164223 ⎘
Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers; Reduction or prevention of errors; Testing; Calibration Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
Sub-classes:WHITE LIGHT INTERFEROMETER AND METHOD OF ADJUSTING INTERFERENCE OPTICAL SYSTEM
#2OPTICAL INTERFERENCE MEASURING METHOD
#3Optical Coherence Tomography System for Subsurface Inspection
#4METHODS AND SYSTEMS FOR CONFOCAL FUNCTION DETERMINATION AND CORRECTION IN AN OCT IMAGING SYSTEM
#5THIN FILM THICKNESS ADJUSTMENTS FOR THREE-DIMENSIONAL INTERFEROMETRIC MEASUREMENTS
#6SYSTEM AND METHOD TO REDUCE MEASUREMENT ERROR IN INTERFEROMETRY-BASED METROLOGY
#7METHOD AND SYSTEM FOR ADJUSTING A REFERENCE SECTION OF AN OCT SYSTEM
#8OPTICAL MEASUREMENT DEVICE
#9FILTERING FOR CO-SENSOR FUSION IN ATOMIC SENSORS
#10AN INTERFEROMETER SYSTEM, POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A JITTER DETERMINATION METHOD, AND A DEVICE MANUFACTURING METHOD
#11Method of measuring electro-optic characteristic of a traveling wave mach-zehnder modulator and device for same
#12METHOD, MEASURING DEVICE, MACHINING SYSTEM AND COMPUTER PROGRAM PRODUCT FOR DETERMINING A CORRECTED HEIGHT SIGNAL FROM MEASUREMENT DATA OBTAINED WITH OPTICAL COHERENCE TOMOGRAPHY
#13HETERODYNE GRATING INTERFEROMETRY SYSTEM BASED ON SECONDARY DIFFRACTION
#14INTERFEROMETER SYSTEM, METHOD OF DETERMINING A MODE HOP OF A LASER SOURCE OF AN INTERFEROMETER SYSTEM, METHOD OF DETERMINING A POSITION OF A MOVABLE OBJECT, AND LITHOGRAPHIC APPARATUS
#15LASER INTERFEROMETER
#16In-Situ Residual Intensity Noise Measurement Method And System
#17Self-configuration and error correction in linear photonic circuits
#18Optical measurement system, optical measurement method, and non-transitory storage medium having measurement program stored thereon
#19Device for measuring a substrate and method for correcting cyclic error components of an interferometer
#20Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus
#21Heterodyne photonic integrated circuit for absolute metrology
#22Swept frequency photonic integrated circuit for absolute metrology
#23External parameter calibration method for robot sensors and apparatus and robot with the same
#24Differential sinusoidal phase modulation laser interferometric nanometer displacement measuring apparatus and method
#25Analysis apparatus, analysis method, and interference measurement system
#26Angle sensor with offline error correction
#27Sinusoidal frequency sweeping interferometric absolute distance measurement apparatus and method with dynamic offset frequency locking
#28METHODS AND APPARATUS FOR PHASE STABILIZED SWEPT-SOURCE OPTICAL COHERENCE TOMOGRAPHY (SS-OCT) INCLUDING RESCALING AND DYNAMIC RANGE ENHANCEMENT
#29Method for compensating a magnetic locator, locator and computer program
#30Method for improving phase stability of phase unstable optical coherence tomography
#31Spatial accuracy correction method and apparatus
#32Measuring a cavity by means of interference spectroscopy
#33Measuring the position of objects in space
#34Compact and low cost beam launcher using planar lightwave circuit
#35Method and apparatus for motion compensation in interferometric sensing systems
#36Dual-homodyne laser interferometric nanometer displacement measuring apparatus and method based on phase modulation
#37Interference measurement device having a variable phase element
#38Dispersion correction in optical frequency-domain reflectometry
#39Method and apparatus for motion compensation in interferometric sensing systems using a non-linear compensating signal
#40Methods and apparatus for phase stabilized swept-source optical coherence tomography (SS-OCT) including rescaling and dynamic range enhancement
#41Position measurement with illumination profile having two diametrically opposed off-axis radiation
#42Optical-coherence-tomography apparatus and surface-emitting laser
#43High-speed optical coherence tomography using multiple interferometers with suppressed multiple scattering cross-talk
#44Laser heterodyne interferometric straightness measurement apparatus and method with six DOFs determination
#45Method of measuring a change in an optical path length using differential laser self-mixing interferometry and a differential laser self-mixing interferometry measuring system
#46Silicon based pressure and acceleration optical interferometric sensors with housing assembly
#47Post-processing reduction of fixed pattern artifacts and trigger jitter in swept-source optical coherence tomography
#48Dispersion correction in optical frequency-domain reflectometry
#49Apparatus for optical interferometric measurement and method for the same
#50Detection of missampled interferograms in frequency domain OCT with a k-clock
#51Digital holography three-dimensional imaging apparatus and digital holography three-dimensional imaging method
#52Optical measuring probe and method for optically measuring inner diameters
#53Optical sensor
#54Position measurement with illumination profile having regions confined to peripheral portion of pupil
