ClassID:

164223

G01B9/0207 - CPC Classification

Classification description:

Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers; Reduction or prevention of errors; Testing; Calibration Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer

Sub-classes:
Recent Application in this class:
#1
20260110530
2026-04-23

WHITE LIGHT INTERFEROMETER AND METHOD OF ADJUSTING INTERFERENCE OPTICAL SYSTEM

#2
20260016282
2026-01-15

OPTICAL INTERFERENCE MEASURING METHOD

#3
20250102290
2025-03-27

Optical Coherence Tomography System for Subsurface Inspection

#4
20250102289
2025-03-27

METHODS AND SYSTEMS FOR CONFOCAL FUNCTION DETERMINATION AND CORRECTION IN AN OCT IMAGING SYSTEM

#5
20250044073
2025-02-06

THIN FILM THICKNESS ADJUSTMENTS FOR THREE-DIMENSIONAL INTERFEROMETRIC MEASUREMENTS

#6
20240337478
2024-10-10

SYSTEM AND METHOD TO REDUCE MEASUREMENT ERROR IN INTERFEROMETRY-BASED METROLOGY

#7
20240271923
2024-08-15

METHOD AND SYSTEM FOR ADJUSTING A REFERENCE SECTION OF AN OCT SYSTEM

#8
20240183650
2024-06-06

OPTICAL MEASUREMENT DEVICE

#9
20240125587
2024-04-18

FILTERING FOR CO-SENSOR FUSION IN ATOMIC SENSORS

#10
20240061351
2024-02-22

AN INTERFEROMETER SYSTEM, POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A JITTER DETERMINATION METHOD, AND A DEVICE MANUFACTURING METHOD

#11
20230400745
2023-12-14

Method of measuring electro-optic characteristic of a traveling wave mach-zehnder modulator and device for same

#12
20230384083
2023-11-30

METHOD, MEASURING DEVICE, MACHINING SYSTEM AND COMPUTER PROGRAM PRODUCT FOR DETERMINING A CORRECTED HEIGHT SIGNAL FROM MEASUREMENT DATA OBTAINED WITH OPTICAL COHERENCE TOMOGRAPHY

#13
20230366667
2023-11-16

HETERODYNE GRATING INTERFEROMETRY SYSTEM BASED ON SECONDARY DIFFRACTION

#14
20230324164
2023-10-12

INTERFEROMETER SYSTEM, METHOD OF DETERMINING A MODE HOP OF A LASER SOURCE OF AN INTERFEROMETER SYSTEM, METHOD OF DETERMINING A POSITION OF A MOVABLE OBJECT, AND LITHOGRAPHIC APPARATUS

#15
20230280152
2023-09-07

LASER INTERFEROMETER

#16
20230049259
2023-02-16

In-Situ Residual Intensity Noise Measurement Method And System

#17
20220397383
2022-12-15

Self-configuration and error correction in linear photonic circuits

#18
20220316862
2022-10-06

Optical measurement system, optical measurement method, and non-transitory storage medium having measurement program stored thereon

#19
20220260359
2022-08-18

Device for measuring a substrate and method for correcting cyclic error components of an interferometer

#20
20220205775
2022-06-30

Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus

#21
20220187055
2022-06-16

Heterodyne photonic integrated circuit for absolute metrology

#22
20220049945
2022-02-17

Swept frequency photonic integrated circuit for absolute metrology

#23
20210354299
2021-11-18

External parameter calibration method for robot sensors and apparatus and robot with the same

#24
20210199418
2021-07-01

Differential sinusoidal phase modulation laser interferometric nanometer displacement measuring apparatus and method

#25
20210102802
2021-04-08

Analysis apparatus, analysis method, and interference measurement system

#26
20210102798
2021-04-08

Angle sensor with offline error correction

#27
20210025689
2021-01-28

Sinusoidal frequency sweeping interferometric absolute distance measurement apparatus and method with dynamic offset frequency locking

#28
20200400421
2020-12-24

METHODS AND APPARATUS FOR PHASE STABILIZED SWEPT-SOURCE OPTICAL COHERENCE TOMOGRAPHY (SS-OCT) INCLUDING RESCALING AND DYNAMIC RANGE ENHANCEMENT

#29
20200363555
2020-11-19

Method for compensating a magnetic locator, locator and computer program

#30
20200284572
2020-09-10

Method for improving phase stability of phase unstable optical coherence tomography

