121271 ⎘
Single-crystal growth by condensing evaporated or sublimed materials Controlling or regulating
Sub-classes:IN SITU DEFECT MITIGATION IN CRYSTAL GROWTH
#2SEMICONDUCTOR WAFER PROVIDING METHOD AND SEMICONDUCTOR WAFER PROVIDING SYSTEM
#3MANAGING GROWTH OF SILICON CARBIDE CRYSTALS
#4Systems and Methods for Modifying Crystal Growth Processes
#5METHOD FOR CONTROLLED GRADED MATERIALS/ALLOYS IN MOLECULAR BEAM EPITAXY AND CHEMICAL VAPOR DEPOSITION TYPE SYSTEMS
#6METHODS, SYSTEMS, AND DEVICES FOR CONTROLLING CRYSTAL GROWTH DEVICES
#7MANAGING THE GROWTH OF SILICON CARBIDE CRYSTALS
#8Multilayer Seed for Single-Crystal Growth, Method of Producing a Multilayer Seed, Use of the Multilayer Seed in a PVT Process for Growing a Single-Crystal and PVT Process Using the Same
#9PRODUCTION METHOD FOR A BULK SIC SINGLE CRYSTAL
#10SILICON CARBIDE WAFER AND METHOD OF FORMING THE SAME
#11METHOD FOR SUPPRESSING FORMATION OF STACKING FAULT, STRUCTURE PRODUCED BY THIS METHOD, AND METHOD FOR EVALUATING AFFECTED LAYER
#12GROWTH METHOD AND GROWTH DEVICE FOR SILICON CARBIDE CRYSTAL
#13DEVICES AND METHODS FOR GROWING CRYSTALS
#14HIGH-UNIFORMITY SiC CRYSTAL, CRYSTAL BAR, SUBSTRATE AND PREPARATION METHOD THEREOF, AND SEMICONDUCTOR DEVICE
#15SILICON CARBIDE CRYSTAL GROWTH SYSTEM AND METHOD THEREOF
#16CRYSTAL GROWTH DEVICES
#17CONTROL OF BASAL PLANE DISLOCATIONS IN LARGE ALUMINUM NITRIDE CRYSTALS
#18Silicon Carbide Crystal Growth Device and Quality Control Method
#19IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS FOR SUBSTRATE PROCESSING
#20METHOD FOR ACHIEVING UNIFORM CARRIER CONCENTRATION IN EPITAXIAL LAYER, AND STRUCTURE CREATED BY MEANS OF SAID METHOD
#21SILICON CARBIDE WAFER AND METHOD OF FABRICATING THE SAME
#22PVT-method and device for producing single crystals in a safe manner with regard to the process
#23MOLYBDENUM PENTACHLORIDE CONDITIONING AND CRYSTALLINE PHASE MANIPULATION
#24SILICON CARBIDE SINGLE CRYSTAL AND MANUFACTURING METHOD OF SILICON CARBIDE SINGLE CRYSTAL
#25SINGLE CRYSTALLINE ALUMINUM NITRIDE SUBSTRATE AND OPTOELECTRONIC DEVICES MADE THEREFROM
#26Laser processing system integrated with MBE device
#27METHOD OF FABRICATING SILICON CARBIDE INGOT
#28Hierarchical Inverted/Normal Cobalt Ferrite Nano-Chessboard
#29METHOD AND SYSTEM FOR GROWING A LATTICE MATCHED, MULTILAYER, ORGANIC CRYSTAL HETEROSTRUCTURE
#30METHODS AND SYSTEMS FOR PRODUCING COMPOSITE CRYSTALS
#31CRYSTAL GROWTH DEVICE AND METHOD FOR GROWING A SEMICONDUCTOR
#32SILICON CARBIDE CRYSTALS AND SILICON CARBIDE WAFER
#33Crystal growth method and wafer
#34CRYSTAL GROWING METHOD FOR CRYSTALS
#35HIGHLY ORIENTED, SINGLE-CRYSTALLINE LOW-DIMENSIONAL NANOSTRUCTURES, METHOD OF FABRICATION AND DEVICES
#36PRODUCTION METHOD FOR AN SIC VOLUME MONOCRYSTAL OF INHOMOGENEOUS SCREW DISLOCATION DISTRIBUTION AND SIC SUBSTRATE
#37METHOD FOR GROWING CRYSTALS
#38METHODS OF DEPOSITING FILMS WITH THE SAME STOICHIOMETRIC FEATURES AS THE SOURCE MATERIAL
#39Fabrication of films having controlled stoichiometry using molecular beam epitaxy
#40Silicon carbide ingot including screw dislocations
#41Thermal control for formation and processing of aluminum nitride
#42METHOD AND APPARATUS FOR SYNCHRONOUS GROWTH OF SILICON CARBIDE CRYSTALS IN MULTIPLE CRUCIBLES
#43Manufacturing method for a group-III nitride crystal that requires a flow amount of a carrier gas supplied into a raw material chamber at a temperature increase step satisfies two relational equations (I) and (II)
#44DEVICES AND METHODS FOR GROWING CRYSTALS
#45In-situ film growth rate monitoring apparatus, systems, and methods for substrate processing
#46SILICON CARBIDE INGOT, METHOD OF PREPARING THE SAME, AND METHOD FOR PREPARING SILICON CARBIDE WAFER
#47Molecular Beam Epitaxial Growth Apparatus, Crystal Growth Method And Method For Manufacturing Light Emitter
#48NANOPOWDER CONTINUOUS PRODUCTION DEVICE FOR IMPROVING NANOPOWDER COLLECTION EFFICIENCY
#49SILICON CARBIDE INGOT MANUFACTURING METHOD AND SILICON CARBIDE INGOT MANUFACTURED THEREBY