#55Modular passive refrigeration container
#56Dual beam splitter interferometer measuring 3 degrees of freedom, system and method of use
#57Processing data from a distributed fibre-optic interferometric sensor system
#58OPTICAL TOMOGRAPHIC IMAGE ACQUIRING DEVICE
#59MEASUREMENT APPARATUS
#60Laser heterodyne interferometric signal processing method based on locking edge with high frequency digital signal
#61Spectral characteristics measurement device and spectral characteristics measurement method
#62Interferometric determination of distance change with laser diode, high bandwidth detection and fast signal processing
#63Method and apparatus for compensating for a time-varying disturbance in interferometric sensing systems
#64Simultaneous refractive index and thickness measurements with a monochromatic low-coherence interferometer
#65Real-time 3D and 4D fourier domain doppler optical coherence tomography system
#66Distortion corrected optical coherence tomography system
#67Program for correcting data measured by PS-OCT and PS-OCT system equipped with the program
#68Position monitoring system with reduced noise
#69Displacement measurement apparatus and displacement measurement method
#70Method for reducing noise in tomographic image and recording medium having noise reducing program stored therein
#71Lateral distortion corrected optical coherence tomography system
#72Apparatus and method for measuring distance
#73Frequency domain optical coherence tomography image noise reduction by subtraction of adjacent depth data
#74Multi-wavelength interferometer, measurement apparatus, and measurement method
#75DEVICE FOR THE OPTICAL MEASUREMENT OF A PHYSICAL PARAMETER
#76Optical phase extraction system having phase compensation function of closed loop type and three-dimensional image extraction method thereof
#77Systems and methods for improved balanced detection in optical coherence tomography imaging
#78Distance measuring device and distance measuring method
#79OPTICAL INTERFEROMETER SYSTEM WITH DAMPED VIBRATION AND NOISE EFFECT PROPERTY
#80Single shot full-field reflection phase microscopy
#81Spectral phase analysis for precision ranging
#82Measurement apparatus
#83Measurement apparatus
#84Multi-core low reflection lateral output fiber probe
#85Method and apparatus for measuring shape
#86Optical interferometer
#87Shape measuring apparatus
#88Apparatus for measuring rotationally symmetric aspheric surface
#89Optical imaging for optical device inspection
#90SYSTEMS, METHODS, DEVICES, AND COMPUTER READABLE MEDIA FOR TERAHERTZ RADIATION DETECTION
#91Compact fiber optic geometry for a counter chirp FMCW coherent laser radar
#92Form measuring device and method of aligning form data
#93Laser gauge interferometer
#94Interferometer system and method for its operation
#95Robust Long Wire Resistance Thermometer
#96Optical interference measuring apparatus
#97Scanning microscope using heterodyne interferometer
#98Interferometric distance measurement with harmonic frequency comb generated beams
#99Length measuring apparatus
#100Displacement measuring instrument and displacement measuring method
#101Dynamic Air Turbulence Compensation for Laser Measurement Apparatus
#102Phase noise compensation for interferometric absolute rangefinders
#103Scanning interferometry for thin film thickness and surface measurements
#104Interferometric Height Measurement
#105Interferometric height measurement
#106Stage apparatus, control system, exposure apparatus, and device manufacturing method
#107Three-dimensional shape measuring method and apparatus
#108Method and system for predicting and correcting signal fluctuations of an interferometric measuring apparatus
#109Compensation of effects of atmospheric perturbations in optical metrology
#110Low non-linear error displacement measuring interferometer
#111Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometry
#112Cyclic error compensation in interferometry systems
#113Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one direction
#114Dynamic reference plane compensation
#115Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers
#116Method and system for interferometric height measurement
#117Interferometry systems and methods of using interferometry systems
#118Method and apparatus for monitoring an interferometer
#119Interferometer system, signal processing method in interferometer system, and stage using signal processing
#120Error correction in interferometry systems
#121Vibration resistant interferometry
#122Vibration resistant interferometry
#123Waveguide-based optical interferometer
#124Cyclic error compensation in interferometry systems
#125Scanning interferometry for thin film thickness and surface measurements
#126Downhole optical sensor system with reference
#127Calibration and error correction in multi-channel imaging
#128Lithographic apparatus, device manufacturing method, and computer program
#129Optical coherence tomography system for subsurface inspection
#130Heterodyne photonic integrated circuit for absolute metrology