171149 ⎘
Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
Sub-classes:CONDUCTIVE FIXATION FOR ELECTRON MICROSCOPY
#2METHOD FOR INSPECTING SEMICONDUCTOR MANUFACTURING EQUIPMENT USING A WAFER
#3Method And Device For Localizing Charge Traps In A Crystal Lattice
#4PHOTOTHERMAL IMAGING DEVICE AND SYSTEM
#5TECHNOLOGIES FOR PHOTOTHERMAL ACTION-BASED TWO-DIMENSIONAL INFRARED SPECTROSCOPY WITH HIGH SPATIAL RESOLUTION
#6SCANNING PROBE MICROSCOPE AND SAMPLE USED THEREIN
#7Detection of Probabilistic Process Windows
#8METHODS FOR FEEDBACK DETECTION OF A MEMS ARRAY
#9SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS AND THEIR USE FOR PROCESS MONITORING AND CONTROL
#10DETECTION PROBE, PROBE MICROSCOPE, AND SAMPLE TEMPERATURE MEASURING METHOD
#11MEASUREMENT SYSTEM AND PROBE TIP LANDING METHOD
#12Method of Dispositioning and Control of a Semiconductor Manufacturing Process
#13Nano-Mechanical Infrared Spectroscopy System and Method Using Gated Peak Force IR
#14Nano robotic system for high throughput single cell DNA sequencing
#15SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS
#16Sample, method for manufacturing sample, and method for measuring infrared absorption spectrum
#17Photothermal imaging device and system
#18SYSTEM AND METHOD FOR DETERMINING AND/OR PREDICTING UNBIASED PARAMETERS ASSOCIATED WITH SEMICONDUCTOR MEASUREMENTS
#19DEVICE AND METHOD FOR COMPREHENSIVE CHARACTERIZATION, ANALYSIS, HETERO-GENITY AND PURITY QUANTIFICATION OF EXTRACELLULAR VESICLES
#20Method for electrically examining electronic components of an integrated circuit
#21Thermal desorbers
#22Method and apparatus for identifying sample position in atomic force microscope
#23Apparatus and method for examining and/or processing a sample
#24Multifunctional nanoprobes for scanning probe microscopy
#25Active bimodal AFM operation for measurements of optical interaction
#26System and method for generating and analyzing roughness measurements and their use for process monitoring and control
#27Method and apparatus for examining a measuring tip of a scanning probe microscope
#28Scanning probe microscope with a sample holder fed with electromagnetic wave signals
#29Detection of probabilistic process windows
#30Frequency tracking for subsurface atomic force microscopy
#31System for measuring the absorption of a laser emission by a sample
#32System and method for generating and analyzing roughness measurements
#33System and method for predicting stochastic-aware process window and yield and their use for process monitoring and control
#34System and method for low-noise edge detection and its use for process monitoring and control
#35Method and apparatus for resolution and sensitivity enhanced atomic force microscope based infrared spectroscopy
#36System and method for generating and analyzing roughness measurements and their use for process monitoring and control
#37Method for SEM-guided AFM scan with dynamically varied scan speed
#38Apparatus and method for examining and/or processing a sample
#39System and method for generating and analyzing roughness measurements and their use for process monitoring and control
#40System and method for generating and analyzing roughness measurements and their use for process monitoring and control
#41Thermal desorbers
#42Photothermal imaging device and system
#43Conductive fixation for electron microscopy
#44Device integrated with scanning probe for optical nanofocusing and near-field optical imaging
#45Surface sensitive atomic force microscope based infrared spectroscopy
#46System and method for generating and analyzing roughness measurements
#47Method and apparatus for examining a measuring tip of a scanning probe microscope
#48Multi-axis positioning device
#49Method for moving and transferring nanowires using tapered hair of diameter on micron range
#50Frequency modulation detection for photo induced force microscopy
#51Methods and apparatus for high throughput SEM and AFM for characterization of nanostructured surfaces
#52Method and apparatus for resolution and sensitivity enhanced atomic force microscope based infrared spectroscopy
#53Scanning probe microscope and scanning method using the same
#54Alignment system and method
#55System and method for generating and analyzing roughness measurements
#56System and method for generating and analyzing roughness measurements
#57System and method for generating and analyzing roughness measurements
#58Conical nano-carbon material functionalized needle tip and preparation method therefor
#59Method and apparatus for measuring a size of a crystal grain, and method for fabricating a poly-silicon thin film
#60Tunnel current control apparatus and tunnel current control method
