTAINED THEREBY

Remote fluorination of fibrous filter webs

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching

PLASMA PROCESSING APPARATUS

Laser-assisted atomic layer deposition of 2D metal chalcogenide films

GROUP 11 MONO-METALLIC PRECURSOR COMPOUNDS AND USE THEREOF IN METAL DEPOSITION

Process of preparing low dielectric constant thin film layer used in integrated circuit

Method and system for three-dimensional (3D) structure fill

Method and device for the surface treatment of substrates

Method of processing workpiece

Device for Processing Plasma with a Circulation of Process Gas in Multiple Plasmas

PLASMA-BASED PROCESSING SYSTEM AND OPERATION METHOD THEREOF

Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers

Electron microscopy specimen and method of fabrication

Method of fabricating graphene nano-mesh

METHODS OF FORMING OVERCOATS ON MAGNETIC STORAGE MEDIA AND MAGNETIC STORAGE MEDIA FORMED THEREBY

MULTIPLE CHAMBER CHEMICAL VAPOR DEPOSITION SYSTEM

Method of making a nanostructure and nanostructured articles

Apparatus and method for thin-film processing applications

MULTI-LAYER STRUCTURE HAVING GOOD UV PROTECTION AND SCRATCH PROTECTION

Injection molding processes for molding barrel and thermoplastic syringes having low axial draft angles

Plasma vapor deposited (PVD) coating process

GRAPHENE TRANSPARENT CONDUCTIVE ELECTRODE

Method for growing carbon nanotubes

Substrate processing apparatus, recording medium, and method of processing substrates

Wear detection of consumable part in semiconductor manufacturing equipment

SEMICONDUCTOR APPARATUS AND CLEANING METHOD FOR THE SEMICONDUCTOR APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUSCEPTOR AND SUBSTRATE PROCESSING APPARATUS

Techniques for low temperature direct graphene growth on glass

Packaging method with films, film package structure and display device

Metal capping process and processing platform thereof

Deposition apparatus and deposition system having the same

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

Oxide etch selectivity systems and methods

Methods of forming material layer

MAGNET ARRAY FOR PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Apparatus for depositing a thin film

ELECTRODE CONTAMINATION-PROOF DEVICE AND FILM COATING SYSTEM

METHOD FOR COATING OR FILLING A POROUS MATERIAL

Coating film-equipped glass substrate, and method for producing coating film-equipped glass substrate

COATING FILM, METHOD FOR FORMING COATING FILM, AND LIGHT-EMITTING DIODE DEVICE

PLASMA TREATMENT APPARATUS

Plasma treatment apparatus and method of plasma treating a substrate using the same

Method and apparatus to help promote contact of gas with vaporized material

Apparatus and method of manufacturing graphene film

Method for growing carbon nanotubes

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

Plasma processing apparatus having a baffle plate and a rectifying plate

PLASMA PROCESSING APPARATUS

Methods for depositing Group 13 metal or metalloid nitride films

STRUCTURE PROVIDED WITH CARBON FILM AND METHOD FOR FORMING CARBON FILM

PECVD process

SCALABLE TRIODE PECVD SOURCE AND SYSTEM

Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition

VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD, AND METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENT ELEMENT

Apparatus for depositing a layer on a substrate in a processing gas

Systems and methods for removing particles from a substrate processing chamber using RF plasma cycling and purging

Bearing device and plasma processing apparatus

Plasma processing device

Pulsed remote plasma method and system

PLASMA PROCESSING APPARATUS

Chemical Deposition Apparatus Having Conductance Control

Multi-cycle ALD process for film uniformity and thickness profile modulation

Plasma enhanced chemical vapor deposition apparatus that includes conductive mask supports

Method and system for depositing oxide on a porous component

Fabrication and application of nanofiber ribbons and sheets and twisted and non-twisted nanofiber yarns

TEMPERATURE CONTROLLED SUBSTRATE PROCESSING

Method for selectively depositing a layer on a three dimensional structure

CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TRANSISTORS

Selective removal of boron doped carbon hard mask layers

APPARATUS FOR MONITORING VACUUM ULTRAVIOLET AND PLASMA PROCESS EQUIPMENT INCLUDING THE SAME

Innovative nanopore sequencing technology

SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM

Plasma-enhanced chemical vapor deposition device and method of manufacturing display apparatus using the same

INTERNAL-COMBUSTION ENGINE CYLINDER BLOCK AND PRODUCTION METHOD THEREFOR

Internal combustion engine liner

Method of using a multi-pass vacuum coating system

Cobalt precursors

Laminate, packaging material using the same and production process for the same

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

Injector for batch processing and methods of use

Low Temperature Atmospheric Pressure Atomic Layer Deposition (ALD) of Graphene on Stainless Steel Substrates as BPP Coating

