ClassID:

171149

G01Q30/02 - CPC Classification

Classification description:

Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope

Sub-classes:
Recent Application in this class:
#1
20260045445
2026-02-12

CONDUCTIVE FIXATION FOR ELECTRON MICROSCOPY

#2
20250251420
2025-08-07

METHOD FOR INSPECTING SEMICONDUCTOR MANUFACTURING EQUIPMENT USING A WAFER

#3
20250244358
2025-07-31

Method And Device For Localizing Charge Traps In A Crystal Lattice

#4
20250237600
2025-07-24

PHOTOTHERMAL IMAGING DEVICE AND SYSTEM

#5
20250155471
2025-05-15

TECHNOLOGIES FOR PHOTOTHERMAL ACTION-BASED TWO-DIMENSIONAL INFRARED SPECTROSCOPY WITH HIGH SPATIAL RESOLUTION

#6
20250138047
2025-05-01

SCANNING PROBE MICROSCOPE AND SAMPLE USED THEREIN

#7
20250069843
2025-02-27

Detection of Probabilistic Process Windows

#8
20240361351
2024-10-31

METHODS FOR FEEDBACK DETECTION OF A MEMS ARRAY

#9
20240312757
2024-09-19

SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS AND THEIR USE FOR PROCESS MONITORING AND CONTROL

#10
20240280606
2024-08-22

DETECTION PROBE, PROBE MICROSCOPE, AND SAMPLE TEMPERATURE MEASURING METHOD

#11
20240280605
2024-08-22

MEASUREMENT SYSTEM AND PROBE TIP LANDING METHOD

#12
20240258066
2024-08-01

Method of Dispositioning and Control of a Semiconductor Manufacturing Process

#13
20240168053
2024-05-23

Nano-Mechanical Infrared Spectroscopy System and Method Using Gated Peak Force IR

#14
20230358782
2023-11-09

Nano robotic system for high throughput single cell DNA sequencing

#15
20230326711
2023-10-12

SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS

#16
20230236221
2023-07-27

Sample, method for manufacturing sample, and method for measuring infrared absorption spectrum

#17
20230160817
2023-05-25

Photothermal imaging device and system

#18
20230134093
2023-05-04

SYSTEM AND METHOD FOR DETERMINING AND/OR PREDICTING UNBIASED PARAMETERS ASSOCIATED WITH SEMICONDUCTOR MEASUREMENTS

#19
20230003762
2023-01-05

DEVICE AND METHOD FOR COMPREHENSIVE CHARACTERIZATION, ANALYSIS, HETERO-GENITY AND PURITY QUANTIFICATION OF EXTRACELLULAR VESICLES

#20
20220244290
2022-08-04

Method for electrically examining electronic components of an integrated circuit

#21
20220214254
2022-07-07

Thermal desorbers

#22
20220206039
2022-06-30

Method and apparatus for identifying sample position in atomic force microscope

#23
20220178965
2022-06-09

Apparatus and method for examining and/or processing a sample

#24
20220163560
2022-05-26

Multifunctional nanoprobes for scanning probe microscopy

#25
20220163559
2022-05-26

Active bimodal AFM operation for measurements of optical interaction

#26
20220146947
2022-05-12

System and method for generating and analyzing roughness measurements and their use for process monitoring and control

#27
20220107340
2022-04-07

Method and apparatus for examining a measuring tip of a scanning probe microscope

#28
20220074968
2022-03-10

Scanning probe microscope with a sample holder fed with electromagnetic wave signals

#29
20220068594
2022-03-03

Detection of probabilistic process windows

#30
20210389345
2021-12-16

Frequency tracking for subsurface atomic force microscopy

#31
20210341385
2021-11-04

System for measuring the absorption of a laser emission by a sample

#32
20210327675
2021-10-21

System and method for generating and analyzing roughness measurements

#33
20210225609
2021-07-22

System and method for predicting stochastic-aware process window and yield and their use for process monitoring and control

#34
20210202204
2021-07-01

System and method for low-noise edge detection and its use for process monitoring and control

#35
20210165019
2021-06-03

Method and apparatus for resolution and sensitivity enhanced atomic force microscope based infrared spectroscopy

#36
20210142977
2021-05-13

System and method for generating and analyzing roughness measurements and their use for process monitoring and control

#37
20210125809
2021-04-29

Method for SEM-guided AFM scan with dynamically varied scan speed

#38
20210109126
2021-04-15

Apparatus and method for examining and/or processing a sample

#39
20210082658
2021-03-18

System and method for generating and analyzing roughness measurements and their use for process monitoring and control

