171080 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
Sub-classes:MEMS STRAIN SENSITIVITY CALIBRATION
#2ACCELERATION-MEASURING SENSOR ASSEMBLY COMPRISING AN ACCELEROMETER SUBASSEMBLY WITH THREE MEASUREMENT AXES, AND A SEISMIC MASS MOVING IN A STRAIGHT LINE ALONG A PRINCIPAL AXIS A, WHICH ASSEMBLY IS MOUNTED IN A HOUSING AND CONFIGURED TO DETERMINE AN ACCELERATION ALONG A MEASUREMENT AXIS Y
#3Microelectromechanical accelerometer device
#4MEMS proof mass with split Z-axis portions
#5MEMS proof mass with split z-axis portions
#6Micromechanical system