#31
20190187660
2019-06-20

Spatial accuracy correction method and apparatus

#32
20190056213
2019-02-21

Measuring a cavity by means of interference spectroscopy

#33
20190041186
2019-02-07

Measuring the position of objects in space

#34
20180364431
2018-12-20

Compact and low cost beam launcher using planar lightwave circuit

#35
20180356203
2018-12-13

Method and apparatus for motion compensation in interferometric sensing systems

#36
20180328710
2018-11-15

Dual-homodyne laser interferometric nanometer displacement measuring apparatus and method based on phase modulation

#37
20180274899
2018-09-27

Interference measurement device having a variable phase element

#38
20180113051
2018-04-26

Dispersion correction in optical frequency-domain reflectometry

#39
20180058838
2018-03-01

Method and apparatus for motion compensation in interferometric sensing systems using a non-linear compensating signal

#40
20170241763
2017-08-24

Methods and apparatus for phase stabilized swept-source optical coherence tomography (SS-OCT) including rescaling and dynamic range enhancement

#41
20170160075
2017-06-08

Position measurement with illumination profile having two diametrically opposed off-axis radiation

#42
20170138720
2017-05-18

Optical-coherence-tomography apparatus and surface-emitting laser

#43
20170023350
2017-01-26

High-speed optical coherence tomography using multiple interferometers with suppressed multiple scattering cross-talk

#44
20160370170
2016-12-22

Laser heterodyne interferometric straightness measurement apparatus and method with six DOFs determination

#45
20160320173
2016-11-03

Method of measuring a change in an optical path length using differential laser self-mixing interferometry and a differential laser self-mixing interferometry measuring system

#46
20160273904
2016-09-22

Silicon based pressure and acceleration optical interferometric sensors with housing assembly

#47
20160206195
2016-07-21

Post-processing reduction of fixed pattern artifacts and trigger jitter in swept-source optical coherence tomography

#48
20150346053
2015-12-03

Dispersion correction in optical frequency-domain reflectometry

#49
20150345931
2015-12-03

Apparatus for optical interferometric measurement and method for the same

#50
20150204651
2015-07-23

Detection of missampled interferograms in frequency domain OCT with a k-clock

#51
20150176966
2015-06-25

Digital holography three-dimensional imaging apparatus and digital holography three-dimensional imaging method

#52
20150146208
2015-05-28

Optical measuring probe and method for optically measuring inner diameters

#53
20150139451
2015-05-21

Optical sensor

#54
20150109624
2015-04-23

Position measurement with illumination profile having regions confined to peripheral portion of pupil

#55
20150107292
2015-04-23

Modular passive refrigeration container

#56
20150103356
2015-04-16

Dual beam splitter interferometer measuring 3 degrees of freedom, system and method of use

#57
20150100279
2015-04-09

Processing data from a distributed fibre-optic interferometric sensor system

#58
20150077757
2015-03-19

OPTICAL TOMOGRAPHIC IMAGE ACQUIRING DEVICE

#59
20150070710
2015-03-12

MEASUREMENT APPARATUS

#60
20150046111
2015-02-12

Laser heterodyne interferometric signal processing method based on locking edge with high frequency digital signal

#61
20150043001
2015-02-12

Spectral characteristics measurement device and spectral characteristics measurement method

#62
20140368832
2014-12-18

Interferometric determination of distance change with laser diode, high bandwidth detection and fast signal processing

#63
20140336973
2014-11-13

Method and apparatus for compensating for a time-varying disturbance in interferometric sensing systems

#64
20140168637
2014-06-19

Simultaneous refractive index and thickness measurements with a monochromatic low-coherence interferometer

#65
20140160487
2014-06-12

Real-time 3D and 4D fourier domain doppler optical coherence tomography system

#66
20140160484
2014-06-12

Distortion corrected optical coherence tomography system

#67
20140115022
2014-04-24

Program for correcting data measured by PS-OCT and PS-OCT system equipped with the program

#68
20140098375
2014-04-10

Position monitoring system with reduced noise

#69
20140092393
2014-04-03

Displacement measurement apparatus and displacement measurement method

#70
20130208968
2013-08-15

Method for reducing noise in tomographic image and recording medium having noise reducing program stored therein

#71
20130188196
2013-07-25

Lateral distortion corrected optical coherence tomography system

#72
20130148129
2013-06-13

Apparatus and method for measuring distance

#73
20130135624
2013-05-30

Frequency domain optical coherence tomography image noise reduction by subtraction of adjacent depth data

#74
20130100458
2013-04-25

Multi-wavelength interferometer, measurement apparatus, and measurement method

#75
20130063718
2013-03-14

DEVICE FOR THE OPTICAL MEASUREMENT OF A PHYSICAL PARAMETER

#76
20130033573
2013-02-07

Optical phase extraction system having phase compensation function of closed loop type and three-dimensional image extraction method thereof