#61Characterizing a height profile of a sample by side view imaging
#62SNOM device using heterodyne detection
#63Methods and devices for examining an electrically charged specimen surface
#64Apparatus and method for generating three-dimensional image of polymer solute substance which exists in liquid solvent
#65Rare earth nitride structure or device and fabrication method
#66Methods and apparatus for high throughput SEM and AFM for characterization of nanostructured surfaces
#67Microscope comprising a movable objective-camera system with rolling shutter camera sensor and a multi-color strobe flash and method for scanning microscope slides with proper focus
#68Method of carrier profiling in semiconductors
#69Linked micromechanical positioning apparatus for real-time testing and measurement
#70Method and apparatus for infrared scanning near-field optical microscopy based on photothermal effect
#71Photothermal imaging device and system
#72Method and apparatus for sub-diffraction infrared imaging and spectroscopy and complementary techniques
#73Imaging a gap between sample and probe of a scanning probe microscope in a substantially horizontal side view
#74Method and apparatus for resolution and sensitivity enhanced atomic force microscope based infrared spectroscopy
#75Imaging systems and methods using fluorescent nanodiamonds
#76METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN EUV PHOTOMASK
#77Peakforce photothermal-based detection of IR nanoabsorption
#78Method and apparatus for chemical and optical imaging with a broadband source
#79Infrared characterization of a sample using oscillating mode
#80Tip enhanced laser assisted sample transfer for biomolecule mass spectrometry
#81Systems and devices for non-destructive surface chemical analysis of samples
#82Accelerated training of a machine learning based model for semiconductor applications
#83Sample holder for scanning electron microscopy (SEM) and atomic force microscopy (AFM)
#843D profiling system of semiconductor chip and method for operating the same
#85Method of measuring a topographic profile and/or a topographic image
#86Methods and devices for examining an electrically charged specimen surface
#87PeakForce photothermal-based detection of IR nanoabsorption
#88Apparatus and method for examining a surface of a mask
#89Method and apparatus for infrared scattering scanning near-field optical microscopy
#90Microscope having a multimode local probe, tip-enhanced raman microscope, and method for controlling the distance between the local probe and the sample
#91Through process flow intra-chip and inter-chip electrical analysis and process control using in-line nanoprobing
#92Determining a state of a high aspect ratio hole using measurement results from an electrostatic measurement device
#93Systems and methods for non-destructive surface chemical analysis of samples
#94Method to obtain absorption spectra from near-field infrared scattering using homo-dyne detection
#95High heating rate thermal desorption for molecular surface sampling
#96Fabrication of a malleable lamella for correlative atomic-resolution tomographic analyses
#97Method and apparatus for direct measurement of the amplitude and/or phase of a molecular vibration
#98Method and apparatus for automated scanning probe microscopy
#99Method for measuring and analyzing surface structure of chip or wafer
#100Scanning probe microscope and measuring method using same
#101Apparatus and method for correlating images of a photolithographic mask
#102Probe-based data collection system with adaptive mode of probing
#103Scanning probe microscope with improved feature location capabilities
#104AFM-coupled microscale radiofrequency probe for magnetic resonance imaging and spectroscopy
#105Stress analysis of 3-D structures using tip-enhanced Raman scattering technology
#106Tuning-fork based near field probe for spectral measurement, near-field microscope using the same, and spectral analysis method using near-field microscope
#107Probe tip heating assembly
#108Systems and methods for laser assisted sample transfer to solution for chemical analysis
#109AFM-coupled microscale radiofrequency probe for magnetic resonance imaging and spectroscopy
#110Apparatus of analyzing a sample and a method for the same
#111Method and apparatus for analyzing and for removing a defect of an EUV photomask
#112Substrate measurement apparatus with electron distortion unit
#113Apparatus and method for investigating an object
#114Hybrid microprobe for electrochemical and SERS monitoring, scanning and feedback stimulation and the preparation method thereof