#40
20210066027
2021-03-04

System and method for generating and analyzing roughness measurements and their use for process monitoring and control

#41
20210018409
2021-01-21

Thermal desorbers

#42
20210003504
2021-01-07

Photothermal imaging device and system

#43
20200373121
2020-11-26

Conductive fixation for electron microscopy

#44
20200309815
2020-10-01

Device integrated with scanning probe for optical nanofocusing and near-field optical imaging

#45
20200217874
2020-07-09

Surface sensitive atomic force microscope based infrared spectroscopy

#46
20200211813
2020-07-02

System and method for generating and analyzing roughness measurements

#47
20200141972
2020-05-07

Method and apparatus for examining a measuring tip of a scanning probe microscope

#48
20200141971
2020-05-07

Multi-axis positioning device

#49
20200081033
2020-03-12

Method for moving and transferring nanowires using tapered hair of diameter on micron range

#50
20200049735
2020-02-13

Frequency modulation detection for photo induced force microscopy

#51
20200006035
2020-01-02

Methods and apparatus for high throughput SEM and AFM for characterization of nanostructured surfaces

#52
20190391177
2019-12-26

Method and apparatus for resolution and sensitivity enhanced atomic force microscope based infrared spectroscopy

#53
20190293681
2019-09-26

Scanning probe microscope and scanning method using the same

#54
20190250524
2019-08-15

Alignment system and method

#55
20190180977
2019-06-13

System and method for generating and analyzing roughness measurements

#56
20190180976
2019-06-13

System and method for generating and analyzing roughness measurements

#57
20190164303
2019-05-30

System and method for generating and analyzing roughness measurements

#58
20190107556
2019-04-11

Conical nano-carbon material functionalized needle tip and preparation method therefor

#59
20190086203
2019-03-21

Method and apparatus for measuring a size of a crystal grain, and method for fabricating a poly-silicon thin film

#60
20190064209
2019-02-28

Tunnel current control apparatus and tunnel current control method

#61
20190049486
2019-02-14

Characterizing a height profile of a sample by side view imaging

#62
20190041185
2019-02-07

SNOM device using heterodyne detection

#63
20190035601
2019-01-31

Methods and devices for examining an electrically charged specimen surface

#64
20190035136
2019-01-31

Apparatus and method for generating three-dimensional image of polymer solute substance which exists in liquid solvent

#65
20180339912
2018-11-29

Rare earth nitride structure or device and fabrication method

#66
20180330918
2018-11-15

Methods and apparatus for high throughput SEM and AFM for characterization of nanostructured surfaces

#67
20180321481
2018-11-08

Microscope comprising a movable objective-camera system with rolling shutter camera sensor and a multi-color strobe flash and method for scanning microscope slides with proper focus

#68
20180275164
2018-09-27

Method of carrier profiling in semiconductors

#69
20180272523
2018-09-27

Linked micromechanical positioning apparatus for real-time testing and measurement

#70
20180259553
2018-09-13

Method and apparatus for infrared scanning near-field optical microscopy based on photothermal effect

#71
20180246032
2018-08-30

Photothermal imaging device and system

#72
20180180642
2018-06-28

Method and apparatus for sub-diffraction infrared imaging and spectroscopy and complementary techniques

#73
20180143221
2018-05-24

Imaging a gap between sample and probe of a scanning probe microscope in a substantially horizontal side view

#74
20180120344
2018-05-03

Method and apparatus for resolution and sensitivity enhanced atomic force microscope based infrared spectroscopy

#75
20180120219
2018-05-03

Imaging systems and methods using fluorescent nanodiamonds

#76
20180106831
2018-04-19

METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN EUV PHOTOMASK

#77
20180106715
2018-04-19

Peakforce photothermal-based detection of IR nanoabsorption

#78
20180059137
2018-03-01

Method and apparatus for chemical and optical imaging with a broadband source

#79
20180052186
2018-02-22

Infrared characterization of a sample using oscillating mode

#80
20180003735
2018-01-04

Tip enhanced laser assisted sample transfer for biomolecule mass spectrometry

#81
20170199220
2017-07-13

Systems and devices for non-destructive surface chemical analysis of samples

#82
20170193400
2017-07-06

Accelerated training of a machine learning based model for semiconductor applications

#83
20170169989
2017-06-15

Sample holder for scanning electron microscopy (SEM) and atomic force microscopy (AFM)

