171082 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
METHOD OF FORMING MICRO-ELECTROMECHANICAL SYSTEM DEVICE
#2FORCE SENSOR WITH AN INCREASED OPERATING RANGE
#3SENSOR AND ELECTRONIC DEVICE
#4METHOD OF FABRICATING MICRO-ELECTROMECHANICAL SYSTEM DEVICE
#5Resonantly vibrating accelerometer driven in multiple vibrational modes
#6Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes
#7Resonantly vibrating accelerometer with cross-coupling signal suppression
#8Highly sensitive resonant force sensor with a test body and at least one resonant element decoupled and each disposed in a suitable environment
#9Inertial sensor and inertial measurement unit
#10Sensor and electronic device
#11MICRO-ELECTROMECHANICAL SYSTEM DEVICE AND METHOD OF FORMING THE SAME
#12Micro-electromechanical system device and method of forming the same
#13Multilayer excitation ring
#14EFFECTIVE ACCELEROMETER HAVING A REDUCED SIZE
#15Accelerometric sensor in mems technology having high accuracy and low sensitivity to temperature and ageing
#16Damped linear accerelometer
#17Piezoresistive detection resonant device in particular with large vibration amplitude
#18Micromechanical structure for an acceleration sensor
#19MEMS sensor
#20Integrated piezoelectric sensor for detecting in-plane forces, such as shocks, accelerations, rotational forces
#21MEMS sensor and a semiconductor package
#22In-plane vibrating beam accelerometer
#23Accelerometer with strain compensation
#24In-plane piezoresistive detection sensor
#25Micro-electromechanical device comprising a mobile mass that can move out-of-plane
#26Acceleration measuring apparatus
#27In-plane piezoresistive detection sensor
#28Acceleration sensor
#29Micromechanical sensor with multiple spring bars
#30Low Cost Optical Accelerometer
#31Acceleration sensor
#32Micromechanical component and method for operating a micromechanical component
#33Micromechanical structure comprising a mobile part having stops for out-of plane displacements of the structure and its production process
#34Flexure assemblies and methods for manufacturing and using the same
#35Method of epitaxially growing piezoresistors
#36INERTIA FORCE SENSOR
#37Inertia force sensor and composite sensor for detecting inertia force
#38INERTIAL SENSOR AND INERTIAL DETECTING DEVICE
#39Device sensitive to a movement comprising at least one transistor
#40Semiconductor mechanical sensor
#41Semiconductor mechanical sensor
#42Accelerometer with reduced extraneous vibrations owing to improved electrode shape
#43Silicon inertial sensors formed using MEMS
#44Single-mask fabrication process for linear and angular piezoresistive accelerometers
#45Silicon inertial sensors formed using MEMS
#46Pendulous in-plane MEMS accelerometer device
#47Capacitance type acceleration sensor
#48Method for manufacturing a silicon sensor and a silicon sensor
#49Semiconductor mechanical sensor
#50Semiconductor mechanical sensor
#51Semiconductor mechanical sensor