#115Quantitative characterization of metallic and semiconductor single-walled carbon nanotube ratios
#116Probe having nano-fingers
#117Methods of manufacturing diamond capsules
#118High frequency deflection measurement of IR absorption with a modulated IR source
#119Electronic control and amplification device for a local piezoelectric force measurement probe under a particle beam
#120Prototyping station for atomic force microscope-assisted deposition of nanostructures
#121Multiple modulation heterodyne infrared spectroscopy
#122Inspection instrument
#123High frequency deflection measurement of IR absorption
#124AFM measuring method and system thereof
#125Systems and methods for laser assisted sample transfer to solution for chemical analysis
#126Spatially resolved thermal desorption/ionization coupled with mass spectrometry
#127High frequency deflection measurement of IR absorption
#128High frequency deflection measurement of IR absorption
#129Indenter assembly
#130Dynamic power control, beam alignment and focus for nanoscale spectroscopy
#131Dynamic power control for nanoscale spectroscopy
#132METHOD FOR IDENTIFYING INDIVIDUAL VIRUSES IN A SAMPLE
#133Atomic force microscope with combined FTIR-Raman spectroscopy having a micro thermal analyzer
#134Optical microscope
#135Device and method for an atomic force microscope for the study and modification of surface properties
#136Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy
#137Minute measuring instrument for high speed and large area and method thereof
#138Method and apparatus for the combined analysis of a sample with objects to be analyzed
#139Near-field Raman spectroscopy
#140Protein microscope
#141Methods of polarization engineering and their applications
#142Pump probe measuring device and scanning probe microscope apparatus using the device
#143Infrared imaging using thermal radiation from a scanning probe tip
#144Nanotip repair and characterization using field ion microscopy
#145Tool tips with scanning probe microscopy and/or atomic force microscopy applications
#146Field-aided preferential deposition of precursors
#147High frequency deflection measurement of IR absorption
#148Method and system for near-field spectroscopy using targeted deposition of nanoparticles
#149Prototyping station for atomic force microscope-assisted deposition of nanostructures
#150Ionization method and apparatus using electrospray
#151High frequency deflection measurement of IR absorption
#152MEMS nanoindenter
#153Scanning ion probe systems and methods of use thereof
#154Scanning probe microscope system
#155Diamond structures as fuel capsules for nuclear fusion
#156Positioning mechanism and microscope using the same
#157Spin microscope based on optically detected magnetic resonance
#158Protein microscope
#159Methods and systems of performing device failure analysis, electrical characterization and physical characterization
#160High speed measurement, analysis and imaging systems and methods for length scales from meter to sub-nanometer
#161Cantilever holder and scanning probe microscope including the same
#162Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography
#163Quantum beam aided atomic force microscopy and quantum beam aided atomic force microscope
#164Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy
#165Scanning ion probe systems and methods of use thereof
#166Near-field polarized-light measurement apparatus
#167Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
#168Planar resonant tunneling sensor and method of fabricating and using the same
#169Method and apparatus for localized infrared spectrocopy and micro-tomography using a combination of thermal expansion and temperature change measurements
#170Integrated measuring instrument
#171Near-field film-thickness measurement apparatus
#172Surface texture measuring instrument
#173Method for locally highly resolved, mass-spectroscopic characterization of surfaces using scanning probe technology
#174Integrated EWP-STM spin resonance microscope
#175Photomask defect correction method employing a combined device of a focused electron beam device and an atomic force microscope
#176Shape measuring apparatus, shape measuring method, and aligning method
#177Method and apparatus for measuring depth of holes formed on a specimen
#178Measurement device for electron microscope
#179Delay time modulation femtosecond time-resolved scanning probe microscope apparatus
#180Dual stage instrument for scanning a specimen
#181Atomic force microscope equipped with optical measurement device and method of acquiring information on surface of measurement target using the same
#182Method and apparatus for infrared scattering scanning near-field optical microscopy