#84
20170169558
2017-06-15

3D profiling system of semiconductor chip and method for operating the same

#85
20170138982
2017-05-18

Method of measuring a topographic profile and/or a topographic image

#86
20170062180
2017-03-02

Methods and devices for examining an electrically charged specimen surface

#87
20170052111
2017-02-23

PeakForce photothermal-based detection of IR nanoabsorption

#88
20160341763
2016-11-24

Apparatus and method for examining a surface of a mask

#89
20160003868
2016-01-07

Method and apparatus for infrared scattering scanning near-field optical microscopy

#90
20160003866
2016-01-07

Microscope having a multimode local probe, tip-enhanced raman microscope, and method for controlling the distance between the local probe and the sample

#91
20150377921
2015-12-31

Through process flow intra-chip and inter-chip electrical analysis and process control using in-line nanoprobing

#92
20150362524
2015-12-17

Determining a state of a high aspect ratio hole using measurement results from an electrostatic measurement device

#93
20150338439
2015-11-26

Systems and methods for non-destructive surface chemical analysis of samples

#94
20150308947
2015-10-29

Method to obtain absorption spectra from near-field infrared scattering using homo-dyne detection

#95
20150276559
2015-10-01

High heating rate thermal desorption for molecular surface sampling

#96
20150253353
2015-09-10

Fabrication of a malleable lamella for correlative atomic-resolution tomographic analyses

#97
20150253248
2015-09-10

Method and apparatus for direct measurement of the amplitude and/or phase of a molecular vibration

#98
20150241468
2015-08-27

Method and apparatus for automated scanning probe microscopy

#99
20150213172
2015-07-30

Method for measuring and analyzing surface structure of chip or wafer

#100
20150177275
2015-06-25

Scanning probe microscope and measuring method using same

#101
20150169997
2015-06-18

Apparatus and method for correlating images of a photolithographic mask

#102
20150168444
2015-06-18

Probe-based data collection system with adaptive mode of probing

#103
20150082498
2015-03-19

Scanning probe microscope with improved feature location capabilities

#104
20150067932
2015-03-05

AFM-coupled microscale radiofrequency probe for magnetic resonance imaging and spectroscopy

#105
20150062561
2015-03-05

Stress analysis of 3-D structures using tip-enhanced Raman scattering technology

#106
20150028210
2015-01-29

Tuning-fork based near field probe for spectral measurement, near-field microscope using the same, and spectral analysis method using near-field microscope

#107
20140326707
2014-11-06

Probe tip heating assembly

#108
20140238155
2014-08-28

Systems and methods for laser assisted sample transfer to solution for chemical analysis

#109
20140237690
2014-08-21

AFM-coupled microscale radiofrequency probe for magnetic resonance imaging and spectroscopy

#110
20140223616
2014-08-07

Apparatus of analyzing a sample and a method for the same

#111
20140165236
2014-06-12

Method and apparatus for analyzing and for removing a defect of an EUV photomask

#112
20140130212
2014-05-08

Substrate measurement apparatus with electron distortion unit

#113
20140027512
2014-01-30

Apparatus and method for investigating an object

#114
20140014507
2014-01-16

Hybrid microprobe for electrochemical and SERS monitoring, scanning and feedback stimulation and the preparation method thereof

#115
20130180018
2013-07-11

Quantitative characterization of metallic and semiconductor single-walled carbon nanotube ratios

#116
20130094020
2013-04-18

Probe having nano-fingers

#117
20130037978
2013-02-14

Methods of manufacturing diamond capsules

#118
20130036521
2013-02-07

High frequency deflection measurement of IR absorption with a modulated IR source

#119
20120304341
2012-11-29

Electronic control and amplification device for a local piezoelectric force measurement probe under a particle beam

#120
20120284882
2012-11-08

Prototyping station for atomic force microscope-assisted deposition of nanostructures

#121
20120204296
2012-08-09

Multiple modulation heterodyne infrared spectroscopy

#122
20120182412
2012-07-19

Inspection instrument

#123
20120167261
2012-06-28

High frequency deflection measurement of IR absorption

#124
20120117695
2012-05-10

AFM measuring method and system thereof

#125
20120079894
2012-04-05

Systems and methods for laser assisted sample transfer to solution for chemical analysis

#126
20120074306
2012-03-29

Spatially resolved thermal desorption/ionization coupled with mass spectrometry

#127
20120050718
2012-03-01

High frequency deflection measurement of IR absorption

#128
20110283428
2011-11-17

High frequency deflection measurement of IR absorption

#129
20110252874
2011-10-20

Indenter assembly

#130
20110205527
2011-08-25

Dynamic power control, beam alignment and focus for nanoscale spectroscopy

#131
20110203357
2011-08-25

Dynamic power control for nanoscale spectroscopy

#132
20110165558
2011-07-07

METHOD FOR IDENTIFYING INDIVIDUAL VIRUSES IN A SAMPLE

#133
20110113516
2011-05-12

Atomic force microscope with combined FTIR-Raman spectroscopy having a micro thermal analyzer

