164224 ⎘
Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers; Reduction or prevention of errors; Testing; Calibration; Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by measuring path difference independently from interferometer
System and method for correcting optical path length measurement errors
#2Thickness evaluation method of cell sheet
#3Automatic calibration optical interferometer and automatic calibration method of optical interferometer
#4Position measurement system, zeroing method, lithographic apparatus and device manufacturing method
#5Optical coherence tomographic device comprising dual correction beams of different path lengths
#6Spatial accuracy correction method and apparatus
#7Spatial accuracy correction method and apparatus
#8Method and system for calculating a height map of a surface of an object from an image stack in scanning optical 2.5D profiling of the surface by an optical system
#9MEASUREMENT APPARATUS FOR MEASURING SHAPE OF TARGET OBJECT, SYSTEM AND MANUFACTURING METHOD
#10Swept-source optical coherence tomography (SS-OCT) phase stabilization with reference signal calibration
#11Optical coherence tomography microscopy apparatus and method for detecting a three-dimensional image of an object
#12Self calibration for mirror positioning in optical MEMS interferometers
#13Profilometer with partial coherence interferometer adapted for avoiding measurements straddling a null position
#14Self calibration for mirror positioning in optical MEMS interferometers
#15Systems and methods for phase measurements
#16Grazing incidence interferometer
#17OPTICAL INTERFEROMETER
#18Method for measuring wear rate
#19Technique to determine mirror position in optical interferometers
#20Apparatus for measurement of the axial length of an eye
#21Interference measuring device
#22Systems and methods for phase measurements
#23System and method for optical coherence tomography
#24Apparatus for measurement of the axial length of an eye
#25Surface characteristic determining apparatus
#26Colorimetric three-dimensional microscopy
#27Position-measuring device for determining the position of two objects movable with respect to each other along a measuring direction, and method for forming a reference pulse for such a position-measuring device
#28Systems and methods for phase measurements
#29Systems and methods for phase measurements