Precursor Composition for Forming Zirconium-Containing Film and Method for Forming Zirconium-Containing Film Using Same

HYBRID 200 MM/300 MM SEMICONDUCTOR PROCESSING APPARATUSES

Plasma processing apparatus and method, and method of manufacturing electronic device

PLASMA PROCESSING APPARATUS

ARC DISCHARGE APPARATUS AND PLASMA PROCESSING SYSTEM INCLUDING THE SAME

Plasma curing of PECVD HMDSO film for OLED applications

Extreme durability composite diamond film

DEPOSITION APPARATUS, APPARATUS FOR SUCCESSIVE DEPOSITION, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

SUBSTRATE-PROCESSING SYSTEM AND METHOD OF COATING CARBON-PROTECTION LAYER THEREFOR

Textured silicon liners in substrate processing systems

Grating apparatus for target phase changes

Low volume showerhead with faceplate holes for improved flow uniformity

Deposition apparatus including edge plenum showerhead assembly

Radical Reactor With Inverted Orientation

FILM FORMING METHOD AND HEAT TREATMENT APPARATUS

POINT-TO-POINT CORONA DISCHARGE IN ADMIXTURES OF INERT GAS, OXYGEN, DRY AIR, AND ACETYLENE

DESIGN AND ASSEMBLY OF GRADED-OXIDE TANTALUM POROUS FILMS FROM SIZE-SELECTED NANOPARTICLES AND DENTAL AND BIOMEDICAL IMPLANT APPLICATION THEREOF

Inhibitor plasma mediated atomic layer deposition for seamless feature fill

Substrate processing apparatus for forming film including at least two different elements

Apparatus and method for the reduction of impurities in films

Film deposition material, sealing film using the same and use thereof

Rare-earth oxide based monolithic chamber material

Rare-earth oxide based monolithic chamber material

GALVANIC PACKAGE FOR FRUITS AND VEGETABLES AND PRESERVATION METHOD

GLASS ARTICLES HAVING FILMS WITH MODERATE ADHESION, RETAINED STRENGTH AND OPTICAL TRANSMITTANCE

Vapor deposition apparatus including a blocking gas flow generation unit

Selective deposition of thin film dielectrics using surface blocking chemistry

LAMINATE FILM, ORGANIC ELECTROLUMINESCENT DEVICE, PHOTOELECTRIC CONVERSION DEVICE, AND LIQUID CRYSTAL DISPLAY

Laminated film, and method for manufacturing composite film

Fabrication and application of nanofiber ribbons and sheets and twisted and non-twisted nanofiber yarns

LAMINATE FILM AND FLEXIBLE ELECTRONIC DEVICE

Laminated film and flexible electronic device

Perovskite material layer processing

Vapor deposition device, vapor deposition method, and organic electroluminescence element manufacturing method

Vanadium-containing film forming compositions and vapor deposition of vanadium-containing films

Measuring individual layer thickness during multi-layer deposition semiconductor processing

Single platform, multiple cycle spacer deposition and etch

Method of processing target object to be processed

TANTALUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION OF TANTALUM-CONTAINING FILMS

PROCESS FOR COATING A CYLINDER OF AN INTERNAL COMBUSTION ENGINE AND ENGINE CYLINDER/LINER

GRAPHENE TAPE

Eliminating first wafer metal contamination effect in high density plasma chemical vapor deposition systems

Semiconductor processing with DC assisted RF power for improved control

PLASMA ELECTRODE, PLASMA PROCESSING ELECTRODE, CVD ELECTRODE, PLASMA CVD DEVICE, AND METHOD FOR MANUFACTURING SUBSTRATE WITH THIN FILM

Methods for coating articles

Semiconductor processing system

Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device

Mask etch for patterning

Plasma processing apparatus, plasma processing method, and recording medium

Substrate processing apparatus and substrate processing method

Device for Treating a Surface

THERMAL CHEMICAL VAPOR DEPOSITION PRODUCT AND PROCESS OF USING A THERMAL CHEMICAL VAPOR DEPOSITION PRODUCT

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

UPPER ELECTRODE, EDGE RING, AND PLASMA PROCESSING APPARATUS

Ways to generate plasma in continuous power mode for low pressure plasma processes

Preliminary treatment method for workpiece

Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma

Plasma-enhanced chemical vapor deposition (PE-CVD) apparatus and method of operating the same

Plasma enhanced ALD system

Carbon-coating-film cleaning method and device

STRUCTURE HAVING STAIN-PROOFING AMORPHOUS CARBON FILM AND METHOD OF FORMING STAIN-PROOFING AMORPHOUS CARBON FILM

SUBSTRATE PROCESSING APPARATUS

POLYOLEFINS HAVING LONG LASTING HYDROPHILIC INTERFACES

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Plasma processing device and operation method