#50SiC growth apparatus comprised of a base having a plurality of graphite plates having anisotropy of a thermal expansion coefficient and method of manufacturing a SiC crystal using the apparatus
#51Silicon carbide ingot manufacturing method and silicon carbide ingot manufactured thereby
#52Devices and methods for growing crystals
#53SILICON CARBIDE WAFER AND METHOD OF FABRICATING THE SAME
#54Silicon carbide ingot and method of fabricating the same
#55Manufacturing method of silicon carbide wafer and semiconductor structure
#56Method of manufacturing a silicon carbide ingot comprising moving a heater surrounding a reactor to induce silicon carbide raw materials to sublimate and growing the silicon carbide ingot on a seed crystal
#57Fabrication of films having controlled stoichiometry using molecular beam epitaxy
#58Large, UV-transparent aluminum nitride single crystals
#59Molecular-beam epitaxy system comprising an infrared radiation emitting heater and a thermally conductive backing plate including an infrared-absorbing coating thereon
#60Crystal growth apparatus including heater with multiple regions and crystal growth method therefor
#61Method for preparing silicon carbide wafer and silicon carbide wafer
#62Method for depositing high quality PVD films
#63Silicon carbide ingot, method of preparing the same, and method for preparing silicon carbide wafer
#64Adhesive layer of seed crystal, method for preparing a laminate using the same, and method for preparing a wafer
#65Thermal control for formation and processing of aluminum nitride
#66NITRIDE SEMICONDUCTOR ELEMENT AND NITRIDE SEMICONDUCTOR ELEMENT PRODUCTION METHOD
#67Method of synthesizing molybdenum oxychloride by reacting molybdenum oxide powder and chlorine gas and growing crystals of molybdenum oxychloride from the gaseous raw material
#68Method for manufacturing a silicon carbide single crystal by adjusting the position of a hole in a top of the growth container relative to the off angle of the silicon carbide substrate
#69Method for producing p-type 4H-SiC single crystal
#70Thermal control for formation and processing of aluminum nitride
#71Single crystal growth method which includes covering a part of a surface of a raw material for sublimation with a metal carbide powder
#72SiC single crystal manufacturing apparatus
#73Method for evaluating quality of SiC single crystal body and method for producing silicon carbide single crystal ingot using the same
#74Shielding member and single crystal growth device having the same
#75Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them
#76Silicon Carbide Single Crystal Manufacturing Device
#77Method of processing SiC single crystal and method of manufacturing SiC ingot
#78Method of manufacturing SiC ingot
#79SiC ingot and method of manufacturing SiC ingot
#80Method of manufacturing silicon carbide single crystal ingot
#81UV-transparent aluminum nitride single crystal having a diameter of 35 mm to 150 mm and a predefined UV transparency metric at a wavelength of 265 nm
#82Thermal control for formation and processing of aluminum nitride
#83SILICON CARBIDE SINGLE CRYSTAL SUBSTRATE AND PROCESS FOR PRODUCING SAME
#84SIC SINGLE CRYSTAL INGOT
#85Method for manufacturing silicon carbide single crystal
#86Molecular beam epitaxy under vector strong magnetic field and in-situ characterization apparatus thereof
#87Method for producing silicon carbide single-crystal ingot and silicon carbide single-crystal ingot
#88Device for growing monocrystalline crystal
#89Thin Film Device Fabrication Methods and Apparatus
#90System for growth of large aluminum nitride single crystals with thermal-gradient control
#91Film formation method, vacuum processing apparatus, method of manufacturing semiconductor light emitting element, semiconductor light emitting element, method of manufacturing semiconductor electronic element, semiconductor electronic element, and illuminating apparatus
