171196 ⎘
General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group; Probe holders with compensation for temperature or vibration induced errors
ACTIVE DITHER BALANCING OF A MOTION STAGE FOR SCANNING PROBE MICROSCOPY
#2Arrangement Having a Measuring Apparatus for a Scanning Probe Microscope, Scanning Probe Microscope, and Method for Operating
#3Scanning probe microscope, scan head and method
#4Active noise isolation for tunneling applications (ANITA)
#5SYSTEM AND METHOD FOR OPTICAL DRIFT CORRECTION
#6Sheathing for fluid probe
#7Scanning probe microscopy system for mapping nanostructures on a surface of a sample and metrology frame therefore
#8Detection device having attached probe
#9Scanning probe microscope with a reduced Q-factor
#10Structure for achieving dimensional stability during temperature changes
#11Three-dimensional fine movement device
#12Low drift scanning probe microscope
#13Active damping of high speed scanning probe microscope components
#14Cantilever excitation device and scanning probe microscope
#15Apparatus and Method for Isolating and Measuring Movement in Metrology Apparatus
#16Low drift scanning probe microscope
#17Scanning probe microscope having support stage incorporating a kinematic flexure arrangement
#18Alignment and anti-drift mechanism
#19Athermal atomic force microscope probes
#20Vibration compensation in probe microscopy
#21Active scanner bow compensator
#22Low temperature device with low-vibration sample holding device
#23CONTROLLED ATOMIC FORCE MICROSCOPE
#24Apparatus structure and scanning probe microscope including apparatus structure
#25Scanning probe apparatus
#26Method and a device for the positioning of a displaceable component in an examining system
#27Scanning probe microscope
#28Scanning probe microscope
#29Method and apparatus of compensating for position shift
#30Probe position control system and method
#31Drive stage for scanning probe apparatus, and scanning probe apparatus
#32Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography
#33Optical detection alignment/tracking method and apparatus
#34Active damping of high speed scanning probe microscope components
#35Scanning probe apparatus
#36Scanning probe apparatus
#37Metrology instruments
#38Scanning probe apparatus
#39Micromotion device and scanning probe microscope
#40Scanning probe apparatus and drive stage therefor
#41Vibration-type cantilever holder and scanning probe microscope
#42System for wide frequency dynamic nanomechanical analysis
#43PROBE AND METHOD FOR A SCANNING PROBE MICROSCOPE
#44Surface texture measuring probe and microscope utilizing the same
#45Balanced momentum probe holder
#46Scanning probe microscopy with inherent disturbance suppression
#47Processing method using probe of scanning probe microscope
#48XY platform device with nanoscale precision
#49System for wide frequency dynamic nanomechanical analysis
#50Scanning probe microscope and measurement method using the same