#134
20110079712
2011-04-07

Optical microscope

#135
20110055985
2011-03-03

Device and method for an atomic force microscope for the study and modification of surface properties

#136
20110005306
2011-01-13

Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy

#137
20100321693
2010-12-23

Minute measuring instrument for high speed and large area and method thereof

#138
20100263098
2010-10-14

Method and apparatus for the combined analysis of a sample with objects to be analyzed

#139
20100245816
2010-09-30

Near-field Raman spectroscopy

#140
20100229263
2010-09-09

Protein microscope

#141
20100141939
2010-06-10

Methods of polarization engineering and their applications

#142
20100088787
2010-04-08

Pump probe measuring device and scanning probe microscope apparatus using the device

#143
20100045970
2010-02-25

Infrared imaging using thermal radiation from a scanning probe tip

#144
20100038536
2010-02-18

Nanotip repair and characterization using field ion microscopy

#145
20100031405
2010-02-04

Tool tips with scanning probe microscopy and/or atomic force microscopy applications

#146
20090258157
2009-10-15

Field-aided preferential deposition of precursors

#147
20090249521
2009-10-01

High frequency deflection measurement of IR absorption

#148
20090249520
2009-10-01

Method and system for near-field spectroscopy using targeted deposition of nanoparticles

#149
20090241232
2009-09-24

Prototyping station for atomic force microscope-assisted deposition of nanostructures

#150
20090140137
2009-06-04

Ionization method and apparatus using electrospray

#151
20080283755
2008-11-20

High frequency deflection measurement of IR absorption

#152
20080276727
2008-11-13

MEMS nanoindenter

#153
20080265157
2008-10-30

Scanning ion probe systems and methods of use thereof

#154
20080258059
2008-10-23

Scanning probe microscope system

#155
20080256850
2008-10-23

Diamond structures as fuel capsules for nuclear fusion

#156
20080212174
2008-09-04

Positioning mechanism and microscope using the same

#157
20080173812
2008-07-24

Spin microscope based on optically detected magnetic resonance

#158
20080149822
2008-06-26

Protein microscope

#159
20080142711
2008-06-19

Methods and systems of performing device failure analysis, electrical characterization and physical characterization

#160
20080135750
2008-06-12

High speed measurement, analysis and imaging systems and methods for length scales from meter to sub-nanometer

#161
20080121800
2008-05-29

Cantilever holder and scanning probe microscope including the same

#162
20070234786
2007-10-11

Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography

#163
20070215804
2007-09-20

Quantum beam aided atomic force microscopy and quantum beam aided atomic force microscope

#164
20070180924
2007-08-09

Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy

#165
20070164216
2007-07-19

Scanning ion probe systems and methods of use thereof

#166
20060238758
2006-10-26

Near-field polarized-light measurement apparatus

#167
20060237639
2006-10-26

Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements

#168
20060230818
2006-10-19

Planar resonant tunneling sensor and method of fabricating and using the same

#169
20060222047
2006-10-05

Method and apparatus for localized infrared spectrocopy and micro-tomography using a combination of thermal expansion and temperature change measurements

#170
20060185424
2006-08-24

Integrated measuring instrument

#171
20060164638
2006-07-27

Near-field film-thickness measurement apparatus

#172
20060109480
2006-05-25

Surface texture measuring instrument

#173
20060097164
2006-05-11

Method for locally highly resolved, mass-spectroscopic characterization of surfaces using scanning probe technology

#174
20060071662
2006-04-06

Integrated EWP-STM spin resonance microscope

#175
20050285033
2005-12-29

Photomask defect correction method employing a combined device of a focused electron beam device and an atomic force microscope

#176
20050206877
2005-09-22

Shape measuring apparatus, shape measuring method, and aligning method

#177
20050183282
2005-08-25

Method and apparatus for measuring depth of holes formed on a specimen

#178
20050103996
2005-05-19

Measurement device for electron microscope

#179
20050035288
2005-02-17

Delay time modulation femtosecond time-resolved scanning probe microscope apparatus

#180
20050005688
2005-01-13

Dual stage instrument for scanning a specimen

#181
17535695
2023-04-04

Atomic force microscope equipped with optical measurement device and method of acquiring information on surface of measurement target using the same

#182
13835312
2014-07-29

Method and apparatus for infrared scattering scanning near-field optical microscopy