144086 ⎘
Axial-flow pumps; Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps Turbomolecular vacuum pumps
Vacuum pump
#302Splinter shield for vacuum pump, and vacuum pump with the splinter shield
#303Magnetic bearing control device and exhaust pump having magnetic bearing control device
#304Vacuum pump
#305Reducing the influence of thermal expansion of connector pins on a substrate in a vacuum pump
#306Vacuum pump
#307Exhaust pump
#308Exhaust pump
#309Turbo-molecular pump
#310VACUUM PUMP
#311Processing chamber integrated pressure control
#312Vacuum pump
#313Turbo molecular pump device
#314Vacuum pump
#315High-vacuum pump
#316Turbomolecular pump device
#317Vacuum pump
#318Leak detector and process control therefor
#319Vacuum pump
#320Turbomolecular pump, and method of manufacturing rotor
#321Vacuum pump
#322Mass spectrometer system
#323Turbo Molecular Pump with Improved Blade Structures
#324Vacuum pump
#325VACUUM PUMP AND MEMBER USED FOR VACUUM PUMP
#326Turbomolecular pump and connector device therefor
#327Stator Structure of Turbo Molecular Pump and Method for Manufacturing the Same
#328Multi-inlet vacuum pump
#329Vacuum pump
#330VACUUM PUMP
#331Multi-inlet vacuum pump
#332Turbomolecular pump, and particle trap for turbomolecular pump
#333Multiple inlet vacuum pumps
#334Method of cleaning turbo pump and chamber/turbo pump clean process
#335USE OF A ROLLING-ELEMENT BEARING FOR BEARING ROTATING COMPONENTS IN VACUUM DEVICES AND VACUUM DEVICE
#336Vibration damper for vacuum pumps
#337Turbomolecular pump
#338VACUUM PUMP
#339Vacuum pump
#340Turbomolecular Pump with a Flexible Mount
#341Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
#342Stator-rotor arrangement for a vacuum pump and vacuum pump
#343Vacuum pump for differentially pumping multiple chambers
#344Vacuum pump
#345VACUUM PUMP
#346Motor driver circuit and vacuum pump having the motor driver circuit
#347Vacuum pump
#348Vacuum pumping systems
#349PUMP BEARING ARRANGEMENT
#350Turbomolecular pump
#351Method for determining the fatigue of a pump rotor of a gas turbopump
#352Vacuum pump
#353VACUUM PUMP
#354Turbo-molecular pump
#355Turbomolecular pump
#356TURBOMOLECULAR PUMP
#357RAPIDLY ROTATING VACUUM PUMP
#358TURBOMOLECULAR PUMP
#359CURRENT LEADTHROUGH FOR A VACUUM PUMP
#360Vacuum pump
#361VACUUM PUMP
#362Vacuum pump
#363Multi-stage pump rotor for a turbomolecular pump
#364Increased volumetric capacity of axial flow compressors used in turbomolecular vacuum pumps
#365Turbomolecular pump device and controlling device thereof
#366Turbomolecular pump
#367Radial turbomolecular pump with electrostatically levitated rotor
#368Vacuum pump
#369Coating for gas bearing
#370PROCESS FOR PREPARING ROTORS OR STATORS OF A TURBOMOLECULAR PUMP
#371Self Sensing Integrated System and Method for Determining the Position of a Shaft in a Magnetic Bearing
#372TURBOMOLECULAR PUMP
#373Mass spectrometer arrangement
#374Vacuum pump
#375Vacuum pump having nested chambers associated with a mass spectrometer
#376METHOD FOR DETERMINING A STATEMENT OF A STATE OF A TURBOMOLECULAR PUMP AND A TURBOMOLECULAR PUMP
#377Pumping system and method of operation
#378Vacuum pump
#379Contactless device for measuring operating parameters of rotors of high-speed rotary machines
#380Turbo vacuum pump
#381Turbo vacuum pump
#382Method for manufacturing the rotor assembly of a rotating vacuum pump
#383Vacuum pumping arrangement
#384Support for rolling bearing
#385Turbo vacuum pump
#386ROTORS OR STATORS OF A TURBOMOLECULAR PUMP
#387Vacuum pump
#388Exhaust system and exhausting pump connected to a processing chamber of a substrate processing apparatus
#389Vacuum pump with a lubricant pump
#390Turbo-molecular pump and method of assembling turbo-molecular pump
#391ROTARY APPARATUS
#392Apparatus For Treating A Gas Stream
#393Gas supply system for a pumping arrangement
#394Vacuum pump
#395Molecular pump and flange having shock absorbing member
#396Coated articles
#397Vacuum pump arrangement
#398FASTENING STRUCTURE AND ROTARY VACUUM PUMP
#399Vacuum pump
#400Production method of stator blade and turbo-molecular pump with the stator blade
#401Support device for supporting a rotor for rotation
#402Turbo-molecular pump
#403Method of cleaning turbo pump and chamber/turbo pump clean process
#404Turbo-molecular pump
#405Vacuum divider for differential pumping of a vacuum system
#406Vacuum pumps with auxiliary pumping stages
#407Device for containing catastrophic failure of a turbomolecular pump
#408Turbo-molecular pump, substrate processing apparatus, and method for suppressing attachment of depositions to turbo-molecular pump
#409Exhaust pump, communicating pipe, and exhaust system
#410Cleaning method for turbo molecular pump
#411Vacuum pump with a bearing cage having a threaded groove
#412Structure for Connecting End Parts and Vacuum System Using the Structure
#413Turbo-molecular pump and touchdown bearing device
#414Multi-stage vacuum pumping arrangement
#415Vacuum pump for differential pumping multiple chambers
#416Vacuum pump
#417Arrangement for supporting a shaft of a vacuum pump and a vacuum pump with such an arrangement
#418Vacuum pump
#419Stator vane of turbo molecular pump
#420Bearing module for a vacuum pump
#421Magnetic bearing system
#422Vacuum pump
#423Techniques for movement through gas or liquid or liquid without a velocity boundary layer
#424Turbomolecular pump system for gas separation
#425Magnetic bearing device and a turbo molecular pump with the magnetic bearing device mounted thereto
#426Compact source with very bright X-ray beam
#427Apparatus and method for pumping in an ion optical device
#428Vacuum pump
#429Vacuum pump
#430Fixing device for a vacuum pump
#431Pump apparatus for semiconductor processing
#432Wide range pressure control using turbo pump
#433Speed monitoring device
#434Vacuum evacuation device and method, and substrate processing apparatus and method
#435Turbomolecular pump with static charge control
#436Fixing structure for fixing rotor to rotor shaft, and turbo molecular pump having the fixing structure
#437Stator disc for a turbomolecular pump
#438Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
#439Vacuum pump
#440Turbomolecular vacuum pump
#441Vacuum pump
#442Foil shield for a vacuum pump with a high-speed rotor
#443Integrated high vacuum pumping system
#444Turbo pump and processing apparatus comprising the same
#445Rotary vacuum pump, vacuum device, and pump connection structure
#446Method for producing the rotor of a drag vacuum pump and a rotor produced according to this method
#447Turbomolecular pump
#448Gas friction pump
#449Molecular speed and direction selection
#450Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
#451Vacuum pump provided with vibration damper
#452Turbo molecular high-vacuum pump with a circular intake area
#453Connection element
#454Molecular pump and connecting device
#455Heat exchange technique
#456Turbomolecular pump
#457Heteroscopic turbine
#458Mass spectrometer