#92Fabrication Method for Growing Single Crystal of Multi-Type Compound
#93Vapor deposition method and vapor deposition apparatus
#94Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them
#95Method of manufacturing silicon carbide single crystal and silicon carbide single crystal substrate
#96METHOD OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL
#97Device of manufacturing silicon carbide single crystal
#98Fabrication of semiconductor device using alternating high and low temperature layers
#99Silicon carbide single crystal substrate and process for producing same
#100Aluminum nitride bulk crystals having high transparency to untraviolet light and methods of forming them
#101Growth of large aluminum nitride single crystals with thermal-gradient control
#102PREFERRED VOLUMETRIC ENLARGEMENT OF III-NITRIDE CRYSTALS
#103Method of manufacturing silicon carbide single crystal and silicon carbide single crystal substrate
#104METHOD OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL
#105Ingot, silicon carbide substrate, and method for producing ingot
#106INGOT, SILICON CARBIDE SUBSTRATE, AND METHOD FOR PRODUCING INGOT
#107Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a supporting shelf which permits thermal expansion
#108APPARATUS FOR FABRICATING INGOT
#109APPARATUS FOR FABRICATING INGOT
#110Method for making topological insulator structure
#111Scintillator, method of fabricating the same and X-ray detector including the scintillator
#112Method for crystal growth of a metal-nonmetal compound using a metallophobic-metallophilic surfactant and a thin metal wetting layer
#113Vanadium compensated, SI SiC single crystals of NU and PI type and the crystal growth process thereof
#114Semi-insulating silicon carbide monocrystal and method of growing the same
#115Process for growing silicon carbide single crystal by physical vapor transport method and annealing silicon carbide single crystal in situ
#116Load lock having secondary isolation chamber
#117Dielectric film forming apparatus and method for forming dielectric film
#118Method for controlled growth of silicon carbide and structures produced by same
#119METHOD FOR MANUFACTURING SILICON CARBIDE CRYSTAL
#120Shield member and apparatus for growing single crystal equipped with the same
#121Method for manufacturing magnetic recording medium, and magnetic recording/reproducing apparatus
#122Solid solution inducing layer for weak epitaxy growth of non-planar phthalocyanine
#123MOLECULAR BEAM EPITAXY APPARATUS FOR PRODUCING WAFERS OF SEMICONDUCTOR MATERIAL
#124Apparatus for depositing a thin film of material on a substrate and regeneration process for such an apparatus
#125Method of manufacturing homogeneous silicon carbide single crystal with low potential of generating defects
#126Controlling an epitaxial growth process in an epitaxial reactor
#127Substrate temperature accuracy and temperature control flexibility in a molecular beam epitaxy system
#128Growth of large aluminum nitride single crystals with thermal-gradient control
#129Method and device for measuring temperature during deposition of semiconductor
#130Method for controlled growth of silicon carbide and structures produced by same
#131METHODS USING SURFACTANTS TO CONTROL UNINTENTIONAL DOPANT IN SEMICONDUCTORS
#132Method of Growing AlN Crystals, and AlN Laminate
#133Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them
#134Single-crystal silicon carbide ingot, and substrate and epitaxial wafer obtained therefrom
#135COMBINED CRYSTAL/OPTICAL ASSEMBLY AND METHOD OF ITS USE
#136Load lock having secondary isolation chamber
#137Fabrication of SiC substrates with low warp and bow
#138Production Method for a Codoped Bulk SiC Crystal and High-Impedance SiC Substrate
#139RADICAL GENERATING APPARATUS AND ZNO-BASED THIN FILM
#140SiC single crystals with reduced dislocation density grown by step-wise periodic perturbation technique
#141Control of crystal orientation and stress in sputter deposited thin films