#77
20130010302
2013-01-10

Systems and methods for improved balanced detection in optical coherence tomography imaging

#78
20130003038
2013-01-03

Distance measuring device and distance measuring method

#79
20120307255
2012-12-06

OPTICAL INTERFEROMETER SYSTEM WITH DAMPED VIBRATION AND NOISE EFFECT PROPERTY

#80
20120307035
2012-12-06

Single shot full-field reflection phase microscopy

#81
20120194823
2012-08-02

Spectral phase analysis for precision ranging

#82
20120116718
2012-05-10

Measurement apparatus

#83
20120113434
2012-05-10

Measurement apparatus

#84
20120099112
2012-04-26

Multi-core low reflection lateral output fiber probe

#85
20120069349
2012-03-22

Method and apparatus for measuring shape

#86
20120044500
2012-02-23

Optical interferometer

#87
20120033229
2012-02-09

Shape measuring apparatus

#88
20110279823
2011-11-17

Apparatus for measuring rotationally symmetric aspheric surface

#89
20110273719
2011-11-10

Optical imaging for optical device inspection

#90
20110267599
2011-11-03

SYSTEMS, METHODS, DEVICES, AND COMPUTER READABLE MEDIA FOR TERAHERTZ RADIATION DETECTION

#91
20110205523
2011-08-25

Compact fiber optic geometry for a counter chirp FMCW coherent laser radar

#92
20110098971
2011-04-28

Form measuring device and method of aligning form data

#93
20110043819
2011-02-24

Laser gauge interferometer

#94
20100268499
2010-10-21

Interferometer system and method for its operation

#95
20100259761
2010-10-14

Robust Long Wire Resistance Thermometer

#96
20100225924
2010-09-09

Optical interference measuring apparatus

#97
20100128279
2010-05-27

Scanning microscope using heterodyne interferometer

#98
20100110444
2010-05-06

Interferometric distance measurement with harmonic frequency comb generated beams

#99
20100085574
2010-04-08

Length measuring apparatus

#100
20100027026
2010-02-04

Displacement measuring instrument and displacement measuring method

#101
20090257067
2009-10-15

Dynamic Air Turbulence Compensation for Laser Measurement Apparatus

#102
20080204698
2008-08-28

Phase noise compensation for interferometric absolute rangefinders

#103
20080180694
2008-07-31

Scanning interferometry for thin film thickness and surface measurements

#104
20080180689
2008-07-31

Interferometric Height Measurement

#105
20080180687
2008-07-31

Interferometric height measurement

#106
20080144042
2008-06-19

Stage apparatus, control system, exposure apparatus, and device manufacturing method

#107
20080111996
2008-05-15

Three-dimensional shape measuring method and apparatus

#108
20080109178
2008-05-08

Method and system for predicting and correcting signal fluctuations of an interferometric measuring apparatus

#109
20080062405
2008-03-13

Compensation of effects of atmospheric perturbations in optical metrology

#110
20070171426
2007-07-26

Low non-linear error displacement measuring interferometer

#111
20070046951
2007-03-01

Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometry

#112
20070008547
2007-01-11

Cyclic error compensation in interferometry systems

#113
20060279743
2006-12-14

Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one direction

#114
20060262291
2006-11-23

Dynamic reference plane compensation

#115
20060256346
2006-11-16

Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers

#116
20060250619
2006-11-09

Method and system for interferometric height measurement

#117
20060187464
2006-08-24

Interferometry systems and methods of using interferometry systems

#118
20060119857
2006-06-08

Method and apparatus for monitoring an interferometer

#119
20060114468
2006-06-01

Interferometer system, signal processing method in interferometer system, and stage using signal processing

#120
20060072119
2006-04-06

Error correction in interferometry systems

#121
20050237535
2005-10-27

Vibration resistant interferometry

#122
20050237534
2005-10-27

Vibration resistant interferometry

#123
20050168752
2005-08-04

Waveguide-based optical interferometer

#124
20050166118
2005-07-28

Cyclic error compensation in interferometry systems

#125
20050088663
2005-04-28

Scanning interferometry for thin film thickness and surface measurements

#126
20050088660
2005-04-28

Downhole optical sensor system with reference

#127
20050083531
2005-04-21

Calibration and error correction in multi-channel imaging

#128
20050002040
2005-01-06

Lithographic apparatus, device manufacturing method, and computer program

#129
18473224
2024-09-10

Optical coherence tomography system for subsurface inspection

#130
16990133
2022-01-11

Heterodyne photonic integrated circuit for absolute metrology