Plasma source device and methods

Atomic layer deposition of metal phosphates and lithium silicates

SUBSTRATE HOLDER AND SUBSTRATE PROCESSING APPARATUS

Graphene manufacturing method

Forming method of intermediate layer formed between base material and DLC film, DLC film forming method, and intermediate layer formed between base material and DLC film

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Method and apparatus to minimize seam effect during TEOS oxide film deposition

PLASMA PROCESSING APPARATUS

Substrate processing method including supplying a fluorine-containing gas on a surface of a substrate

BARRIER ANODIZATION METHODS TO DEVELOP ALUMINUM OXIDE LAYER FOR PLASMA EQUIPMENT COMPONENTS

Machine and Process for building 3-Dimensional Metal and Composite Structures by Using Carbonyl and Other Gases

Fabrication and application of nanofiber ribbons and sheets and twisted and non-twisted nanofiber yarns

ATOMIC LAYER DEPOSITION DEVICE HAVING SCAN-TYPE REACTOR AND METHOD OF DEPOSITING ATOMIC LAYER USING THE SAME

Method for depositing coloured markers made from titanium oxides on medical technology products and coating system for producing coated materials

Support ring with masked edge

PTWA coating on pistons and/or cylinder heads and/or cylinder bores

Cyclic sequential processes for forming high quality thin films

Solid plasma polymer body

Systems and methods for internal surface conditioning in plasma processing equipment

Plasma processing apparatus and method for manufacturing electronic component

GAS DELIVERY APPARATUS FOR PROCESS EQUIPMENT

SEMICONDUCTOR MANUFACTURING APPARATUS

FILM FORMING DEVICE AND FILM FORMING METHOD

Semiconductor manufacturing apparatus

Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films

METHOD AND APPARATUS FOR SURFACE TREATMENT OF DISPOSABLE ROASTING PAN USING ATMOSPHERIC PLASMA, AND DISPOSABLE ROASTING PAN FABRICATED USING THE SAME METHOD

Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systems

Methods for decreasing carbon-hydrogen content of amorphous carbon hardmask films

Film forming apparatus

Semiconductor process equipment

VACUUM PROCESSING APPARATUS

Estimation of lifetime remaining for a consumable-part in a semiconductor manufacturing chamber

Apparatus for optical emission spectroscopy

APPARATUS FOR MEASURING CONTAMINATION OF PLASMA GENERATING DEVICE

Compositions of matter and methods of producing a carbonized cloth for growth of graphene nano-petals

Method of manufacturing semiconductor device for forming film including at least two different elements

METHODS OF MAKING LAMINATION TRANSFER FILMS FOR FORMING ANTIREFLECTIVE STRUCTURES

Laminate film, organic electroluminescence device, photoelectric conversion device, and liquid crystal display

Method of making 2,2,4,4-tetrasilylpentasilane

Metal deposition on substrates

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

Vapor deposition apparatus, deposition method, and method of manufacturing organic light-emitting display apparatus by using the same

Plasma processing apparatus and plasma processing method

Piston pin and method of applying an anti-seize coating on the pin

Substrate Processing Apparatus, Gas Dispersion Unit, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium

Functional film manufacturing method and functional film

Processing chamber

Isotropic atomic layer etch for silicon and germanium oxides

STRUCTURE OF ULTRAVIOLET LIGHT POLARIZATION COMPONENT AND MANUFACTURING PROCESS THEREFOR

Film deposition method

BARRIER FABRIC SUBSTRATE WITH HIGH FLEXIBILITY AND MANUFACTURING METHOD THEREOF

PLASMA PROCESSING APPARATUS AND METHOD FOR DETERMINING REPLACEMENT OF MEMBER OF PLASMA PROCESSING APPARATUS

Method and device for producing nanotips

TREATMENT OF FIBROUS MATERIALS USING ATMOSPHERIC PRESSURE PLASMA POLYMERIZATION

Method of selectively removing an anti-stiction layer on a eutectic bonding area

High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules

Low contamination chamber for surface activation

COMBINED HEAT TREAT AND THIN FILM COATING PROCESS

VAPOR DEPOSITION APPARATUS AND METHOD

SYSTEMS AND METHODS FOR PROCESSING VAPOR

ABRASION-RESISTANT OPTICAL PRODUCT WITH IMPROVED GAS PERMEABILITY

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Technique to deposit sidewall passivation for high aspect ratio cylinder etch

Filament holder for hot cathode PECVD source

Tunable magnetic field to improve uniformity

Plasma processing apparatus

SUBSTRATE PROCESSING APPARATUS