#142PIEZOELECTRIC COMPONENT HAVING A MAGNETIC LAYER
#143AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE, METHOD OF GROWING AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE AND METHOD OF PRODUCING AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE
#144Apparatus for producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor light-emitting device, group-III nitride semiconductor light-emitting device thereof, and lamp thereof
#145Substrate temperature accuracy and temperature control flexibility in a molecular beam epitaxy system
#146Method of controlling an epitaxial growth process in an epitaxial reactor
#147Nanoparticles and method of making thereof
#148Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate
#149Device and method to producing single crystals by vapour deposition
#150SINGLE-CRYSTAL ORGANIC SEMICONDUCTOR MATERIALS AND APPROACHES THEREFOR
#151Method for growing Si-Ge semiconductor materials and devices on substrates
#152Method for producing ZnTe system compound semiconductor single crystal, ZnTe system compound semiconductor single crystal, and semiconductor device
#153Method of co-doping group 14 (4B) elements to produce ZnTe system compound semiconductor single crystal
#154Method for producing ZnTe system compound semiconductor single crystal, ZnTe system compound semiconductor single crystal, and semiconductor device
#155Method for producing ZnTe system compound semiconductor single crystal, ZnTe system compound semiconductor single crystal, and semiconductor device
#156Method for producing ZnTe system compound semiconductor single crystal, ZnTe system compound semiconductor single crystal, and semiconductor device
#157Micropipe-free silicon carbide and related method of manufacture
#158Micropipe-free silicon carbide and related method of manufacture
#159Method and apparatus for AlGan vapor phase growth
#160Columnar crystal containing light emitting element and method of manufacturing the same
#161Vapor phase growth method
#162Transparent ferromagnetic compound containing no magnetic impurity such as transition metal or rare earth metal and forming solid solution with element having imperfect shell, and method for adjusting ferromagnetic characteristics thereof
#163Semiconductor device having group III nitride buffer layer and growth layers
#164Minimizing degradation of SiC bipolar semiconductor devices
#165Unseeded silicon carbide single crystals
#166Process for manufacture of super lattice using alternating high and low temperature layers to block parasitic current path
#167USE OF SURFACTANTS TO CONTROL UNINTENTIONAL DOPANT IN SEMICONDUCTORS
#168Material evaporation chamber with differential vacuum pumping
#169Single crystal GaN substrate, method of growing single crystal GaN and method of producing single crystal GaN substrate
#170Method for producing silicon epitaxial wafer and silicon epitaxial wafer
#171Method of growing semiconductor crystal
#172Driving shaft of effusion cell for deposition system and deposition system having the same
#173Silicon carbide single crystal and method and apparatus for producing the same
#174Phosphor, manufacturing method thereof and light emitting device using the same
#175Method for manufacturing aluminum nitride single crystal
#176Metallic nanowire and method of making the same
#177Minimizing degradation of SiC bipolar semiconductor devices
#178Minimizing degradation of SiC bipolar semiconductor devices
#179Epitaxial organic layered structure and method for making
#180Molecular beam epitaxy growth apparatus and method of controlling same
#181Reducing nitrogen content in silicon carbide crystals by sublimation growth in a hydrogen-containing ambient
#182Doping-assisted defect control in compound semiconductors
#183Methods for forming superconductor articles and XRD methods for characterizing same
#184Device and method for producing single crystals by vapor deposition
#185Control of basal plane dislocations in large aluminum nitride crystals