142945 ⎘
Pumps having pertinent characteristics not provided for in, or of interest apart from, groups - for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps Regeneration of cryo-pumps
PROTECTIVE COATINGS FOR CRYOGENIC PUMP COMPONENTS IN PROCESS CHAMBERS
#2METHOD FOR REGENERATING CRYOPUMP
#3CRYOPUMP SYSTEM
#4METHOD FOR REGENERATING CRYOPUMP
#5METHOD FOR REGENERATING CRYOPUMP AND CRYOPUMP
#6CRYOPUMP SYSTEM AND REGENERATION CONTROLLER
#7CRYOPUMP AND CONTROL METHOD FOR CRYOPUMP
#8CRYOPUMP AND CRYOPUMP REGENERATION METHOD
#9MONITORING THE PERFORMANCE OF A CRYOPUMP
#10Cryopump, cryopump system, and method for starting operation of cryopump
#11Cryopump
#12Cryopump and regeneration method of cryopump
#13Cryopump and regeneration method of cryopump
#14Cryopump and regeneration method of cryopump
#15Cryopump system, and control device and regeneration method for cryopump system
#16Cryopump and control method for cryopump
#17CRYOPUMP, CRYOPUMP SYSTEM, AND CRYOPUMP REGENERATION METHOD
#18Cryopump with enhanced frontal array
#19CRYOPUMP
#20GM cryocooler and method of operating GM cryocooler
#21Ultra high vacuum cryogenic pumping apparatus with nanostructure material
#22Cryopump and gate valve
#23Device for improving the vacuum in the housing of a machine
#24Vacuum pump control device and vacuum pump
#25Cryopump
#26Cryopump, cryopumped gas amount estimation device, and cryopumped gas amount estimation method
#27Cryopump, cryopump controller, and cryopump control method
#28Cryopump and method of operating the cryopump
#29Hydraulic drive system for cryogenic pump
#30Cryopump arrangement for improved pump speed
#31Cryopump system, cryopump controller, and method for regenerating the cryopump
#32Cryopump system, cryopump controller, and cryopump regeneration method
#33Cryopump and method for regenerating the cryopump
#34Ultra high vacuum cryogenic pumping apparatus with nanostructure material
#35Cryopump and vacuum pumping method
#36Cryopump and vacuum pumping method
#37Cryopump and method for vacuum pumping non-condensable gas
#38Cryopump system, method of operating the same, and compressor unit
#39Cryopump and method for regenerating the cryopump using two-stage discharge process
#40Cold trap and mounting structure of cold trap
#41Vacuum pumping system
#42Cryopump and method for regenerating the cryopump
#43CRYOPUMP AND CRYOGENIC REFRIGERATOR
#44Cryopump and cryogenic refrigerator
#45Method and Apparatus for Providing Temperature Control to a Cryopump
#46Cryopump
#47CRYOPUMP, CRYOPUMP UNIT, VACUUM PROCESSING APPARATUS INCLUDING CRYOPUMP UNIT, AND CRYOPUMP REGENERATION METHOD
#48Integration of automated cryopump safety purge
#49Cryopump
#50Pressure burst free high capacity cryopump
#51Cryopump and regenerating method of the cryopump
#52Integration of automated cryopump safety purge
#53Rapidly regenerating cryogenic trap